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Photodiodes Photons incident on the depletion layer induce a current.

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1 Photodiodes Photons incident on the depletion layer induce a current.
In most cases, best response in the NIR. Response is linear over 6 – 7 orders of incident radiant power Photodiodes are used in consumer electronics devices such as compact disc players, smoke detectors, and the receivers for remote controls in VCRs and televisions. In a photodiode, absorption of EM radiation by a pn junction diode causes promotion of electrons from the valence band to the conduction band and thus, the formation of electron-hole pairs in the depletion region (as illustrated) A photodiode is a p-n junction or p-i-n structure. When light with sufficient photon energy strikes a semiconductor, photons can be absorbed, resulting in generation of a mobile electron and electron hole. If the absorption occurs in the junction's depletion region, these carriers are swept from the junction by the built-in field of the depletion region, producing a photocurrent. The depletion region forms across the P-N junction when the junction is in thermal equilibrium, i.e. things are in a steady state. Electrons and holes will diffuse into regions with lower concentrations of electrons and holes, much as ink will diffuse into water until it is uniformly distributed throughout. N-type semiconductor has an excess of free electrons, and P-type has an excess of holes. Therefore when N-doped and P-doped pieces of semiconductor are placed together to form a junction, electrons will diffuse into the P side and holes will diffuse into the N side. However when a hole and an electron come into contact, they eliminate each other through recombination. This bares the donor atoms adjacent to the depletion region, which are now charged ions. The ions are positive on the N side and negative on the P side, creating an electric field that counteracts the continued diffusion of charge carriers. When the electric field is sufficient to repel incoming holes and electrons, the depletion region reaches its equilibrium width. Integrating the electric field in the depletion region gives what is known as the built-in potential (also called the junction voltage or barrier voltage). Under reverse bias (P negative with respect to N) this potential is increased, further widening the depletion zone. Forward bias (P positive with respect to N) narrows the zone and eventually reduces it to nothing, making the junction conductive and allowing free flow of charge carriers. The depletion region area is void of all majority carriers. Gain much lower than PMT but simplicity, excellent linearity, and small size make them attractive for applications where light levels are relatively hgih. Ingle and Crouch, Spectrochemical Analysis

2 Spectral Response of Photodiodes
Comparison with photomultipliers Advantages compared to photomultipliers: Excellent linearity of output current as a function of incident light Spectral response from 190 nm to 1100 nm (silicon), longer wavelengths with other semiconductor materials Low noise Ruggedized to mechanical stress Low cost Compact and light weight Long lifetime High quantum efficiency, typically 80% No high voltage required Disadvantages compared to photomultipliers: Small area No internal gain (except avalanche photodiodes, but their gain is typically 102–103 compared to up to 108 for the photomultiplier) Much lower overall sensitivity Photon counting only possible with specially designed, usually cooled photodiodes, with special electronic circuits Response time for many designs is slower Shinya Inoue and Kenneth Spring, Video Microscopy, Plenum Press, New York, 1997.

3 Avalanche Photodiode Hamamatsu Catalog
APDs are high-speed, high sensitivity photodiodes utilizing an internal gain mechanism that functions by applying a reverse voltage. When light enters a photodiode, electron-hole pairs are generated if the light energy is higher than the band gap energy. When electron-hole pairs are generated in the depletion layer of a photodiode with a reverse voltage applied to the pn junction, the electrons drift towards the N+ side while th eholes drift towards the P+ slide due to the electric field developed across the pn junction. The drift speed of these electron-hole pairs depends on the electric field strength. If the field is increased to a certain level, the electron-hole pairs are more likely to collide with the xtal lattice. If the reverse voltage is increased even further, some of the electron-hole pairs which escape collision with the xtal lattice will have a great deal of energy. When these electron-hole pairs finally do collide with the lattice, ionization will generate new electron-hole pairs… starting a chain reaction… avalanche multiplication of the photocurrent. The tutorial initializes with both the Photon Intensity and the Reverse Bias sliders set to an arbitrary mid-range value. Photons (yellow) entering the diode first pass through the silicon dioxide layer and then through the n and p layers before entering the depletion region where they excite free electrons (red) and holes (blue), which then migrate to the cathode and anode, respectively. Use the sliders to control the number of photons entering the diode and the reverse bias, which determines the number of electron/hole pairs generated by the photons. When a semiconductor diode has a reverse bias (voltage) applied and the crystal junction between the p and n layers is illuminated, then a current will flow in proportion to the number of photons incident upon the junction. Avalanche diodes are very similar in design to the silicon p-i-n diode, however the depletion layer in an avalanche photodiode is relatively thin, resulting in a very steep localized electrical field across the narrow junction. In operation, very high reverse-bias voltages (up to 2500 volts) are applied across the device. As the bias voltage is increased, electrons generated in the p layer continue to increase in energy as they undergo multiple collisions with the crystalline silicon lattice. This "avalanche" of electrons eventually results in electron multiplication that is analogous to the process occurring in one of the dynodes of a photomultiplier tube. Avalanche photodiodes are capable of modest gain ( ), but exhibit substantial dark current, which increases markedly as the bias voltage is increased (see Figure 1). They are compact and immune to magnetic fields, require low currents, are difficult to overload, and have a high quantum efficiency that can reach 90 percent. Avalanche photodiodes are now being used in place of photomultiplier tubes for many low-light-level applications.

