1. A 3D Micromixer Fabrication With Dry Film Resist Advisor ： Cheng-Hsien Liu Reporter ： Yu-Sheng Lin Date ： 2007/04/18 A.D. Radadia 1, L. Cao 1, H.K. Jeong 1, M.A. Shannon 2, R.I. Masel 1 1 Department of Chemical and Biomolecular Engineering, 2 Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, USA MEMS 2007 pp.361~364

2. PME52302 Outline Introduction Fabrication Micro-mixer design Results Conclusions

3. PME52303 Introduction DFR ： Dry Film Resist

4. PME52304 Fabrication

5. PME52305 Micro-mixer Design 6 layers

6. PME52306

7. 7 Compare of wet etching and RIE

8. PME52308 Results

9. PME52309 Microscopic images of (a) 4 patterned layers (b) 6 patterned layers and a cap layer Microscopic images during process

10. PME523010 Conclusions A technique utilizing by dry film resist to build 3D microstructures with 6 layers patterned has been developed. Dry film resist is available in bio- compatible format. Future work will focus on building MEMS devices for biosensing applications.

11. PME523011 Thank you for your attention !

12. PME523012 Woodpile structure 3 layers

13. PME523013 Ref: M.S. Munson, P. Yager, Analytica Chimica ACTA, 2003 pp.63~71