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Microelectronics Processing Course J. Salzman Fall 2006 1 Microelectronics Processing Course Introduction.

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Presentation on theme: "Microelectronics Processing Course J. Salzman Fall 2006 1 Microelectronics Processing Course Introduction."— Presentation transcript:

1 Microelectronics Processing Course J. Salzman Fall 2006 1 Microelectronics Processing Course Introduction

2 Microelectronics Processing Course J. Salzman Fall 2006 2

3 3 Conductivity in solids Resistivity  [  cm] Conductivity  [  cm] -1 10 -8 10 18 10 -18 10 8 10 3 10 -8 10 8 10 -3 Ag Cu Al Glass Pure Diamond Quartz Si Semiconductors Conductors Insulators GaAs

4 Microelectronics Processing Course J. Salzman Fall 2006 4 History 1904 Vaacum Tube 1925 Concept of Field Effect Transistor 1947 Bipolar Transistor 1958 Bipolar IC 1959 MOS Transistor 1961 IC-MOS Technology 1972 MOS Microprocessor

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7 7 Moore Law (Gordon Moore 1965) The number of transistors in a chip will be doubled every 18 months

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11 Microelectronics Processing Course J. Salzman Fall 2006 11 MOS Transistor Source Drain Gate

12 Microelectronics Processing Course J. Salzman Fall 2006 12 MOS Transistor Source Drain Gate Electrons in inversion layer

13 Microelectronics Processing Course J. Salzman Fall 2006 13 Drain Gate Source W L t ox Substrate Metal contact Schottky contact Si 2 O

14 Microelectronics Processing Course J. Salzman Fall 2006 14 Optical Measurements Photometric Interferometric Polarization Spectroscopic

15 Microelectronics Processing Course J. Salzman Fall 2006 15 Basic Optical Instruments Microscope Reflectometer (Nanospec) Ellipsometer

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