4 Photodiode Arrays (PDA or DAD)
Simultaneous  detection in a spectrophotometer. Arrays of silicon photodiodes… typically contain 256, 512, 1024 or 2048 elements arranged in a linear manner. Each diode in the array is sequentially interrogated… takes a few milliseconds Douglas A. Skoog and James J. Leary, Principles of Instrumental Analysis, Saunders College Publishing, Fort Worth, 1992.

5 Charge Coupled Device (CCD)
Charge-coupled devices (CCDs) are silicon-based integrated circuits consisting of a dense matrix of photodiodes that operate by converting light energy in the form of photons into an electronic charge. Electrons generated by the interaction of photons with silicon atoms are stored in a potential well and can subsequently be transferred across the chip through registers and output to an amplifier. The schematic diagram illustrated in Figure 1 shows various components that comprise the anatomy of a typical CCD. Advantages over traditional (PMT) detectors: Detects intensity with spatial resolution, Increased Sensitivity, Increased throughput due to lack of slits, More durable Disadvantages to traditional detectors: higher dark noise (important at low detection limits), Often requires liquid N2 cooling Most of the photons with a wavelength between 450 and 700 nanometers are absorbed either in the depletion region or within the bulk material (silicon) of a CCD substrate. Those absorbed into the depletion region will have a quantum efficiency approaching 100 percent, whereas photons entering the substrate liberate electrons that experience a three-dimensional random walk and either recombine with holes or diffuse into the depletion region. For those electrons that have negligible diffusion lengths, the quantum efficiency is very low, but those with high diffusion lengths eventually reach a charge well. Ingle and Crouch, Spectrochemical Analysis

6 CCD Architecture Image Area Top View SiO2 backing Pixel Array
insulating oxide Image Area When a ultraviolet, visible, or infrared photon strikes a silicon atom resting in or near a CCD photodiode, it will usually produce a free electron and a "hole" created by the temporary absence of the electron in the silicon crystalline lattice. The free electron is then collected in a potential well (located deep within the silicon in an area known as the depletion layer), while the hole is forced away from the well and eventually is displaced into the silicon substrate. Individual photodiodes are isolated electrically from their neighbors by a channel stop, which is formed by diffusing boron ions through a mask into the p-type silicon substrate. The principal architectural feature of a CCD is a vast array of serial shift registers constructed with a vertically stacked conductive layer of doped polysilicon separated from a silicon semiconductor substrate by an insulating thin film of silicon dioxide (see Figure 2). After electrons have been collected within each photodiode of the array, a voltage potential is applied to the polysilicon electrode layers (termed gates) to change the electrostatic potential of the underlying silicon. The silicon substrate positioned directly beneath the gate electrode then becomes a potential well capable of collecting locally-generated electrons created by the incident light. Neighboring gates help to confine electrons within the potential well by forming zones of higher potentials, termed barriers, surrounding the well. By modulating the voltage applied to polysilicon gates, they can be biased to either form a potential well or a barrier to the integrated charge collected by the photodiode. Top View serial register amplifier and Bryce Marquis (Haynes Lab)

