1. Project NTP Van Ortega Cayetano Shama Karu Sean McKeown Themistoklis Zacharatos Advisor: Dr. Woo Lee Plasma Specialist: Dr. Kurt Becker Powered by:

2. Flow Chart for three gases: MKS for ammonia MKS NH 3 Ar CH 4

3. Radio Frequency Plasma Generation: Advantages –We can tune the frequency May not need a carrier gas –E kin =e *E* > E ex We need either low pressures or strong electric field

4. Disadvantages –For argon a high RF power density is necessary to generate the discharge –A better carrier gas would be helium, however this will cause problems in the GC detection Radio Frequency Plasma Generation (cont.):

5. Ion currents from RF power: Pressure in the reactor is 700 mbar constant mass flow of 72.5 sccm Rf Power of 29 W

6. For the following weeks: Run experiments using ‘old’ plasma source design with methane. Continue with developing new plasma source and source-to-system interface. Set up new flow system. (Full set up will occur when proper equipment arrives.)