1. TO STUDY THE DEFLECTION OF MEMS ETM ACTUATOR BY USING 20-Sim
- CHANDRASEKHARAN
SRINIVASAN
E 479/579 Mechatronics Modeling and Simulation

2. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

3. E 479/579 Mechatronics Modeling and Simulation
INTRODUCTION
An simple one element Electro thermal mechanical actuator was modeled in 20-sim.
Electrical voltage is given as input so as to get the deflection as the output.
Modeled for a 3x2 ETM actuator array.
The deflection output is validated with the results obtained from the reference papers.
E 479/579 Mechatronics Modeling and Simulation

4. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

5. E 479/579 Mechatronics Modeling and Simulation
ETM ACTUATORS
Types of ETM actuators
Single ‘hot’ arm ETM actuator
Double ‘hot’ arm ETM actuator
Bi-directional Vertical thermal actuator (BVTA)
E 479/579 Mechatronics Modeling and Simulation

6. Fig.1. [1] Double ‘hot’ arm Polysilicon Electrothermal microactuator
ETM ACTUATORS
Fig.1. [1] Double ‘hot’ arm Polysilicon Electrothermal microactuator
E 479/579 Mechatronics Modeling and Simulation

7. PRINCIPLE OF OPERATION
Input:
Electrical voltage or current
Heat generation causes temperature increase
Expansion of heated parts of actuator
Generation of thermal stresses and mechanical force
Mechanical force carries out the required mech. work
PRINCIPLE OF OPERATION
E 479/579 Mechatronics Modeling and Simulation

8. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

9. E 479/579 Mechatronics Modeling and Simulation
FEA ANALYSIS
E 479/579 Mechatronics Modeling and Simulation

10. E 479/579 Mechatronics Modeling and Simulation
FEA ANALYSIS
The FEA analysis using ABAQUS had to be aborted because of the following reasons:
1. Lots of errors
2. Missing out on few parameters
The research on the FEA analysis will be continued.
E 479/579 Mechatronics Modeling and Simulation

11. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

12. 20-Sim BONDGRAPH MODEL OF A SINGLE ACTUATOR
E 479/579 Mechatronics Modeling and Simulation

13. E 479/579 Mechatronics Modeling and Simulation
Constant wave generator for voltage input (1-10 volts)
MSe, the effort is set to the constant input signal source
Gyrator to transform the effort coming in (voltage) into flow going out.
r, Gyrator modulus ( or the multiplying factor to get the deflection)
R, damping
C, stiffness
I, Moving mass of the element
Integrator to get the deflection output
E 479/579 Mechatronics Modeling and Simulation

14. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

15. ACTUATOR ARRAY 3x2 array of actuators
The width of the narrow beam is 30μm-40μm
Material properties of polysilicon
The effective moving mass
is 6.75e-12 kg
An Integrated ETM device with 3 X 2 array
Ref. paper [ 4 ]
E 479/579 Mechatronics Modeling and Simulation

16. 20-Sim MODEL OF AN ACTUATOR ARRAY
E 479/579 Mechatronics Modeling and Simulation

17. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

18. E 479/579 Mechatronics Modeling and Simulation
Voltage Input: 2v
Deflection:
Voltage Input: 4v
Deflection:
E 479/579 Mechatronics Modeling and Simulation

19. E 479/579 Mechatronics Modeling and Simulation
Voltage Input: 6v
Deflection:
Voltage Input: 8v
Deflection:
E 479/579 Mechatronics Modeling and Simulation

20. E 479/579 Mechatronics Modeling and Simulation
Introduction
Electro-Thermo-Mechanical Actuators
FEA Analysis
20-Sim model of an actuator
Actuator array
Simulation results
Validation
E 479/579 Mechatronics Modeling and Simulation

21. E 479/579 Mechatronics Modeling and Simulation
VALIDATION OF RESULTS
Voltage Input
20-Sim Results
Validated result 1
0.2338 - 2
0.5537
0.55 3
1.0401
1.1 4
1.7345
1.76 5
2.5079
2.53 6
3.7476
3.74 7
5.1355
5.17 8
7.033
6.93 9
8.9619
8.8
Deflection vs Voltage plot. Ref. paper [2]
Results validated in reference to the paper [2]
E 479/579 Mechatronics Modeling and Simulation

22. E 479/579 Mechatronics Modeling and Simulation
VALIDATION OF RESULTS
The above plot shows the change in deflection of the actuator at different voltages
E 479/579 Mechatronics Modeling and Simulation

23. E 479/579 Mechatronics Modeling and Simulation
CONCLUSION
The simulation results obtained from 20-Sim are in good agreement with the results in the reference paper [2].
The deflection results of a single ETM actuator were similar to that of the actuator array
E 479/579 Mechatronics Modeling and Simulation

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EXTENSION
Complete the FEA analysis on the ETM actuator and compare it with the 20-Sim results.
To research on the fact that the ETM actuator gets destroyed when the applied voltage reaches 10 volts.
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25. E 479/579 Mechatronics Modeling and Simulation
REFERENCES
“Design and modeling of a MEMS bidirectional vertical thermal actuator”
-Dong Yan, Amir Khajepour and Raafat Mansour
“Experimentally verified procedure for determining dynamical model of the ETM MEMS structures” – Dept. of Engineering, Univ. of Texas, Arlington.
“Electrothermal MEMS microengine capable of bi-directional motion” Dept. of Engineering, Tucker Technology center, Texas
“Effect of Thermal Boundary condition and scaling on Electro-Thermal compliant micro devices” – Nilesh Mankane and G.K. Ananthasuresh
“System Dynamics: Modeling and Simulation of Mechatronic systems” – Karnopp, Margolis and Rosenberg
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26. E 479/579 Mechatronics Modeling and Simulation
THANK YOU
E 479/579 Mechatronics Modeling and Simulation