1. High speed InP-based heterojunction bipolar transistors Mark Rodwell University of California, Santa Barbara rodwell@ece.ucsb.edu 805-893-3244, 805-893-3262 fax 2001 ISCS Conference, October, Tokyo

2. How to Improve the Bandwidth of Bipolar Transistors ? Thinner base, thinner collector  higher f , but higher Rbb, Ccb what parameters are really important in HBTs ? how do we improve HBT performance ?

3. HBT scaling: transit times reduce T b by  2:1   b improved 2:1 reduce T c by 2:1   c improved 2:1 note that Ccb has been doubled..we had wanted it 2:1 smaller 2:1 improved device speed: keep G's, R's, I's, V's constant, reduce 2:1 all C's,  's

4. HBT scaling: lithographic dimensions Ccb/Area has been doubled..we had wanted it 2:1 smaller …must make area=L e W e 4:1 smaller  must make  W e & W c 4:1 smaller Base Resistance R bb must remain constant  L e must remain ~ constant reduce collector width 4:1 reduce emitter width 4:1 keep emitter length constant 2:1 improved device speed: keep G's, R's, I's, V's constant, reduce 2:1 all C's,  's

5. HBT scaling: emitter resistivity, current density Emitter Resistance R ex must remain constant but emitter area=L e W e is 4:1 smaller resistance per unit area must be 4:1 smaller increase current density 4:1 reduce emitter resistivity 4:1 2:1 improved device speed: keep G's, R's, I's, V's constant, reduce 2:1 all C's,  's Collector current must remain constant but emitter area=L e W e is 4:1 smaller and collector area=L c W c is 4:1 smaller current density must be 4:1 larger

6. for x 2 improvement of all parasitics: f t, f max, logic speed… base  2: 1 thinner collector 2:1 thinner emitter, collector junctions 4:1 narrower current density 4:1 higher emitter Ohmic 4:1 less resistive Scaling Laws for fast HBTs Challenges with Scaling: Collector mesa HBT: collector under base Ohmics. Base Ohmics must be one transfer length sets minimum size for collector Emitter Ohmic: hard to improve…how ? Current Density: dissipation, reliability Loss of breakdown avalanche Vbr never less than collector Egap (1.12 V for Si, 1.4 V for InP) ….sufficient for logic, insufficient for power Narrow-mesa with 1E20 carbon-doped base undercut-collector transferred-substrate

7. Transferred-Substrate HBT Process Flow UCSB ONR

8. Ultra-high f max Transferred-Substrate HBTs Substrate transfer provides access to both sides of device epitaxy Permits simultaneous scaling of emitter and collector widths Maximum frequency of oscillation  Sub-micron scaling of emitter and collector widths has resulted in record values of extrapolated f max Extrapolation begins where measurements end New 140-220 GHz Vector Network Analyzer (VNA) extends device measurement range 20 25 30 101001000 Gains, dB Frequency, GHz f max = 1.1 THz ?? f  = 204 GHz Mason's gain, U H 21 MSG Emitter, 0.4 x 6  m 2 Collector, 0.7 x 6  m 2 I c = 6 mA, V ce = 1.2 V 3000 Å collector 400 Å base with 52 meV grading AlInAs / GaInAs / GaInAs HBT Michelle Lee

9. 140-220 GHz network analysis HP8510C network analyzer & Oleson Microwave Lab frequency Extenders GGB waveguide-coupled probes 75-100 GHz network analysis GGB waveguide-coupled probes HP W-band test set 1-50 GHz network analysis GGB coax-connectorized probes HP 0.045-50 GHz test set 220 GHz On-Wafer Network Analysis Miguel Urteaga

10. Submicron HBTs have very low C cb (< 5 fF) HBT S12 is very small Standard 12-term VNA calibrations do not correct S12 background error due to probe-to-probe coupling Solution Embed transistors in sufficient length of transmission line to reduce coupling Place calibration reference planes at transistor terminals Line-Reflect-Line Calibration Standards easily realized on-wafer Does not require accurate characterization of reflect standards Characteristics of Line Standards are well controlled in transferred-substrate microstrip wiring environment Accurate Transistor Measurements Are Not Easy Transistor in Embedded in LRL Test Structure 230  m Corrupted 75-110 GHz measurements due to excessive probe-to-probe coupling

