1. High-Order Deformable Mirror
66 active actuators across, 1.8mm spacing
65 actuators across a 115.6mm clear aperture
Measured stroke: 1.06um
99 cables attach to the back

2. High-Order Deformable Mirror
Received at Caltech on Dec. 4, 2009
Spent Dec-Jan. testing performance with a Zygo interferometer
Prior to face sheet bonding (Xinetics Inc.)

3. HODM testing Tested with a Zygo in I&T testbed Data
Plastic curtains enclose bench to allow humidity control with dessicant
Data
Unpowered and bias voltage measurements at 40-50% RH, 10-15% RH and 20-30% RH
Actuator influence functions
Actuator Linearity
Actuator Hysteresis
Actuator Creep
Reconstructor made from the influence functions was used to flatten the mirror
Other control tests include controlling to the low spatial frequency error instead of flat and maximizing the focus error to test the full mirror stroke

4. HODM Correction DM can be flattened to 10nm RMS surface
Base Figure
Corrected Figure
DM can be flattened to 10nm RMS surface
Mirror meets the PALM3000 requirements
Data taken with mirror in normal mode (40V bias); Temp: 75F; RH: 30%

5. Ideal humidity is between 13% and 30%
Humidity Results
45% RH 74deg
30% RH 74deg
13% RH 70deg
Unpowered surface figure at different humidities shows the effect of humidity on the puckers
Ideal humidity is between 13% and 30%

6. Actuator Creep
Actuators creep ~ 10% of the commanded motion over 2 hours
Shown are data from different individual actuators

7. Actuator Linearity
Biases at either end of the available range show very different linearity and total stroke

8. Actuator Linearity
We chose more stroke over greater linearity and plan to use 40V as our nominal bias value