1. 1 Defects and Disorders in Semiconductors Jermell Powell ECE 423 11/15/06

2. 2 Defect types Point defects Line defects Area defects Cluster defects

3. 3 Point defects Types Frenkel defect pair

4. 4 Line defects Example

5. 5 Wide defects Area defect  Epitaxial mound Cluster defect  Dust particle  Mask scratch

6. 6 Defect density d(r) = d{1 + 2.5 exp [0.34 X 19(1 - r/R)]}

7. 7 Causes of defects Semiconductor doping Czochralski method

8. 8 Advanced defects Antisite  Nonstoichiometric Void defects

9. 9 Divacancy Cause Effect  V-V + I si -> V-V + I si  V-V + I si -> V  V-V + 2I si -> V-V + 2I si  V-V + 2I si -> V + I si  V-V + 2I si -> 0

10. 10 Results Positive  Oxygen in Silicon Lifetimes Diffusion lengths Mobilities Solar cells, IC

11. 11  ZnTe and CdTe Chlorine doping Copper doping  GaAs, Arsenic heavy

12. 12 Detrimental  Categories of Inoperability  Oxygen in Silicon  Dielectric breakdown

13. 13 Questions? Thank you