1. ECE 491 Meeting PVD Synthesis and electrical characterization of «
ECE 491 Meeting PVD Synthesis and electrical characterization of «?» thin films
Nov 24, 2011

2. MOTIVATION
To get a know «know how» to use PVD system in order to deposit a thin film
To get experience on characterization techniques of thin films

3. OBJECTIVES Formation of «?» thin films by PVD
Electrical – Optical - Structural Caracterization of these thin films
Therefore, the project is composed of TWO important parts:
Synthesis
Characterization

4. Methodology Determination of the starting parameters of PVD
(P, T, t, substrate, target)
Deposition of the Thin Film by PVD
Electrical – Optical - Structural Characterization of these thin films
Studying the effect of process parameters
Optimization
Simple Device Fabrication and tests

5. Questions to be answered
For which application?
Electrolumiscent device?
Sensor?
Which material will be deposited, what will be the source?
Which substrate will be used?
What are the parameters? What will be our starting parameters?
T, P, time, etc.
How does a PVD system operate?
What are electrical – optical – structural characterization techniques?  selection of the characterization techniques and design of the set-ups for measurements. us
you

6. TO DO Get an insight on: Literature review on selected system
Vacuum Science and Technology (Chapter 2)
Gas Transport
Vacuum pumps and systems
Physical Vapor Deposition (Chapter 3)
Electrical Properties of Thin Films (Chapter 10)
Optical Properties of Thin Films (Chapter 11)

7. Semiconductor / Thin Film Characterization Techniques
What are the semiconductor quantities that could be characterized 
depletion width, carrier concentration, optical generation and recombination rate, carrier lifetimes, defect concentration, trap states, etc.
These quantities fall into three categories when it comes to characterization methods:
Electrical Characterization
Optical Characterization
Structural/Physical/Chemical Characterization
What are these quantities really?

8. Example 1. Electrical Characterization Techniques
Used to determine which quantities, which property of material?
What are the different methods?
Principles of these methods?
Set-up?
Measures quantities?
Details....