1. Distributed Microsystems Laboratory: Developing Microsystems that Make Sense Denise Wilson, Associate Professor Department of Electrical Engineering University of Washington Seattle, Washington 98195-2500 Research Assistants (The People who Do Wonderful Work): Ranajit Banerjee, Brian Ferguson, Lisa Hansen, Linda Lee, Susan Soggs, Vaibhav Vaidya July 2006

2. Distributed Microsystems Laboratory: Developing Microsystems that Make Sense Goals: To perform true systems integration for existing or incrementally advanced sensor technologies in such a way as to meet system-level constraints related to: power consumption robustness in real-world environments auto-calibration capability small size, portable deployment self-diagnostic capability multi-stimulus detection sensitivity limits without sacrificing stimulus recognition capability

3. Smell Smell/Hear Taste Hear (like a person) Hear (like a bat) RFID Distributed Microsystems Laboratory: Sensing Modes

4. Smell: National Science Foundation (ECS) –Portable instrument development for chemical sensor arrays –Sensor technologies: chemiresistor and ChemFET –Signal Processing: extensive preprocessing and linear array analysis –Inspiration: successful array processing systems; olfaction (biology) Smell/Hear: National Science Foundation (ECS) –Distributed and Integrated Hear/Smell Sensing Nodes –Three chip sensing nodes that employ: On-chip sound recognition as early warning and wake-up signal and On-chip smell functionality for three representative applications: –Consumer: redundant breath alcohol analysis –Environmental: pipeline leak monitoring –Military: ground vehicle identification Distributed Microsystems Laboratory: Funded Research Projects (Recent Past and Present)

5. Taste: collaboration with Arizona State University (Booksh, Chemistry) as part of National Science Foundation grant –Liquid-Phase SPR-based Sensing –Integrated Optical Computation for dual-probe SPR instruments –Sensor technology: coated, tapered fiber-optic probes with RI measurement –Sensor technology: custom CMOS imagers –Signal processing: auto-compensation of reference media by imager Taste: pH sensing (under NIH Center subgrant) –Development and Characterization of pH sensors within biological range –Comparison of materials and configurations for CMOS-based sensors Materials: silicon nitride, silicon oxide, aluminum oxide Configurations: ISFET, ChemFET –Feasibility of low-cost sensors fabricated in standard processes Distributed Microsystems Laboratory: Funded Research Projects (Recent Past and Present)

6. Hear (like a bat) and See: Subcontract to USTLAB DARPA contract –Streamlined acoustic and optical, dual-purpose signal preprocessing and processing for low-power, small-footprint underwater vehicles –Sensor Technologies MEMS-based acoustic transducers/receivers CMOS cameras RFID: WA Tech Center, Internal Research Fund (UW) –Implement Radio Frequency Identification Systems in Precision Forestry –Expand Radio Frequency Identification to sensing of forest product parameters Diameter Moisture Defects Density Distributed Microsystems Laboratory: Funded Research Projects (Recent Past and Present)