1. USC INFORMATION SCIENCES INSTITUTE MOSIS OVERVIEW OCTOBER, 2003 César A. Piña http://www.mosis.org

2. USC INFORMATION SCIENCES INSTITUTE WHO WE ARE http://www.mosis.org WHO WE ARE http://www.mosis.org Microelectronics  Non-profit Microelectronics broker, dedicated to provide:  Low cost engineering samples of IC designs,  Low-volume production service,  ~50% of MOSIS’ submicron runs are “Dedicated runs” (i.e., low volume production runs)  Access to latest production proven technologies  Single point of interface to its customers for additional services or products offered by partner vendors,  Latest version of foundries’ design/electrical rules and spice models  Educational Program for Microelectronics Design  Experience - 22 Years of Operation  Unique: Only non-sponsored service in the world which provides access to multiple technologies & fabricators

3. USC INFORMATION SCIENCES INSTITUTE TYPES OF CUSTOMERS  Companies With Pilot Projects Requiring Engineering Samples for Proof of Concept  Companies With Small Volume Production Requirements  Government Agencies  Universities : Research, Education (VLSI Design Classes)

4. USC INFORMATION SCIENCES INSTITUTE WHAT WE DO  Provide Access to multiple technologies and fabricators  Organize Multiproject and Single Customer Dedicated Runs  Collect and Merge Designs  Provide Fully Checked Merged Designs to Mask Shop  Production Compatible Masks to Foundry  Mid Range Volumes (e.g. 500, 2000) Available  Support Users  Design Kit Distribution  Handle Design Questions  Design Rules, Modeling, IP, Etc.  Include Reference Designs on MPW Runs (To verify yield)  Work Closely With Design, IP Providers http://www.mosis.org

5. USC INFORMATION SCIENCES INSTITUTE UFY2003 PERCENT SALES BY ACCOUNT TYPE

6. USC INFORMATION SCIENCES INSTITUTE Sample Multiproject Wafer http://www.mosis.org

7. USC INFORMATION SCIENCES INSTITUTE Sample Multiproject 0.18  Reticle http://www.mosis.org

8. USC INFORMATION SCIENCES INSTITUTE Sample Multiproject 0.18µ Reticle

9. USC INFORMATION SCIENCES INSTITUTE THREE PHASES: http://www.mosis.org  Phase I: 1981-1985 – 100% DARPA Direct Funding  Phase II: 1985-1994 - Multi-Agency Direct Funding  DARPA: ~67% ==>80%  Subsidized All Undersubscribed Runs  NSA ~26% ==> 10%  NSF/DARPA Educational Program Starts: ~$900k/yr.  NSF: ~7% ==> 5%  Commercial Customers: ~0%  5%  Helped to defray Government Costs by using excess area  Helped to defray Government Costs by using excess area.  Phase III: 1994-2003 - Self-Sustaining Operations  Commercial Customers are Only Source of Revenue  Multi-Sponsor Ed. Program  NSF (1994-1998)  Commercial Firms  MOSIS  SRC/SIA (2000-2002)

10. USC INFORMATION SCIENCES INSTITUTE Available Technologies http://www.mosis.org  IBM 5HP/DM: SiGe 0.50µ  IBM 6HP/6DM: SiGe 0.25µ  IBMµ  IBM 6RF: CMOS 0.25µ  IBM  IBM 7SF: CMOS 0.18  IBM  IBM 7WL CMOS 0.18  IBM 8SF: CMOS 0.13   AMI ABN: CMOS 1.50µ  AMI C5N: CMOS 0.50µ  AMI C3N CMOS 0.35µ  TSMC CL035: 0.35µ  TSMC CL025/CM025: 0.25µ  TSMC CL018/CM018: 0.18µ  Peregrine SOI-SOS: 0.50µ µ  AMS BiCMOS (CMP) 0.8µ µ  OMMIC GaAs (CMP) 0.2µ  VITESSE InP HBT