11. Can we trust the calibration ? S11 of through About –40 dB 140-220 GHz calibration looks OK75-110 GHz calibration looks Great S11 of open About 0.1 dB / 3 o error dB S21 of through line is off by less than 0.05 dB S11 of open S11 of short S11 of through Probe-Probe coupling is better than –45 dB Miguel Urteaga

12. Submicron transferred-substrate HBTs 0.25  m emitter-base junction 0.4  m Schottky collector

13. Emitter: 0.3 x 18  m 2, Collector: 0.7 x 18.6  m 2 I c = 5 mA, V ce = 1.1 V Submicron InAlAs/InGaAs HBTs: Unbounded (?!?) Unilateral power gain 45-170 GHz Gains are high at 200 GHz but f max can’t be determined unbounded U UCSB ONR emitter collector Miguel Urteaga

14. Negative Unilateral Power Gain ??? YES, if denominator is negative This may occur for device with a negative output conductance (G 22 ) or some positive feedback (G 12 ) Select G L such that denominator is zero: Can U be Negative? What Does Negative U Mean? Device with negative U will have infinite Unilateral Power Gain with the addition of a proper source or load impedance AFTER Unilateralization Network would have negative output resistance Can support one-port oscillation Can provide infinite two-port power gain Simple Hybrid-  HBT model will NOT show negative U

15. C cb Cancellation by Collector Space-Charge measured 0.64 fF decrease Ccb total Ic Collector space charge screens field, Increasing voltage decreases velocity,  modulates collector space-charge  offsets modulation of base charge  Ccb is reduced Moll & Camnitz, Betser and Ritter

16. 175 GHz Single-Stage Amplifier Submicron HBT Program UCSB Miguel Urteaga 6.3 dB gain at 175 GHz

17. 295 GHz f , & f max HBT UCSB Yoram Betser Emitter 1 x 8  m 2, Collector 2 x 8.5  m 2. 2000 Å collector 300 Å base with 52 meV grading AlInAs / GaInAs / GaInAs HBT

18. Fast InP DHBTs f   = 165 GHz; f max = 303 GHz 5 V breakdown at 10 5 A/cm 2 >9 V at 2*10 4 A/cm 2 UCSB pk Sundararajan M Dahlstrom 1x 8 micron emitter, 2x 10 micron collector 3 kÅ collector, 400 Å base f   = 216 GHz; f max = 210 GHz 4 V breakdown at 10 5 A/cm 2 >6 V at 2*10 4 A/cm 2 2 kÅ collector, 400 Å base 1x 8 micron emitter, 2x 10 micron collector

19. UCSB Sangmin Lee f max = 425 GHz, f t = 139 GHz InGaAs/InP DHBT, 3000 Å InP collector 0.5  m x 8  m emitter (mask) 0.4  m x 7.5  m emitter (junction) 1.2  m x 8.75  m collector I c =4.5 mA, V ce =1.9 V BV CEO = 8 V at J E =5*10 4 A/cm 2

20. Is low DHBT f  due to base-collector grade ? 480 Å grade 100 Å grade collector velocity and grade: InP has higher Gamma-L separation than InGaAs → Vsat should be higher in InP → f t should be higher, not lower slow transport in InAlAs ? → thin grade !

