1. Microelectronics & Device Fabrication

2. Vacuum Tube Devices Thermionic valve Two (di) Electrodes (ode)

3. ~ 1940, ENIAC was constructed at the Moore School of Electrical Engineering at the University of Pennsylvania. It consisted of 19,000 vacuum tubes, 1,500 relays, hundreds of thousands of resistors and capacitors; all told, including power supply and an air cooling system, it weighed over thirty tons and consumed 200 kilowatts of electrical power. Vacuum Tube Devices Electronic numeric integrator and computer (ENIAC) (1946) $ 400.000

4. Solid State Devices Transistors (BJT, FET, etc.) Semiconductor materials can generate and sense light  OPTOELECTRONIC DEVICES They can also sense magnetism, temperature, pressure  variety of SENSOR devices and TRANSDUCERS (energy converters) appeared on the market.

5. Although semiconductor diodes and transistors are still widely used as individual components, 1959: Robert Noyce discovered that more than one transistor could be constructed on a single piece of semiconductor material. Then other components (resistors, capacitors, etc.) were added with transistors and then interconnected to form a complete circuit on a single chip or piece of semiconductor material. Integrated Circuit (IC) or IC Chip

6. Smaller and thinner than a dime, this tiny silicon chip contains millions of transistors that work together

7. Growth of Semiconductor Device Fabrication – Oxidation – Patterning (lithography, deposition, etching) Packaging Steps

8. Growth of Semiconductors 1.Growth from a melt (Czochralski Method) 2.Epitaxial Growth: Chemical Vapor-Deposition, Liquid- Phase Epitaxy, Molecular Beam Epitaxy

9. Growth From a Melt: Czochralski Method Cleaning, sectioning...

10. Si Single Crystal Wafer

11. Device Fabrication Techniques Oxidation Silicon SiO2 Gas Diffusion of oxygen

12. Photolithography

13. Microfabrication Etching & Deposition Simplified illustration of the process of fabrication of a CMOS inverter on p-type substrate in semiconductor microfabrication Detail of an etch step See «How do they make Silicon Wafers and Computer Chips?» at youtube

14. Patterns created with subsequent layers of photoresist, elemental gas deposition, and/or etching and metal deposition.Source: wikicommons Schematic structure of a CMOS chip, as built in the early 2000s.