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Noise and Random Telegraph Signals in Nanoelectronic Devices Zeynep Çelik-Butler Electrical Engineering Department University of Texas at Arlington Arlington,

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Presentation on theme: "Noise and Random Telegraph Signals in Nanoelectronic Devices Zeynep Çelik-Butler Electrical Engineering Department University of Texas at Arlington Arlington,"— Presentation transcript:

1 Noise and Random Telegraph Signals in Nanoelectronic Devices Zeynep Çelik-Butler Electrical Engineering Department University of Texas at Arlington Arlington, Texas, 76019 celikbutler@ieee.org

2 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 2 Outline u Motivation: Problems Encountered as the Devices Shrink, Frequencies Increase, and Voltages Reduce u Improved Model for 1/f Noise in MOSFETs u Random Telegraph Signals in MOSFETs u Complex RTS u Extraction of trapping parameters using RTS

3 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 3 UTA - Noise Characterization Facilities  6' x 6' x 8' Shielded Room  3 Spectrum and Signal Analyzers, f=1  Hz - 20 GHz.  3 Cryostats, T= 2 K to 350 K.  Various Lock-ins, Preamps, System Controllers, Battery Operated Sources etc.  Optical Equipment  Computer Software for Modeling

4 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 4 Problems Encountered as the Devices Shrink, Frequencies Increase, and Voltages Reduce u Signal-to-noise ratio decreases. u Noise models based on large number of electrons break down. u Quantum effects become dominant.

5 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 5 Signal to Noise Ratio Decreases u For a MOSFET  Start from W=100  m, L=10  m, t ox =800Å, N SS =4x10 10 eV - 1 cm -2. u Assume scaling factor is K. u Assume trap and surface state densities remain the same. u Increase in noise level due to the K 1/2 law chosen for t ox. u Unpredictability of noise level for K>20. u N SS is actually a two dimensional Poisson variable.

6 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 6 Large Area Noise Models Break Down uSingle electron, single trap effects. N SS =4x10 10 eV -1 cm -2, W=1  m, L=0.1  m. ECEC EVEV EFEF SiO 2 Si kT=26 meV 1 trap per channel

7 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 7 Large Area Noise Models Break Down Break-down of large-area models for sub-micron channel length. A=N t (cm -3 eV -1 ) B=  eff N t (cm -1 eV -1 ) C=  2  eff 2 N t (cm eV -1 ) A=B 2 /(4C) Independent parameters:  and N t

8 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 8 Large Area Noise Models Break Down V gs -V T = -1 V V ds = -50 mV

9 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 9 Large Area Noise Models Break Down

10 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 10 Large Area Noise Models Break Down Modified 1/f noise model that takes into account threshold variation along the channel. For simplicity assume two regions: –  V,  L, V T2,, A 2, B 2, C 2 – V ds -  V, L-  L, V T1, A 1, B 1, C 1 –  L<<L, V T  V T1 – A 1 = A 2, since N t1 = N t2 – B 1 2 /C 1 = B 2 2 /C 2 = 4A – I 1 = I 2 = I d –  eff1 =  eff2, Independent parameters: N t,  1,  2, V T2, and  V

11 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 11 Large Area Noise Models Break Down Modified 1/f noise model that takes into account threshold variation along the channel.

12 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 12 RTS in MOSFETs Random Telegraph Signals: single electron switching. 11 00 IdId

13 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 13 RTS in MOSFETs Random Telegraph Signals (RTS) with a Lorentzian on 1/f spectum. Time Scale seconds Time Scale milliseconds Frequency (f) PSD

14 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 14 2 RTS levels 1 RTS process

15 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 15 3 RTS levels 2 RTS processes

16 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 16 5 RTS levels 4 RTS processes

17 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 17 COMPLEX RTS Complex random telegraph signals due to multiple traps

18 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 18 RTS in MOSFETs RTS can be used to characterize trapping sites. RTS modeling.

19 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 19 RTS in MOSFETs RTS can be used to characterize trapping sites. Position of the trap along the channel, y T Position of the trap in the oxide, x T Trap energy, E Cox - E T Screened scattering coefficient, 

20 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 20 Trapping Parameters Through RTS in MOSFETs x T =2.7 nm y T /L=0.6 E Cox -E T =3.04 eV

21 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 21 Trapping Parameters Through RTS in MOSFETs

22 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 22 Trapping Parameters Through RTS in MOSFETs

23 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 23 Effects of Quantization Increase in effective energy band-gap: change in  e and  c Shift in carrier distribution: change in C ox

24 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 24 3-D Treatment of RTS

25 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 25 2-D Treatment of RTS -  c and  e

26 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 26 2-D Treatment of RTS From Stern - Howard wave-function:

27 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 27 2-D Treatment of RTS Calculate the inversion carrier concentration assuming they are located primarily at E 0 :

28 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 28 2-D Treatment of RTS -  c and  e To first order, the ratio is not affected by quantization.

29 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 29 RTS Measurements MDD n-MOSFETs W eff  L eff = 1.37  0.17  m 2 T ox = 4 nm V T = 0.375 V for V SB = 0 V strong inversion, linear region V DS = 100 mV V SB = 0 - 0.4 V, V GS = 0.5 - 0.75 V

30 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 30 E Cox -E T and z T from  c and  e ln(  c /  e ) V SB =0 V

31 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 31 E Cox -E T and z T from  c and  e ln(  c /  e ) V SB =0.4 V

32 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 32 E Cox -E T and z T from  c and  e T ox =4 nm

33 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 33 Dependence of  e on V SB  e (s) V GS =0.75 V V GS =0.55 V

34 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 34 Dependence of  c on V SB  c (s) V GS =0.55 V V GS =0.75 V V GS =0.65 V

35 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 35 c n Extracted from  c and  e

36 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 36 2-D Treatment of RTS - Amplitude Question: How does quantization affect number and mobility fluctuations? –Number fluctuation through N –Mobility fluctuations through oxide charge scattering,  t.

37 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 37 Extraction of Scattering Coefficient Mobility Fluctuations: –Using Surya’s 2D surface mobility fluctuations model,

38 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 38 Calculation of Scattering Coefficient Considering a single trap: N t (E,z) = N t  (E-E T )   (z-z T ) 

39 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 39 RTS Amplitude

40 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 40 Extraction of Scattering Coefficient  = 2.91x10 -13 - 9.93x10 -15 ln(N) T ox =4 nm

41 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 41 Extraction of Scattering Coefficient W  L = 1.2  0.35  m 2 z T =0.25 nm T ox =8.6 nm

42 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 42 Possible Reasons for Discrepancy Threshold non-uniformity along the channel is not taken into account. Location of the trap along the channel Variation of the channel voltage from source to drain is neglected.  N/  N t  1 is not valid, even in strong inversion, for very thin oxides.

43 Noise and Reliability Laboratories, Zeynep Celik-Butler, celikbutler@ieee.org 43 ACKNOWLEDGEMENTS This work has been supported by NSF, THECB-ATP, SRC, TI, Legerity, Motorola and ST-Microelectronics.


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