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Measurement of the index of refraction for uranium dioxide in the extreme ultraviolet and some other stuff to make the name longer Presented by Heidi Dumais
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Some Background XUV: 1nm – 60nm Borders molecular scale Things like to absorb it… in particular air
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Applications – Why We Might Care Microelectronics Astronomical imaging Microscopy
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Procedure Anatomy of a thin film ALS beamline Transmission measurements Reflection measurements
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Analysis Transmission data gives alpha*thickness Reflection data gives thickness Together we get alpha → complex index of refraction
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Reflection Analysis Reflection data fit to Parratt recursive model – vary the index and the thickness
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Transmission Analysis (1 st Approx) Fit the “rocking transmission” curves to a model to extract alpha*thickness Divide out thickness from Reflection to get alpha Alpha gives beta
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Redo
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Acknowledgments Dr. Turley and Dr. Allred Zephne Larsen, Allison Wells, Keith Jackson NASA BYU DOE and Eric Gullikson
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