7 Bryce Marquis (Haynes Lab)
CCD Architecture “Channel Stops” form horizontal pixel boundaries Top View 3 electrodes form vertical pixel boundaries One pixel The most common CCD designs have a series of gate elements that subdivide each pixel into thirds by three potential wells oriented in a horizontal row. Each photodiode potential well is capable of holding a number of electrons that determines the upper limit of the dynamic range of the CCD. After being illuminated by incoming photons during a period termed integration, potential wells in the CCD photodiode array become filled with electrons produced in the depletion layer of the silicon substrate. Measurement of this stored charge is accomplished by a combination of serial and parallel transfers of the accumulated charge to a single output node at the edge of the chip. The speed of parallel charge transfer is usually sufficient to be accomplished during the period of charge integration for the next image. After being collected in the potential wells, electrons are shifted in parallel, one row at a time, by a signal generated from the vertical shift register clock. The electrons are transferred across each photodiode in a multi-step process (ranging from two to four steps). This shift is accomplished by changing the potential of the holding well negative, while simultaneously increasing the bias of the next electrode to a positive value. The vertical shift register clock operates in cycles to change the voltages on alternate electrodes of the vertical gates in order to move the accumulated charge across the CCD. Figure 1 illustrates a photodiode potential well adjacent to a transfer gate positioned within a row of CCD gates. After traversing the array of parallel shift register gates, the charge eventually reaches a specialized row of gates known as the serial shift register. Here, the packets of electrons representing each pixel are shifted horizontally in sequence, under the control of a horizontal shift register clock, toward an output amplifier and off the chip. The entire contents of the horizontal shift register are transferred to the output node prior to being loaded with the next row of charge packets from the parallel register. In the output amplifier, electron packets register the amount of charge produced by successive photodiodes from left to right in a single row starting with the first row and proceeding to the last. This produces an analog raster scan of the photo-generated charge from the entire two-dimensional array of photodiode sensor elements. Once again every third electrode is in the serial register connected together. Below the image area (the area containing the horizontal electrodes) is the "Serial register". This also consists of a group of small surface electrodes. There are three electrodes for every column of the image area Electrode Insulating oxide n-type silicon p-type silicon Cross section Bryce Marquis (Haynes Lab)

8 Charge Generation/Collection
-V +V -V -V +V -V N-type silica is doped with pentavalent species = excess electrons P-type is doped with trivalent species = excess holes N-type Photons entering the CCD create electron-hole pairs. The electrons are then attracted towards the most positive potential in the device where they create "charge packets". Each packet corresponds to one pixel. P-type Incident photons excite electron-hole pairs, electrons gather in potential wells in each pixel

9 CCD Rain Bucket Analogy
1. Generation 2. Collection 3. Transfer 4. Measurement the operation of a CCD is as follows: An number of buckets (Pixels) are distributed across a field (Focal Plane of a telescope) in a square array. The buckets are placed on top of a series of parallel conveyor belts and collect rain fall (Photons) across the field. The conveyor belts are initially stationary, while the rain slowly fills the buckets (During the course of the exposure). Once the rain stops (The camera shutter closes) the conveyor belts start turning and transfer the buckets of rain , one by one , to a measuring cylinder (Electronic Amplifier) at the corner of the field (at the corner of the CCD). Dump the first set of buckets into the special conveyor belt (the serial register) at the end of the array. Now, leave the ordinary conveyor belts fixed for a moment, and start to shift the special conveyor belt so that the first bucket empties into the graduated cylinder (readout amplifier). Record the amount of water (charge) in this first bucket, then shift the special conveyor belt again to bring the second bucket to the graduated cylinder. Record this bucket's contents, too, and then repeat until we've read all the buckets on the special conveyor belt. Shinya Inoue and Kenneth Spring, Video Microscopy, Plenum Press, New York, 1997.

10 Charge Transfer Every third electrode is 2 coupled, charge packets
are walked towards serial registry 2 +5V 0V -5V 1 +5V 0V -5V 3 to serial registry 1 In the following few slides, the implementation of the "conveyor belts" as actual electronic structures is explained. The charge is moved along these conveyor belts by modulating the voltages on the electrodes positioned on the surface of the CCD. The electrodes are grouped so that every third electrode shares the same voltage. Now, watch as the voltages supplied to the electrodes change, and the electron packets move in response. 2 3 Time-slice shown in diagram

11 +5V 0V -5V 2 +5V 0V -5V 1 +5V 0V -5V 3 1 2 3

12 +5V 0V -5V 2 +5V 0V -5V 1 +5V 0V -5V 3 1 2 3

13 +5V 0V -5V 2 +5V 0V -5V 1 +5V 0V -5V 3 1 2 3

14 +5V 0V -5V 2 +5V 0V -5V 1 +5V 0V -5V 3 1 At the end, we have moved all the charge packets over one pixel, and the voltages are back where they started. By repeating the sequence of voltage changes, we can move the packets another pixel down the column. 2 3

15 +5V 0V -5V 2 +5V 0V -5V 1 +5V 0V -5V 3 1 2 3

16 +5V 0V -5V 2 +5V 0V -5V 1 +5V 0V -5V 3 1 2 3

17 Charge Transportation
amplifier Pixels at end of the array dump charge into serial register Serial register walks charge packets to amplifier, where it is measured.

