1. Multidisciplinary Engineering Senior Design 06421 Automated Plasma Generator Test System Preliminary Design Review 11/11/05 Project Sponsor: MKS, ENI Incorporated Team Members: John Dullea Christine Kuss Megan Suflita Team Mentor: Dr. Ferat Sahin Acknowledgements: Dr. Paul Steibitz, Advisor Kate Gleason College of Engineering Rochester Institute of Technology

2. Project Background Narrow band HF RF amplifier Parallel devices with controller Subcomponents of 3700 Watt amplifier

3. Current Situation Tedious to test Time consuming Resource consuming Interpolation issues Result analysis is time consuming

4. Software Capabilities LabVIEW code Collect necessary data Perform calculations Generate graphs Fully automated Required tests

5. Needs Assessment Customer’s Needs Automated in LabVIEW Graphical User Interface will be provided Ability to vary input parameters Ability to perform safety checks and take measurements Potential for destructive testing Our Needs Access to MKS facility, equipment, and technical support Defined work area at MKS Results of past tests for comparison

6. Concept Development Option 1

7. Concept Development Option 2

8. Project Schedule

9. Key Requirements & Critical Parameters Repeatable Data Safety Checks Fully Automated

10. Overall System Diagram/Block Diagram Software flow of overall LabVIEW program. Contains 4 nested loops Varies all necessary input parameters Frequency Impedance Voltage Amplitude

11. Analysis & Synthesis of Design Project based upon generic platform Easily adaptable for future considerations Easily interchangeable with similar units Customer specifications met Integration of existing code

12. BOM & Costs All equipment provided by MKS Equipment list Tektronix Digital Scope Bird Power Meter Bird Power Sensor Agilent Power Meter Agilent Power Sensor ENI Load Simulator & RS232 Cable ENI Matchwork Controller ENI Fiber Optic Converter Agilent Spectrum Analyzer Dell PC Agilent Signal Generator Keithey Scanning Card 4 RF Cables, DC Power Cable, & 6 GPIB Cables Power Supply

13. Anticipated Design Challenges/Risk Difficulty integrating software blocks Creating user-friendly interface that is easily interpreted UUT safety and control systems Stability of amplifier signal Debugging of code

14. SD II Project Plan Automated Tests Correlation Study Corrective Actions MKS onsite verifications

15. Deliverables LabVIEW code User manual On site training

16. Questions

17. Smith Chart http://www.web-ee.com/primers/files/SmithCharts/smith_charts.htm

18. Input Parameters

19. Signal Generator Frequency Flow

20. Communications with Load Simulator

21. Power Supply Handling

22. Signal Generator Amplitude Handling

23. Cost – Benefit Analysis Assumptions For manual testing a technician requires 3 days for completion Technician gets paid $15/hour. Automated program can complete task in 24 hours with 1 hour set up. ($15)*(8hrs/day)*(3 days) = $360 ($15)*(1hr) = $15 A cost difference of $345 per test 3 tests * $360 = $1080 3 tests can be completed with the automatic test system in the same time that 1 test can be completed manually