11. USC INFORMATION SCIENCES INSTITUTE SIA 2001 Roadmap +MOSIS Roadmap

12. USC INFORMATION SCIENCES INSTITUTE Gate Delay (Ps) vs. Feature Size 31 Stage CMOS Ring Oscillator

13. USC INFORMATION SCIENCES INSTITUTE PHOTOLITHOGRAPHY

14. FAB COSTS  Lithography has become the most significant cost item in deep submicron fab µ node  Wafer and mask costs relatively the same until the 0.35 µ node  Different lithography technologies  1X Stepper Lithography µ  Medium payload: ~ 900 sqmm; 1.5 µ is lowest practical limit  5X Stepper Lithography  Small Payload: 480 sqmm max. µ  Technology of choice for 1.2 µ and below µµ  0.5 µ - 1.6 µ mask tech. Straightforward µ - Mix and Match: 5X and 4X Stepper/Scanner Reticles  0.18µ - Mix and Match: 5X and 4X Stepper/Scanner Reticles  VERY EXPENSIVE 25x cost of 1.5 µ masks µ-Mix and Match: 5 and 4x  0.13 µ-Mix and Match: 5 and 4x  US $500k-$750k per mask set

15. USC INFORMATION SCIENCES INSTITUTE Optical Lithography: Resolution Limits

16. USC INFORMATION SCIENCES INSTITUTE Inside serifs (clear) Jogs Outside serifs (chrome) RESOLUTION ENHANCEMENTS: OPTICAL PROXIMITY CORRECTIONS Hammerhead

17. USC INFORMATION SCIENCES INSTITUTE RESOLUTION ENHANCEMENTS: OPC For Contacts  Optical Proximity Correction No OPC OPC Applied  Diffraction at corners of small vias and/or contacts results in incomplete resist exposure.  Not needed for 0.35um or larger  Is required for S < 0.2 um CONTACT ON WAFER: 0.5 X 0.5um CONTACT ON MASK : 2.5 X 2.5um CORNER BOX DIMENSIONS: 0.5um x 0.5um

18. USC INFORMATION SCIENCES INSTITUTE RESOLUTION ENHANCEMENTS: PHASE SHIFT MASKS  PHASE SHIFT MASKS  Masks very expensive  Geometry dependent- Difficult to get arbitrary shapes Incoming radiation Chrome Pattern Groove Depth = 1/2 wavelength of light Interference effects between light passing through the groove and the middle of the feature, produce a sharp line.

19. USC INFORMATION SCIENCES INSTITUTE DEEP SUBMICRON PLANARIZATION Passivation Layer Metal Lines If metal lines are close together, passivation layer can be planarized to the required degree, otherwise, additional metal lines have to added be added to the design’s photo masks. This process should be transparent to the designer.

20. USC INFORMATION SCIENCES INSTITUTE SUBMITTED GEOMETRY

21. USC INFORMATION SCIENCES INSTITUTE “METAL FILL” ADDITION TO SUBMITTED GEOMETRY

22. USC INFORMATION SCIENCES INSTITUTE NUMBER of MASKS vs FEATURE SIZE

23. USC INFORMATION SCIENCES INSTITUTE TYPICAL FILE SIZE (Mb) vs FEATURE SIZE (  )

24. USC INFORMATION SCIENCES INSTITUTE WAFER AND MASK COSTS NORMALIZED TO COSTS OF 1.5  FEATURE SIZE

25. USC INFORMATION SCIENCES INSTITUTE MOSIS EDUCATIONAL PROGRAM (MEP)

26. USC INFORMATION SCIENCES INSTITUTE EDUCATIONAL PROGRAM  Description  The MEP provides free fabrication of integrated circuits designed by students at accredited educational institutions in the U.S., Central and South America, Spain, New Zealand and Australia  Geographical limits set by available MOSIS resources  Two types of accounts  INSTRUCTIONAL  RESEARCH  Eligibility  Fabrication of student designs is available to accredited universities who agree to the following terms:  Design, simulation, and testing tools must be specified  A report must be sent to MOSIS for each fabricated circuit.  Further Details can be found at http://www.mosis.org

27. USC INFORMATION SCIENCES INSTITUTE ACCOUNT DESCRIPTIONS  INSTRUCTIONAL Program  Designs from students in organized classes – Undergraduate and Graduate  Enrollment at beginning of the Quarter/Semester  Each student is allocated a “Tiny Chip Unit” of area  Detailed reports on chip test results are required for every chip fabricated  “The chip worked as expected” is not a sufficient report  Technologies  CMOS Analog/digital 1.5µ, 0.5µ  1.5µ Technology: Tiny Chip Unit size is 2.2mm X 2.2mm  0.5µ Technology: Tiny Chip Unit size is 1.5mm X 1.5mm