18 Quantum Efficiency www.piacton.com
The quantum efficiency of a charge-coupled device (CCD) is a property of the photovoltaic response defined as the number of electron-hole pairs created and successfully read out by the device for each incoming photon. This property is especially important for low-light imaging applications such as fluorescence microscopy where emission photon wavelengths are often in the nanometer range and have a relatively high absorption coefficient in silicon. Standard CCDs, which are illuminated in the front of the device through the gate electrodes and oxide coatings, are more sensitive to green and red wavelengths in the region between 550 and 900 nanometers. The spectral sensitivity of the CCD differs from that of a simple silicon photodiode detector because the CCD surface has channels used for charge transfer that are shielded by polysilicon gate electrodes, thin films of silicon dioxide, and a silicon nitride passivation layer. These structures, used to transfer the charge from the imaging area and to protect the CCD from humidity and electrostatic discharge, absorb the shorter wavelengths (450 nanometers and lower), reducing the blue sensitivity of the device. Polysilicon transmittance starts to decrease below 600 nanometers and the material becomes essentially opaque to photons at 400 nanometers, but absorption depends upon gate thickness and interference effects of light passing through thin films on the CCD surface. Interline-transfer CCDs have photodiodes that deviate from standard polysilicon gate structure, a factor that reduces interference effects and produces a more ideal and uniform spectral response. These devices are also usually equipped with vertical antibloom drains that produce a reduced response to longer wavelength photons. As photons above 700 nanometers penetrate deep into the silicon substrate close to the buried drain, they have a greater chance of liberating electrons that will diffuse into the drain and be instantly removed. Quantum efficiency is also dependent upon gate voltage, with lower voltages producing small depletion regions and visa versa.

19 Noise Sources in CCD Shot Noise Dark Signal Noise Readout Noise
Statistical variation of signal over time Increases with the square of the intensity Dark Signal Noise Caused by thermal liberation of electrons Strongly coupled to temperature Readout Noise Summation of noise associated with amplification of signal, and conversion from analogue to digital Increases with the processing speed

20 Other Issues: Bad Pixels
Increasing hot pixels Hot Pixels Increased charge accumulation due to variations in chip surface. Dead Pixels Defective pixels that do not respond.

21 Other Issues: Blooming
Saturation and blooming are related phenomena that occur in all charge-coupled device (CCD) image sensors under conditions in which either the finite charge capacity of individual photodiodes, or the maximum charge transfer capacity of the CCD, is reached. Once saturation occurs at a charge collection site, accumulation of additional photo-generated charge results in overflow, or blooming, of the excess electrons into adjacent device structures. A number of potentially undesirable effects of blooming may be reflected in the sensor output, ranging from white image streaks and erroneous pixel signal values (as illustrated in Figure 1) to complete breakdown at the output amplification stage, producing a dark image. The charge capacity of an image sensor can be limited by either the individual photodiode characteristics (pixels) or the CCD itself, and is defined by the maximum amount of charge that the image sensor can collect and transfer while still maintaining all of its design performance specifications. This capacity limit is termed the saturation charge level, and when this limit is reached, the pixel or CCD is described as being saturated. Exceeding the saturation level results in the generation of blooming artifacts in captured images. Blooming refers to the overflow of excess confined photo-generated charge from a photodiode well into adjacent structures when the maximum well charge capacity is exceeded. The extent of degradation of adjacent image areas as a result of blooming depends on the CCD fabrication details and the degree of charge overflow. Since the occurrence of blooming is triggered by the saturation condition, it is useful to know the detector output voltage corresponding to its maximum charge capacity. T

22 Other Issues: Cosmic Rays
Noise From Outer Space!!! * indicates cosmic rays

23 Other Issues: Etaloning
Advantage: S/N increases over a factor of 2 due to increased throughput Decreases shot noise Disadvantages: Decreased saturation limits Etaloning limits NIR detection

