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Applications of MeV Ion Channeling and Backscattering to the Study of Metal/Metal Epitaxial Growth Richard J. Smith Physics Department Montana State University Bozeman MT 59715
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MSU Colloquium 10/5/012 Outline: ä Overview of program and techniques ä Ti/Al(100) epitaxial fcc overlayer ä Ag/Al(100) epitaxial alloyed overlayer ä Ni/Al(110) disordered alloy formation
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MSU Colloquium 10/5/013 Acknowledgements ä Ph.D students: Adli Saleh,V. Shuthanandan, N. Shivaparan N. Shivaparan ä Dr. Yong-wook Kim (from ASSRC) ä National Science Foundation ä http://www.physics.montana.edu/Ionbeams/ionbeams.html
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MSU Colloquium 10/5/014 Metal-metal Interface Structure ä Understand overlayer growth and alloy formation ä Chemical composition and structure of the interface ä Applications: magnetoresistive devices, spin electronics ä Surface energy (broken bonds) ä Chemical formation energy ä Strain energy A B interface
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MSU Colloquium 10/5/015 Metal-metal systems studied... ä Substrates: Al(111), Al(100), Al(110) ä Metal overlayers studied so far: ä Fe, Ni, Co, Pd ä Ti, Ag, Zr ä All have surface energy > Al surface energy ä All form Al compounds with H form < 0 ä Use resistively heated wires ( ~ML/min) ä Deposit on substrate at room temperature (atomic size smaller than Al) (atomic size smaller than Al) (atomic size larger than Al)
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MSU Colloquium 10/5/016 MSU Ion Beam Laboratory
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MSU Colloquium 10/5/017 2 MV van de Graaff Accelerator
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MSU Colloquium 10/5/019 Scattering chamber ä High precision sample goniometer ä Hemispherical VSW analyzer (XPS, ISS) ä Ion and x-ray sources ä LEED ä Metal wires for film deposition
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MSU Colloquium 10/5/0110 Overview of High Energy Ion Scattering (HEIS) ä MeV He + ions ä Yield = Q (Nt) ä Ni peak for coverage ä Al peak for structure
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MSU Colloquium 10/5/0111 Angular Yield (Channeling dip) ä 1 MeV He + ä Al bulk yield ä Ag surface peak ä inc = 0 o ä det = 105 o ä ~10 15 ions/cm 2 ä min = 3.6%
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MSU Colloquium 10/5/0112 1. Ti on Al(100) surface peaks ä Surface peaks (SP) ä Decrease in Al SP area ä Ti shadows Al atoms ä FCC
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MSU Colloquium 10/5/0113 HEIS: Al surface peak area vs. Ti coverage ä Decrease in Al SP (o) to 5.5 ML ä Simulation () for flat Ti layer in FCC Al sites ä Critical thickness of 5 ML ~ 4.4% lattice mismatch ä Increase > 5 ML Ti layer relaxation
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MSU Colloquium 10/5/0114 Ti on Al(100): XPD angular scans ä Enhanced Al 2p emission at 0 o, 45 o ä Forward scattering for FCC lattice ä Ti 2p photopeaks show enhanced emission along same directions ä FCC Ti film !
