1. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Parylene-based pressure sensor for IOP measurement Presenter : Chia-Min Lin (9535811) Research from Caltech Micromachining Laboratory

2. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Outline  Motivation  Design concept / Fabrication process  Results  Summary

3. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Motivation  Glaucoma is a debilitating disease affecting the optic nerve that results in loss of vision for hundreds of millions of people worldwide.  Raised intraocular pressure is a significant risk factor for developing glaucoma. Wikipedia

4. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Traditional IOP sensor Contact tonometerNon-contact tonometer Wikipedia

5. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Implantable biodevice P.-J. Chen et al., JMM, 2007.

6. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Bourdon tube theory Wikipedia

7. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Microchannel M. J. de Boer et al., JMEMS, 2000. SurfaceBondingBuried

8. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Parylene microchannel P.-J. Chen et al., μTAS’05. Concept and Fabrication resultsFabrication results

9. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d P.-J. Chen et al., Lab Chip, 2006.

10. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Spiral-tube pressure sensor (1G) P.-J. Chen et al., IEEE MEMS’05. Apply Bourdon tube theoryFabrication process Unpowered

11. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d Fabrication resultsTesting in water results P.-J. Chen et al., Sensors and Actuators A, 2006.

12. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Implantable pressure sensor (2G) P.-J. Chen et al., MMB’06. Fabrication processUnpowered Monolithic fabrication and packaging

13. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d Fabrication resultsImplatable results

14. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d P.-J. Chen et al., JMM, 2007. P.-J. Chen et al., μTAS’06. In vitro (water)

15. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Cont’d In vivo (rabitt)Ex vivo (rabitt)

16. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Summary  An implantable, unpowered micromechanical parylene-based pressure sensor has been successfully developed as a part of a novel paradigm for intraocular pressure (IOP) sensing.  Monolithic fabrication and packaging of the microdevices have been successfully demonstrated.  The micromachined IOP sensors were characterized in vitro, ex vivo, as well as in vivo.

17. Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin 2007/12/26 Thanks for your attention !