1. Smart Dust Sensor Interface Power: battery, solar, cap. Comm: LOS Optical (CCR, Laser) UCB: Pister, Kahn, Boser MLB: Morris UTRC: Murray Goal: Distributed sensor networks Sensor nodes: Autonomous 1mm 3 Challenges: 1 Joule 1 kilometer 1 piece

2. Smart Dust Components Laser diode III-V process Passive CCR comm. MEMS/polysilicon Active beam steering laser comm. MEMS/optical quality polysilicon Sensor MEMS/bulk, surface,... Analog I/O, DSP, Control COTS CMOS Solar cell CMOS or III-V Thick film battery Sol/gel V 2 O 5 Power capacitor Multi-layer ceramic 1-2 mm

3. Dust components Thick film battery: 1mm^3, 1 J storage Power capacitor: 0.25mm^3, 1uJ storage Solar cell: 1x1x0.1mm^3, 0.1mW generation CMOS controller: 1x1x0.1mm^3 Sensor: 0.5x0.5x0.1mm^3 Passive CCR comm: 0.5x0.5x0.1mm^3, 10kbps, 1uW, 1km Active laser comm: 1x0.5x0.1mm^3, 1Mbps, 10mW, 10km Total volume: < 1.5 mm^3 Total mass: < 5 mgm

4. Airborne Dust Mapleseed solar cell MEMS/Hexsil/SOI 1-5 cm Controlled auto-rotator MEMS/Hexsil/SOI Rocket dust MEMS/Hexsil/SOI