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Published byMercy Gibbs Modified over 9 years ago
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Manip 6” Diameter TSP shield Top Level Middle Level Bottom Level Lower Level CF flanges Not threaded except wide bore Table top 3’ high (Al table top) Electro polished + vacuum annealed 8” Diameter REMOVABLE Baffle to shield turbo from TSP Sample (focus) will be offset 1” from chamber center at top level. TSP filament 8” Diameter
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8” LEED4.5” QMS 2.75” Sputter 6” Viewport 2.75” Wide bore 2.75” Evap Top Level – focus to a 2” diameter circle at center of chamber on this level. 12” 11” 2” On QMS port bolts come from inside 4.65”
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2.75” 4.5” Middle Level – focus to a 2” diameter circle at center of chamber on the top level. 2.75” Wide bore 4.5” 2.75” 2.75” Wide bore 2”
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Lower Level – point horizontally 4.5” 2.75” Wide bore 2.75” 5”
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Bottom Level – point horizontally 8” 2.75” 6”
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