1. Novel type of fabrication tactile sensor made from artificial hollow fiber Y. Hasegawa, M. Shikida*, D. Ogura, K. Sato Department of Micro-Nano Systems Engineering, *EcoTopia Science Institute, Nagoya University, Japan MEMS 2007 pp.603~606 Advisor ： Cheng-Hsien Liu Reporter ： Yu-Sheng Lin Date ： 2007.05.16

2. PME52302 Outline Introduction Design and principle Fabrication Results Conclusion

3. PME52303 Introduction Structure made by weaving hollow fiber Detect 2D contact-force Measuring the capacitor change Applications of a fabric tactile sensor Ref: E.Hwang, 2006

4. PME52304 Design Schematic view of a fabric sensor

5. PME52305 Operation principle Schematic view of its operation principle

6. PME52306 Fabrication Fabrication process of the fabric tactile sensor Nagayanagi Co Ltd.

7. PME52307 Fiber element and fabric tactile sensor （ c ） Fabric tactile sensor using only artificial hollow fibers （ b ） Fabricated artificial fiber （ a ） Cross-section view of fiber

8. PME52308 Fabric tactile sensor

9. PME52309 Experimental setup Pin ： D=1.5mm

10. PME523010 Results The performance of a pair of warp and weft fibers

11. PME523011 Results (cont.)

12. PME523012 Results (cont.)

13. PME523013 Conclusion The editors proposed an artificial hollow fiber structure as a new material for MEMS and applied it to create a novel type of fabric tactile sensor. The editors found the capacitance between the two fibers increases with increasing applied load.

14. PME523014 Thank you for your attention !