1. EE42/100, Spring 2006Week 15, R. White1 Micro- and Nanotechnology

2. EE42/100, Spring 2006Week 15, R. White2 The Sizes of Things MACRO MICRO NANO

3. EE42/100, Spring 2006Week 15, R. White3 Polla dimension slide Carbon Nanotube ~2 nm diameter The Macro to Nano World Things Natural (Carbon Chemistry) Things Manmade (Silicon Chemistry) DNA ~2-1/2 nm diameter Fly ash ~ 10-20  m Human hair ~ 70-100  m wide Ant ~ 5 mm Quantum corral of 48 iron atoms on copper surface positioned one at a time with an STM tip Corral diameter 14 nm Atoms of silicon spacing ~tenths of nm Head of a pin 1-2 mm Microworld 1 nanometer (nm) 1 micrometer (  m) 1 millimeter (mm) 10 -2 m 10 -3 m10 -4 m10 -5 m10 -6 m10 -7 m10 -8 m10 -9 m 10 -10 m Visible Nanoworld InfraredUltravioletMicrowaveSoft x-ray Dust mite 200  m MicroElectroMechanical devices 10 -100  m wide Macroworld Transistor gate 60 nm Approved for Public Release, Distribution Unlimited

4. EE42/100, Spring 2006Week 15, R. White4 C 60 -- Buckeyball

5. EE42/100, Spring 2006Week 15, R. White5 HP STM AFM

6. EE42/100, Spring 2006Week 15, R. White6 HP computer

7. EE42/100, Spring 2006Week 15, R. White7 Will Device Size Keep Shrinking? Carbon nanotubes Optical Lithography Extreme UV ? DNA Nanowires

8. EE42/100, Spring 2006Week 15, R. White8 Early MEMS (Micro-Electro-Mechanical Systems) structures and devices

9. EE42/100, Spring 2006Week 15, R. White9 Early micromachined device: Ink-jet nozzle – A thin-film heater behind each nozzle vaporizes the ink and ejects a droplet of ink

10. EE42/100, Spring 2006Week 15, R. White10 Micro-guitar from Cornell University (the strings actually vibrate when plucked)

11. EE42/100, Spring 2006Week 15, R. White11

12. EE42/100, Spring 2006Week 15, R. White12 Early micromachine (with dead mite)

13. EE42/100, Spring 2006Week 15, R. White13 Laser scanning micromachine with electrostatic motors, gears, and mirror

14. EE42/100, Spring 2006Week 15, R. White14 Micromachine: Safety lock for nuclear bomb

15. EE42/100, Spring 2006Week 15, R. White15 Digital Light Projector (Texas Instruments)

16. EE42/100, Spring 2006Week 15, R. White16 16-micron-square tilting mirrors built over CMOS drive circuit

17. EE42/100, Spring 2006Week 15, R. White17 5. MEMS Are Reliable DLP™ projection systems display an original-quality picture time and time again with zero hassle and minimal maintenance. With more than 5 million systems shipped to more than 75 manufacturers since 1996, DLP™ technology has a proven track record for outstanding dependability. The physical fatigue and failure mechanisms that govern mechanical behavior in macro- scale materials don’t seem to be as prominent in MEMS devices. Some of these devices have been cycled up and down 10 16 times without failure. Approved for Public Release, Distribution Unlimited

18. EE42/100, Spring 2006Week 15, R. White18 Microstructures etched in Teflon -- useful in BioMEMS applications

19. EE42/100, Spring 2006Week 15, R. White19 Size Benefits of MEMS Transistor Chips Transistor Chips Quartz Crystal Quartz Crystal IF Filter (SAW) IF Filter (SAW) Inductors Capacitors Resistors Inductors Capacitors Resistors IF Filter (SAW) IF Filter (SAW) RF Filter (ceramic) RF Filter (ceramic) MEMSTechnology Single-Chip Transceiver Inductor IF Filter Reference Resonator RF Switch RF Filter Approved for Public Release, Distribution Unlimited

20. EE42/100, Spring 2006Week 15, R. White20 MEMS Devices with Common Challenges Analog Devices Georgia Tech Texas Instruments Sandia National Laboratory MEMS/NEMS - Surfaces & Interfaces - Reliability Physics - Scaling Physics - Materials & Processes - Interconnections - Microfluidics - Noise Mechanisms - Modeling - Signal Processing Microfluidics Data Storage Biology & Medicine Uncooled IR Displays Chemical Sensing Optical Comms Navigation Nanogen Rockwell rf Comms Biotechnology Lucent Analog Devices IBM UC Berkeley Honeywell Rockwell Approved for Public Release, Distribution Unlimited

21. EE42/100, Spring 2006Week 15, R. White21 Where Do We Go From Here? Nanoelectromechanical Systems (NEMS) NEMS are like MEMS, only one or more key enabling components or structures has a physical dimension of less than 1 micrometer in size and can be integrated with another dissimilar components. NEMS is the integration of sensors, actuators, electronics, photonics, energy, fluidics, chemistry, and biology into a meaningful system enabled by sub-micrometer science and engineering precision. We are now beginning the Age of NEMS. Approved for Public Release, Distribution Unlimited