24 Other Features: Binning
On Chip Pixel Binning Increases S/N Shot noise decrease Increased speed Less storage space needed Decreases resolution Pixel binning is a clocking scheme used to combine the charge collected by several adjacent CCD pixels, and is designed to reduce noise and improve the signal-to-noise ratio and frame rate of digital cameras. The binning process is performed by on-chip CCD clock timing circuitry that assumes control of the serial and parallel shift registers prior to amplification of the CCD analog signal. To help illustrate the pixel binning process, refer to Figure 1, which reviews an example of 2 x 2 binning. A schematic drawing of a 4 x 4 parallel shift register pixel array is illustrated in Figure 1(a), along with a four-gate serial shift register and summing pixel or well (also termed an output node). Illuminating photons impact the CCD photodiodes, creating a pool of electrons that accumulates in each pixel, shown in Figure 1(b) as a cluster of four blue-shaded squares in the upper right hand corner of the parallel shift register. The number of electrons that each pixel can accommodate is termed the well depth and ranges from about 30,000 to 350,000, depending upon the CCD specifications. Dynamic range of a CCD is directly proportional to the well depth. Incident light levels and exposure time determine the number of electrons collected at each photogate or pixel site. After exposure of the CCD to one illumination cycle is completed, the electrons are transferred through the parallel and serial shift registers to a output amplifier and then digitized by an analog-to-digital (A/D) converter circuit. Binning can be used to increase focusing accuracy by reducing the time necessary for image acquisition, while providing greater sensitivity to lower out-of-focus light levels. To illustrate this process, Figure 1(b) shows each integrated pixel in the parallel register stepping by an increment of one gate to yield the arrangement shown in Figure 1(c). Here, the electrons from two pixels remain in the parallel shift register, while those from the other two have been transferred to the serial shift register. Another step (Figure 1(c)), shifts the remaining electrons in the parallel shift register to fill the adjacent gate elements in the serial register (Figure 1(d)). The final steps involve shifting of charge from the serial register, two pixels at a time, to the summing pixel (Figure 1(d) and (e)). Figure 1(f) illustrates the combined charge of four pixels in the summing well awaiting transfer to the output amplifier, where the signal will be converted to a voltage and then transferred to other integrated circuits for further amplification and digitization. The process continues until the entire array has been read out. In this example, the area of four adjacent pixels has been combined into one larger pixel, sometimes referred to as a super pixel. The signal-to-noise ratio has been increased by a factor of four, but the image resolution is cut by 50 percent.

25 Are you getting the concept?
List the advantages and disadvantages of using each of the discussed detectors to achieve single molecule detection. Pixel binning is a clocking scheme used to combine the charge collected by several adjacent CCD pixels, and is designed to reduce noise and improve the signal-to-noise ratio and frame rate of digital cameras. The binning process is performed by on-chip CCD clock timing circuitry that assumes control of the serial and parallel shift registers prior to amplification of the CCD analog signal. To help illustrate the pixel binning process, refer to Figure 1, which reviews an example of 2 x 2 binning. A schematic drawing of a 4 x 4 parallel shift register pixel array is illustrated in Figure 1(a), along with a four-gate serial shift register and summing pixel or well (also termed an output node). Illuminating photons impact the CCD photodiodes, creating a pool of electrons that accumulates in each pixel, shown in Figure 1(b) as a cluster of four blue-shaded squares in the upper right hand corner of the parallel shift register. The number of electrons that each pixel can accommodate is termed the well depth and ranges from about 30,000 to 350,000, depending upon the CCD specifications. Dynamic range of a CCD is directly proportional to the well depth. Incident light levels and exposure time determine the number of electrons collected at each photogate or pixel site. After exposure of the CCD to one illumination cycle is completed, the electrons are transferred through the parallel and serial shift registers to a output amplifier and then digitized by an analog-to-digital (A/D) converter circuit. Binning can be used to increase focusing accuracy by reducing the time necessary for image acquisition, while providing greater sensitivity to lower out-of-focus light levels. To illustrate this process, Figure 1(b) shows each integrated pixel in the parallel register stepping by an increment of one gate to yield the arrangement shown in Figure 1(c). Here, the electrons from two pixels remain in the parallel shift register, while those from the other two have been transferred to the serial shift register. Another step (Figure 1(c)), shifts the remaining electrons in the parallel shift register to fill the adjacent gate elements in the serial register (Figure 1(d)). The final steps involve shifting of charge from the serial register, two pixels at a time, to the summing pixel (Figure 1(d) and (e)). Figure 1(f) illustrates the combined charge of four pixels in the summing well awaiting transfer to the output amplifier, where the signal will be converted to a voltage and then transferred to other integrated circuits for further amplification and digitization. The process continues until the entire array has been read out. In this example, the area of four adjacent pixels has been combined into one larger pixel, sometimes referred to as a super pixel. The signal-to-noise ratio has been increased by a factor of four, but the image resolution is cut by 50 percent.


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