1. Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips

2. Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips

3. Copper Metallization – Low-K Dielectric

4. Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips

5. High-K Gate Dielectric Reduced fringing of gate electric field – better switching control, less leakage current Reduced tunneling leakage current with thin oxides Si 3 N 4, ZrO 2, HfO 2

6. Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips

7. Silicon-On-Insulator No p-n junction for electrical isolation Reduced inter-device coupling Reduced parasitic capacitance No deep diffusion required for isolation - less fabrication time, closer device packing

8. Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips

9. Strained Silicon Enhanced carrier mobility – compensates for increased ionized impurity scattering in thin, heavily-doped layers

10. Next Generation Integrated Circuits 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips

11. New Generation ICs at Intel http://www.intel.com/technology/silicon/index.htm http://www.intel.com/technology/silicon/research.htm?iid=tech _sil+rd Main Page Reports and Publications

12. New Generation ICs at AMD http://www.thinkcp.com/AMD/roadmap.html Processor Cores Roadmap Main Page http://www.amd.com/us-en/

13. New Generation ICs at AMD Back to Main

14. New Generation ICs at IBM http://www.research.ibm.com/ http://www.ibm.com/search/?en=utf&v=11&lang=en&cc=&lv=w&q=%2 BNanofabrication%20%2Burl.all:research.ibm.com Main Page Reports and Publications http://www- 916.ibm.com/press/prnews.nsf/jan/0C17FDCBF4B76CE185256C6F0064206D Nanofabrication