1. What does the EUV and thin film group do? 1.Optical properties of matter in the EUV and Soft X-rays 2.Thin film preparation and characterization  Allred N265 2-3489 Meeting M 1600- N288 ESC Thin Films for Mirrors  Turley N308 2-3095 Meeting F 1600- N308 ESC- VUV and EUV Spectrometers  L V Knight N373 2-2450 Tues C389 BNSN (Linford)  EUV Spectrometer

2. Roentgen discovers x rays http://wave.xray.mpe.mpg.de/roentgen/roentgen-1.gif

4. http://library.tedankara.k12.tr/chemistry/vol1/period/trans43.jpg

5. http://users.zoominternet.net/~matto/M.C.A.S/electromagnetic_spectrum.gif

6. Where do the EUV and Soft X-rays fit? Characteristics – interact strongly with all matter –Human hair is 100 micron. –Characteristic absorption length is 0.01 to 0.1 micron –Refractive index is ~1 How do you make optical elements to focus and direct light?

7. Why Extreme Ultraviolet (EUV) and Soft X-Rays? Images from www.schott.com/magazine/english/info99/ and www.lbl.gov/Science-Articles/Archive/xray-inside-cells.html. EUV Lithography (making really small computer chips) Thin Film or Multilayer MirrorsEUV Astronomy The Earth’s magnetosphere in the EUV Soft X-Ray Microscopes BYU EUV Optics April 19, 2004

8. Other Applications Astrophysics http://euv.lpl.arizona.edu/euv/ http://euv.lpl.arizona.edu/euv/ Surface studies. Plasma studies- matter under extreme conditions Microelectronics Soft x-ray microscopy

9. BYU Work Applications Astrophysics: –Image satellite http://euv.lpl.arizona.edu/euv/ http://euv.lpl.arizona.edu/euv/ –Uranium and Thorium for the EUV. Microelectronics: Stabilizing Mo/Si Also Ru, Soft x-ray microscopy: Sc and others. Surface and Nanofabrication studies. –How to be clean in an unclean world. –Ambient temperature oxidation of materials Group meetings: Monday @1300 N209 –Sub: Wednesday @1300 N308 (Turley) BYU Spectrometer.