1. Instrumentation Surface Mount Technology for Sample Conditioning Systems Frank Ruiz, Ruiz & Associates Steve Doe, Parker Hannifin Corporation

2. Surface Mount Technology for Sample Conditioning Systems Agenda Part I: Mechanics, Steve Doe êSurface Mount History in the Semiconductor Industry êSubstrate Design: SP76 Parallels & Enhancements êElastomer or Metallic Device Interface Seals? Part II: System Design, Frank Ruiz êDevice Design for System Flexibility êDesigning a Sample Conditioning System êFuture Developments

3. Surface Mount Technology for Sample Conditioning Systems Surface Mount History n Parker: surface mount supplier to semiconductor market for several years

4. Surface Mount Technology for Sample Conditioning Systems Surface Mount History n SP76 based on Semiconductor Industry 1½” footprint n SEMI organization forum for industry standards n Initial SEMI surface mount effort in early 1990’s n Motivations similar to those of today’s Petrochemical Industry n Market penetration most significant in Asia n Global Standard for interface seal? n 1 1 / 8 ” footprint being introduced (and embraced) n Semiconductor Industry Use: Gas Delivery Analytical Industry Use: Sample Conditioning

5. Surface Mount Technology for Sample Conditioning Systems Substrate Design n Meets SP76 design specification for elastomeric seal option, however...

6. Surface Mount Technology for Sample Conditioning Systems Substrate Design n Achieves added system flexibility with 5 streams, and…

7. Surface Mount Technology for Sample Conditioning Systems Substrate Design n Provides ability to mount larger devices such as current designs for flow controllers, regulators and other devices.

9. Surface Mount Technology for Sample Conditioning Systems Substrate Design

10. Surface Mount Technology for Sample Conditioning Systems Substrate Design

11. Surface Mount Technology for Sample Conditioning Systems Substrate Block to Block Sealing n Incorporates standard O-Ring seal (size 2-007) n 1 / 8 ” through hole w/ counterbore to capture o-ring n Blocking flow passages provides system flexibility n Developing “plug” from either a solid elastomer or metallic disk molded into O-Ring

12. Surface Mount Technology for Sample Conditioning Systems Substrate Design

13. Surface Mount Technology for Sample Conditioning Systems Substrate Design

14. Surface Mount Technology for Sample Conditioning Systems Substrate Design

15. Surface Mount Technology for Sample Conditioning Systems Elastomeric or Metallic Device Seals? Pro’s Con’s n Elastomeric:Used in numerous 1x10 -4 cc He/sec sample systems leak integrity devices; entrenched, successful technology n Metallic: 1x10 -10 cc He/secSeal & mating surfaces leak integritysubject to handling leak integritysubject to handling damage resulting in leaks

16. Surface Mount Technology for Sample Conditioning Systems Elastomeric or Metallic Device Seals? Conclusion: Recommend Elastomeric for majority of sampling systems and Metallic for PPB detection level applications

17. Surface Mount Technology for Sample Conditioning Systems Designing a Sample Conditioning System

18. Surface Mount Technology for Sample Conditioning Systems Designing a Sample Conditioning System

19. Surface Mount Technology for Sample Conditioning Systems

20. Designing a Sample Conditioning System

21. Surface Mount Technology for Sample Conditioning Systems

32. Future Developments (Steve & Frank) n Solicit input from other suppliers to include analyzer & sensor devices on stick n Develop automation software for system design n Develop pricing for total offering n Re-present system with updates at PITTCON-2001 n Build beta-site system for field testing?

33. Surface Mount Technology for Sample Conditioning Systems Thank you! Questions?