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MSU Colloquium 10/5/0115 Ti on Al(001): HEIS Channeling ä Channeling along (101) shows outward relaxation for Ti layer ä a = 2.07 Å HEIS ä a = 2.12Å XPD ä FCC Ti was also confirmed by LEED IV analysis
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MSU Colloquium 10/5/0116 Interstitial substitution T > 300 o C ä Fcc Ti is stable for T 300 o C ä At 400 o C Ti diffuses to depth ~ 300Å ä In channeling direction see Ti shadowing 300 o C 400 o C
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MSU Colloquium 10/5/0117 Interstitial substitution T = 400 o C ä Channeling normal to (110) surface ä Plot Ti SP area and bulk Al yield ä Fractional Ti occupation is ~ 93%
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MSU Colloquium 10/5/0118 Ti on Al(111): XPD Ti and Al ä Ti and Al emission are clearly different and consistent with the hcp and fcc structures ä Ti grows on Al(111) with hcp structure ä Fcc stacking in Al does not prevent hcp stacking in Ti ä Recent XRD studies on Ti stacking in Ti-Al multilayers still under discussion
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MSU Colloquium 10/5/0119 2: Ag on Al(100):Al surface peak ä Ag shadows Al surface atoms ä Shadowing not like that for flat Ag overlayer ä Not Ag islands on FCC lattice ä Small strain at interface(0.9%)
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MSU Colloquium 10/5/0120 Ag on Al(100): Ag surface peak ä Ag atoms are shadowed at high coverage ä Well-ordered Ag film ä Confirmed by LEED
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MSU Colloquium 10/5/0121 Ag on Al(100) LEED patterns A. Clean B. 0.5 ML C. 2.5 ML D. 3.6 ML E. 30 ML F. 30 ML heated to 250 o C
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MSU Colloquium 10/5/0122 Ag on Al(100): Ag binding energy (BE) ä Ag 3d energy decreases gradually ä Ag 4d (VB) also changes ä BE shift is similar to bulk Al-Ag alloys ä Ag moves into Al surface AlAg 2 Al+dilute Ag
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MSU Colloquium 10/5/0123 3: Ni on Al(110) Al surface peaks ä Al SP area increases with Ni coverage ä 3 regions with different slopes (2) (0.35) (~0) ä No LEED spots ä Interface alloy forms at room temperature
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MSU Colloquium 10/5/0124 Ni on Al(110):XPS chemical shifts ä Shifts in BE ä Shifts in satellite ä Compare with XPS for bulk alloys to identify surface composition NiAl 3 1.05eV Ni 2 Al 0.75eV (8.0 eV) NiAl 0.2 eV (7.2 eV) Ni 3 Al 0.0 eV (6.5 eV) Ni 0.0 eV (5.8 eV)
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MSU Colloquium 10/5/0125 Snapshots from MC simulations Al(110)+0.5 ML Ni Clean Al(110) Al(110)+2.0 ML Ni ä MC (total energy) using EAM potentials for Ni, Al (Voter) ä Equilibrate then add Ni in 0.5 ML increments (solid circles) ä Ion scattering simulations (VEGAS)
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MSU Colloquium 10/5/0126 Ni on Al(110):HEIS simulations using the snapshots ä Measured (o) Simulation ( ) ä Slopes agree ä Change at 2 ML correct ä Use snapshots for insight ä Ni atoms move below the surface
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MSU Colloquium 10/5/0127 Conclusions: ä Combined HEIS, XPS, LEED to study film structures on solid-solid interfaces ä Ti/Al(100) epitaxial fcc overlayer up to 5 ML ä Ag/Al(100) epitaxial overlayer with some alloying of Al into the Ag overlayer ä Ni/Al(110) disordered alloy formation for deposition at room temperature
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MSU Colloquium 10/5/0128 Techniques used... ä High-energy ion scattering and channeling (HEIS) ä X-ray photoemission - intensities and chemical shifts in binding energy (XPS) shifts in binding energy (XPS) ä X-ray photoelectron diffraction (XPD) ä Low-energy electron diffraction (LEED) ä Low-energy ion scattering (LEIS)
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MSU Colloquium 10/5/0129 Ti on Al(100): XPS intensity vs Ti coverage ä Attenuation follows flat film model (solid line) after 2 ML ä No decrease of intensity for first monolayer ä Possible Ti-Al interchange at top layer
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MSU Colloquium 10/5/0130 Ti on Al(110): HEIS Al surface peak vs Ti coverage ä Shadowing of Al atoms by Ti same as for Al(001) ä Critical thickness at ~5 ML ä Simulation ( ) for flat Ti layer in FCC Al sites ä Film relaxes for coverage > 5 ML
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MSU Colloquium 10/5/0131 Ti on Al(111): HEIS/Channeling ä Channeling dips at normal incidence ä Ti is shadowed so have ordered film on Al surface ä Ti and Al axes are aligned normal to surface
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MSU Colloquium 10/5/0132 Ti on Al(111): HEIS Al SP vs Ti coverage ä Al SP area initially decreases ä Ti shadows Al atoms ä After 2 ML the Al SP increases as if Al is disordered or alloyed ä XPD, LEED, ISS, XPS indicate ordered Ti film on ordered Al ä Dechanneling ?
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MSU Colloquium 10/5/0133 Angular Yield (Channeling dip) ä 1 MeV He + ä Al bulk yield ä Ag surface peak ä inc = 0 o ä det = 105 o ä ~10 15 ions/cm 2 ä min = 3.6%
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MSU Colloquium 10/5/0134 Ag on Al(100): XPS intensities ä Rapid decrease of Al peak ä Rapid growth of Ag peak ä Growth of Ag islands for high coverage ä Flat film grows at first but not pure Ag
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