Download presentation
Presentation is loading. Please wait.
1
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Parylene-based pressure sensor for IOP measurement Presenter : Chia-Min Lin (9535811) Research from Caltech Micromachining Laboratory
2
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Outline Motivation Design concept / Fabrication process Results Summary
3
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Motivation Glaucoma is a debilitating disease affecting the optic nerve that results in loss of vision for hundreds of millions of people worldwide. Raised intraocular pressure is a significant risk factor for developing glaucoma. Wikipedia
4
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Traditional IOP sensor Contact tonometerNon-contact tonometer Wikipedia
5
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Implantable biodevice P.-J. Chen et al., JMM, 2007.
6
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Bourdon tube theory Wikipedia
7
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Microchannel M. J. de Boer et al., JMEMS, 2000. SurfaceBondingBuried
8
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Parylene microchannel P.-J. Chen et al., μTAS’05. Concept and Fabrication resultsFabrication results
9
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d P.-J. Chen et al., Lab Chip, 2006.
10
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Spiral-tube pressure sensor (1G) P.-J. Chen et al., IEEE MEMS’05. Apply Bourdon tube theoryFabrication process Unpowered
11
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d Fabrication resultsTesting in water results P.-J. Chen et al., Sensors and Actuators A, 2006.
12
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Implantable pressure sensor (2G) P.-J. Chen et al., MMB’06. Fabrication processUnpowered Monolithic fabrication and packaging
13
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d Fabrication resultsImplatable results
14
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d P.-J. Chen et al., JMM, 2007. P.-J. Chen et al., μTAS’06. In vitro (water)
15
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d In vivo (rabitt)Ex vivo (rabitt)
16
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Summary An implantable, unpowered micromechanical parylene-based pressure sensor has been successfully developed as a part of a novel paradigm for intraocular pressure (IOP) sensing. Monolithic fabrication and packaging of the microdevices have been successfully demonstrated. The micromachined IOP sensors were characterized in vitro, ex vivo, as well as in vivo.
17
Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Thanks for your attention !
Similar presentations
© 2025 SlidePlayer.com. Inc.
All rights reserved.