1. 2015/6/12 The Micro-Systems & Control Lab. 1 MINIATURIZED FLOW SENSOR WITH PLANAR INTEGRATED SENSOR STRUCTURES ON SEMICIRCULAR SURFACE CHANNELS Reporter ： Song-En Gong( 龔頌恩 ) Adviser ： Cheng-Hsien Liu( 劉承賢 ) M. Dijkstra, M.J. de Boer, J.W. Berenschot, T.S.J. Lammerink, R.J. Wiegerink, M. Elwenspoek MESA+ Research Institute, University of Twente, The Netherlands MEMS 2007, Kobe, Japan, 21-25 January 2007, pp.123-126

2. 2015/6/12 The Micro-Systems & Control Lab. 2 Outline Abstract Introduction Fabrication and Result Conclusion

3. Abstract A calorimetric miniaturized flow sensor A linear sensor response measured for DI water flow from 40 nl ⋅ min-1 up to 300 nl ⋅ min-1 A versatile technological concept is used to realize a sensor with thermally-isolated freely- suspended silicon-nitride microchannels The flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume

4. 2015/6/12 The Micro-Systems & Control Lab. 4 Introduction Flow sensor 1 Flow sensor 2 REF: Yingchen Yang,2007 REF: 許志豪,2005

5. 2015/6/12 The Micro-Systems & Control Lab. 5 Introduction Calorimetric flow sensor REF: N. Sabaté,2003 REF:Seunghyun Kim,2003

6. Introduction 2015/6/12 Multimedia & Database Lab. 6 REF:Yoshihiro Mizuno REF:Jun Xie Coupling with microchannel For flow rate measure

7. Fabrication 2015/6/12 The Micro-Systems & Control Lab. 7

8. 2015/6/12 The Micro-Systems & Control Lab. 8 Fabrication 5 mm long microchannel has 4.5 nl total volume Two sensor resistors 40 μm up- and downstream of the heater

9. Result 2015/6/12 The Micro-Systems & Control Lab. 9 CFDRC simulation 0.25 μl ⋅ min-1 water flow fluid is fully heated to a uniform temperature various water flow rates from 0 μl ⋅ min-1 up to 2 μl ⋅ min-1

10. Result 2015/6/12 Multimedia & Database Lab. 10 DI water flow was measured by applying a current of 5 mA to the heater resistor dissipating 1.9 mW A linear sensor response ΔV having a flow sensitivity of SV = 218 μV / μl ⋅ min-1

11. Conclusion 2015/6/12 The Micro-Systems & Control Lab. 11 A linear calorimetric sensor response was measured for DI water flow from 40 nl ⋅ min-1 up to 300 nl ⋅ min-1 Hydraulic resistance as low as 6.17 kPa / μl ⋅ min-1 for water A miniaturized calorimetric flow sensor was developed using a versatile surface channel concept Up to a certain extent, the nonlinear response at higher flow rates can be corrected for by operating the heater at constant temperature

12. Conclusion No experiment result shows low hydraulic resistance Signal is small

13. END 2015/6/12 The Micro-Systems & Control Lab. 13 工程師節快樂

14. Fluidic interfacing to the microchannel is made possible by directly applying O-rings or capillary tubing connectors on top of the microchannel inlet and outlet imbedded in the substrate surface. Good thermally isolated channels

15. 2015/6/12 Multimedia & Database Lab. 15 Strain  max =z/  =zM/EI Resistive noise L-x M(x) M0M0 F y(x) 摟 = 曲率半徑

16. 2015/6/12 Multimedia & Database Lab. 16 懸臂樑 K

17. 2015/6/12 Multimedia & Database Lab. 17

18. 2015/6/12 Multimedia & Database Lab. 18 VeVe V+V+ V-V- R R R+  R