28. USC INFORMATION SCIENCES INSTITUTE ACCOUNT DESCRIPTIONS  RESEARCH Program : Thesis or research projects  Restricted to non-sponsored research : Thesis or research projects  Mini-proposal (2-3 pg., or more if necessary) required: Design description, design tools, testing, simulation, purpose.  One design per proposal: Must be clear and detailed, including desired technology and an accurate chip size estimate.  Final report required upon completion  May be a copy of an internal report or a published paper  Projects are selected by MOSIS based on merit and originality  Selected designs are fabricated in regularly scheduled MOSIS runs, on a space available basis.  Technologies  CMOS 1.5µ, 0.5µ, 0.35µ, 0.25µ, 0.18µ, 0.13µ; SiGe: 0.5µ & 0.25µ

29. USC INFORMATION SCIENCES INSTITUTE Program Oversight and Institution Eligibility  Program Oversight  MOSIS Advisory Council for Education  University Professors, SRC, Industrial Contributors  Institution Eligibility  All U.S. Universities  Non-U.S. Universities:  Funding Provided Solely by MOSIS  1999: Instructional and Research MEP extended to include Latin American, New Zealand and Australian Universities  2002: Research MEP Access extended to include Europe  Current geographical restrictions are set by available MOSIS resources.

30. USC INFORMATION SCIENCES INSTITUTE Educational Program Funding  1984-1994: Funding was provided solely by:  National Science Foundation (NSF) (~$575k/yr)  Defense Advanced Projects Agency (DARPA) (~$375k/yr)  1995-1999: Funding provided by:  National Science Foundation (NSF)  AMI, HP: Wafer run donations  MOSIS: Administrative costs  2000-2003  AMI: Wafer run donations: 1.5um & 0.5um (4-5runs/yr)  IBM: Wafer fab 0.5um & 0.25um SiGe  SIA/SRC: Instructional &Advanced Program Fab (~$335k/yr)  Dupont: Discounted photomasks for educational only runs.  MOSIS Provides:  All administrative expenses (~$110k/yr)  Instructional and advanced Program Fab (~$600k/yr)

31. USC INFORMATION SCIENCES INSTITUTE SUMMARY  Low Cost Prototyping  Regularly Scheduled Prototype Runs  Low Volume Production  Access to Latest TSMC and IBM Production Technology  Access to Important Third Party Resources  Monitors Quality of Vendors and Processes  Privately Funded VLSI Educational Program

32. USC INFORMATION SCIENCES INSTITUTE PROJECT SUBMISSION

33. USC INFORMATION SCIENCES INSTITUTE MEP PERFORMANCE and Technologies  Ten Years: 1990 through 1999 inclusive  12,130 Student Designs Processed  > 50,000 Students Participated  Total of 195 U.S. Universities  1984-2003: Technologies Offered  1984-1987: NMOS (3-4  ), CMOS (2-3  )  1988-1997: CMOS (2  )  1997-1999: CMOS (2, 1.5, 0.5, 0.35, 0.25  )  1999- 2000: CMOS(1.5, 0.5, 0.35, 0.25  ); SiGe;  2001- > : CMOS(1.5, 0.5, 0.35, 0.25, 0.18  ); SiGe;SOS

34. USC INFORMATION SCIENCES INSTITUTE MOSIS Web Forms http://www.mosis.org Project submission, tracking, etc. Secure or non- secure

35. USC INFORMATION SCIENCES INSTITUTE COMPATIBLE DESIGN LIBRARIES  Artisan  Commercial Firms  Free Digital Libraries, I/Os & Memories  TSMC 0.25µ and 0.18µ processes  Work with Commercial EDA tools: Avant!, Cadence, Synopsis  Universities  Complete front end views of core & I/O cells  Behavioral, synthesis, simulation, P&R  No GDS, MOSIS Instantiates the cells

36. USC INFORMATION SCIENCES INSTITUTE COMPATIBLE DESIGN LIBRARIES  Barcelona Design  Tools & services for analog synthesis of A/Ds, D/As, Op-Amps, PLLs  AMI 0.5µ, TSMC 0.35µ, 0.25µ, & 0.18µ Processes  LEDA Systems  Analog & RF Cells for the TSMC 0.25µ, & 0.18µ Processes  Nurlogic  Digital, Analog/RF & Special I/O Cells for:  TSMC 0.25µ, & 0.18µ Processes  IBM 6HP SiGe 0.25µ