21. 0.5  m emitter, 0.25  m base contacts Narrow-Mesa HBTs: high fmax if high base doping

22. InP/InGaAs/InP Metamorphic DHBT on GaAs substrate UCSB 165 GHz f t 92 GHz f max triple-mesa device (not transferred-substrate) Growth: 400 Å base, 2000 Å collector GaAs substrate InP metamorphic buffer layer (high thermal conductivity) Processing conventional mesa HBT narrow 2 um base mesa Results 165 GHz f t, 92 GHz f max, 6 Volt BVCEO,  =27

23. High Speed Amplifiers 18 dB, DC--50+ GHz UCSB Dino Mensa PK Sundararajan 8.2 dB, DC-80 GHz >397 GHz gain x bandwidth from 2 HBTs S 22 S 11 S 21

24. HBT distributed amplifier UCSB PK Sundararajan 11 dB, DC-87 GHz AFOSR TWA with internal ft-doubler cells

25. 18 GHz  ADC Design comparator is 75 GHz flip flop DC bias provided through 1 K  resistors Integration obtained with 3 pF capacitors RTZ gated DAC Integrated Circuit 150 HBTs, 1.2 x 1.5 mm, 1.5 W UCSB S Jaganathan

26. 75 GHz HBT master-slave latch connected as Static frequency divider technology: 400 Å base, 2000 Å collector HBT 0.7 um mask (0.6 um junction) x 12 um emitters 1.5 um mask (1.4 um junction) x 14 um collectors 1.8  10 5 A/cm 2 operation, 180 GHz ft, 260 GHz fmax simulations: 95 GHz clock rate in SPICE test data to date: tested, works over full 26-40 and 50-75 GHz bands UCSB Thomas Mathew Hwe-Jong Kim modulation is synthesizer 6 GHz subharmonic 3.92 V, 224 mA, 0.88 W ~3.5 dBm input power

27. MHBT slide

28. Benchmark: master-slave flip-flop configured as 2:1 static frequency divider Source: M Sokolich, HRL, Rodwell, UCSB Logic Speed: III-V vs. Silicon 0.1 um 0.15 um

29. State-of-art in HBTs, 2000: cutoff frequencies InP HBTs today 2x faster, & more scalable: Johnson limit, 2x faster at 5x larger dimensions ~1 um emitters ~1 um emitters (0.4 um) ~0.1 um emitters (UCSB t.s. device)

30. State-of-Art in HBTs, 2000: small-scale circuits Si / SiGe has rough parity in logic with InP despite lower f , f max due to higher current density, better emitter contacts Si/SiGe has significantly slower amplifiers

31. Neither f  nor f max predicts digital speed C cb  V logic /I c is very important  collector capacitance reduction is critical  increased III-V current density is critical R ex must be very low for low  V logic at high J c InP: R bb, (  b +  c ), are already low, must remain so What do we need for fast logic ? ECL M-S latch

32. What HBT parameters determine logic speed ? Caveats: assumes a specific UCSB InP HBT (0.7 um emitter, 1.2 um collector 3kÅ thick, 400 Å base, 1.5E5 A/cm^2) ignores interconnect capacitance and delay, which is very significant

33. Why isn't base+collector transit time so important ?

34. Very strong features of Si-bipolars Emitter Width: 0.1 um Emitter Current Density 10 mA/um 2 Polysilicon Emitter Contact metal-semiconductor contact area >> emitter junction area  low Rex Polysilicon base contact low sheet resistance in extrinsic base small extrinsic collector-base junction area

35. InP HBT limits to yield: non-planar process Emitter contact Etch to base Liftoff base metal Failure modes Yield degrades as emitters are scaled to submicron dimensions Emitter planarization, interconnects

36. Submicron HBT scaling: Scaling HBTs for 2 x increased speed: 2 x thinner layers, 4 x narrower junctions 4 x higher current density, 4 x improved vertical contacts Results with submicron III-V HBT scaling: 300 GHz f , high (unmeasurable) f max 6-dB 175 GHz amplifiers, 75 GHz true digital ICs Challenges with HBT scaling for fast digital : collector width scaling, current density, emitter resistivity high-yield submicron emitter & collector processes

37. In Case of Questions

38. Scaling Laws, Collector Current Density, C cb charging time Base Push-Out (Kirk Effect) Collector Depletion Layer Collapse Collector capacitance charging time is reduced by thinning the collector while increasing current