1. Silicon Inchworm Motors 1mm

2. Autonomous Microrobot Seth Hollar, Sarah Bergreiter Anita Flynn, Kris Pister Solar Cells Motors Legs CMOS Sequencer 8.6 mm

3. “The Actuation” – Hinges, Motors, Legs, Frame “The Power” – Solar Cell Arrays and High Voltage Transistors “The Brain” - CMOS Digital Circuits Microrobot – Three Processes

4. Solar Cell/High Voltage Chip CMOS Chip Robot Legs and Motors Chip –Affix robot to wax for wirebonding –21 wirebonds Assembly

6. Inchworm Motor Preset Structure Leg and Linkage Drive Actuator Clutch Actuators Shuttle Robot Leg Layout

14. Design of 2DOF Leg Shuttles Knee Tendons Foot Hip Poly Crossover

16. Thrust and Power from Solid Propellant Microrockets William Lindsay, Dana Teasdale, Veljko Milanovic, Kristofer Pister, and Carlos Fernandez-Pello Berkeley Sensor and Actuator Center University of California Berkeley

17. Combustion – Teasdale, Lindsey Solid rocket propellant 7 seconds thrust, I sp =15s ~1mJ out

18. Altitude vs. Average Thrust Assuming pressure drag, constant total impulse

19. Next Generation Design Increase the thrust and decrease the mass, while controlling thermal losses

20. Thrust Measurements vs. Theory Predicted altitude: 50 m

21. Rocket in Action

22. ROCKETBOY THANKS YOU! (Bill Lindsay)