37. USC INFORMATION SCIENCES INSTITUTE Standard Data Preparation http://www.mosis.org  Project Check  Checks design syntax  Checks layer names  Computes the size, counts the pads · Checks actual values with declared values  DRC available (optional)  Data Prep  Sizing, logical operations (inc. OPC)  Add CMP fill

38. USC INFORMATION SCIENCES INSTITUTE GENERAL QUESTIONS  IMPORTANT: Get the GDS file into the system properly, not as an attachment to an e-mail (please: NEVER do this)  MOSIS does not require require a seal on the edge of your design  MOSIS will install a seal ring which is part of the definition of the scribelines for the reticle.  This ring will not necessarily be in close proximity to your layout,  If you want a "guardring“ for whatever reasons (of your own), then you should draw it yourself

39. USC INFORMATION SCIENCES INSTITUTE DESIGN RULE CHECKING  The design rules which must be followed are posted in the form of DRC decks and Design Rule documents (MOSIS secure doc. server)  MOSIS cannot possibly tell you that violating those rules is safe.  MOSIS routinely uses DRACULA for TSMC 0.25,  BUT moving to Mentor Graphics' "Calibre" for more advanced technologies.  DRACULA works well enough for DRC and antenna checking.  For checking connectivity, MOSIS prefers the Calibre LVS deck,  Since the DRACULA decks do not handle MiM metals correctly, this is critical when checking for shorts.  Be sure and select the proper variants of the DRC decks;  for example, if you are using thick-top-metal, there is a special set of thick-top-metal decks  if you are using mixed-mode features such as MiM, or strange threshold devices etc., use the mixed-mode decks etc.  Important, no two tools ever give the same flags for the same layout.

40. USC INFORMATION SCIENCES INSTITUTE BASED (Scalable) DESIGN RULES BASED (Scalable) DESIGN RULES  RULES  Mead-Conway, 1979  NMOS  CMOS Rules  JPL 1983  SCMOS  3  -1.2   SCMOS_SUBM  Sub-micron processes  SCMOS_DEEP  Modified SCMOS_SUBM  For 0.25  and below  ADVANTAGES  Simplicity  Easy to transfer designs to another process  Process Independent for all MOSIS processes  Suitable Designs  R-F/ Analog designs may need precise vendor rules  Most other designs can use these rules.  For 0.25  the area penalty is ~3-5% compared to vendor rules. Speed penalty is negligible!

41. USC INFORMATION SCIENCES INSTITUTE ADVANTAGES OF BASED SCALABLE RULES  Simplicity  Almost Completely Process Independent for all MOSIS processes  Suitable Designs  R-F Analog designs may need precise vendor rules  Most other designs can use these rules with minor performance or area deficits  For 0.25  the area penalty is ~3-5% compared to vendor rules. Speed penalty is negligible  Easy to transfer designs to another process  One MOSIS customer has used the SCMOS simplest rules in scaling a core design from 1.6  to 0.18  !

42. USC INFORMATION SCIENCES INSTITUTE UFY02 - Educational Projects by Technology TechnologyMOSIS Funded SRC Funded Ed. Runs SRC+AMI TOTAL 0.1893012 0.251708 0.3568014 0.5099106240445 1.52714141209 SiGe 0.506006 TOTALS148265281694

43. USC INFORMATION SCIENCES INSTITUTE Optical Lithography: Resolution Limits

44. USC INFORMATION SCIENCES INSTITUTE PHASE SHIFT MASK S vs. BINARY MASK S  BINARY MASKS  Clear and chrome only  Transmits light  Blocks/Reflects light  Limited by:  k1 and N.A. of Stepper  of light  OPC extends useful range  0.35µ and 0.25 µ features  Fastest mask cycletime  (Lowest cost)  PHASE SHIFT MASKS  0/60/120/180º & Chrome  Transmits with phase, reduces “cross-talk”  Chrome blocks light  ‘Phase edge’ is dark  Multiphase nulls defects & transitions  Enhances latitude, DOF, and/or resolution  Can be combined with OPC  Most involved flow and longest cycle time  VERY EXPENSIVE

45. USC INFORMATION SCIENCES INSTITUTE Relative Speed vs. Feature Size