1. Fluid Components for Small, Smart, Sampling Systems Kevin Mracek

2. Agenda Requirements for Fluid Components used in Small, Smart Systems Components Currently Available ·Diaphragm Valves ·T2 Series ·Face Seal Fitting ·Weld Fittings ·Regulators ·Integrated Gas Components

3. Requirements for Fluid Components used in Small, Smart Systems Smaller/More Compact Cleaner (Accuracy) More Reliable Easily Automated Modular

4. Diaphragm Valves Features/Benefits Small Surface Area High Reliability No Packing to Contaminate System Fluid Low Internal Volume

5. T2 SERIES PNEUMATICALLY ACTUATED VALVES

6. Common Bleed / vent Common Bleed / vent Common Outlet Common Outlet Inlet Common Outlet Common Outlet OpenClosed R T2B1 Three Module Network Features/Benefits No Cross Contamination Reliable Valve Function No Dead Volume Compact Design Low Internal Volume Ease of Installation

7. VCR ® Features/Benefits All-metal seals Eliminate crevices around tubing Low Dead Volume Zero Clearance Component Removal Optional Ultra-High- Purity

8. Features/Benefits Boreline Seal: Reduces entrapment zones Anti-Twist Design All the features of the standard VCR ® “S” Type VCR ®

9. MICRO-FIT ® Features/Benefits Compact Design ·Allows Close Component Spacing for tubing systems Automatic Tube Welding Smooth Surface Transitions Eliminates Crevices Around Tubing L-15

10. HF Regulator Features/Benefits Half the Size of Conventional Regulators Low Supply-Pressure Effect Low Droop High Purity Design

11. Manifold layer Substrate layer Surface mount layer Bridge Block igc-I Components: Simple System Integration Features/Benefits Modular Design Easy Replacement of Valves Smaller Footprint All Metal Seals to Atmosphere Variety of Surface-Mount Components Available Ultra High Purity

12. igc -II