1. NTHU PME EDL, Chih-Wei Lin Q1. Micromachined Gyroscopes Q2. Biological Structure: Diatom, Geckos and Insect Feet Chih-Wei Lin (D937708) NTHU PME Engineering Design Lab. PME5230 Homework Assignment #2

2. NTHU PME EDL, Chih-Wei Lin Q1. Micromachined Gyroscopes The micro gyroscopes work following the same principles as “Foucault Pendulum”, which is used to measure the angular rotation of the Earth and made by Jean B. L. Foucault (1819 ～ 1868). A suspended mass is allowed to sense oscillation and rotation induced by “Coriolis force”. By detect the position and velocity of the mass, the precision angle can be measured, which is proportional to the angle of rotation.

3. NTHU PME EDL, Chih-Wei Lin Applications Ride stabilization system Traction control system Navigation Airplane-control Platform stabilization Video camera

4. NTHU PME EDL, Chih-Wei Lin Different structure Vibrating prismatic beam Tuning fork Dual accelerometer Resonant ring Vibrating shell

5. NTHU PME EDL, Chih-Wei Lin Micromachined Angular Rate Sensor with two rotary oscillation modes (MARS-RR)

6. NTHU PME EDL, Chih-Wei Lin The advantages of gyroscope made by micro-machining High sensitivity Multi-function in one chip Mass production Low production cost down and power consumption

7. NTHU PME EDL, Chih-Wei Lin Scale law Usually, Coriolis Effect can be described by this equation. The scale factor of mass is “L 3 ”, and “L” for velocity. Thus, the scale factor of micro gyroscope is L 5.

8. NTHU PME EDL, Chih-Wei Lin Q2.Biological Structure: Diatom, Geckos and Insect Feet Example 1: Diatoms Diatoms are either unicellular or colonial. We can find diatoms all waters of the Earth. The characteristic of diatoms is that the cell wall is made by hydrated silicon- dioxide and feature sizes less than 5 nm.

9. NTHU PME EDL, Chih-Wei Lin Example 2: Wall-climbing hairs and attached pads Geckos are often seen in our house, which have special adhesion ability to climb on the wall.

10. NTHU PME EDL, Chih-Wei Lin Example 2: Wall-climbing hairs and attached pads Tettigonia viridissima (a insect captured in Germany ) owns attachment pad.

11. NTHU PME EDL, Chih-Wei Lin Example 3: Insect walking-feet