1. Microsystems Technology Office William C. Tang, Ph. D. MEMS Program Manager Microsystems Technology Office Defense Advanced Research Projects Agency (703) 696-2254 wtang@darpa.mil http://www.darpa.mil/MTO/MEMS DARPA MTO Approved for Public Release - Distribution Unlimited Overview of MEMS Programs at DARPA and Applications in Space First Canadian Workshop on MEMS technology for aerospace applications, the National Research Council Canada, April 12, 2001

2. [MEMS at DARPA and Space App Sent.ppt] Slide 2 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited DARPA Mission Defense Science Information Systems Microsystems Technology Information Technology Special Projects Advanced Technology Tactical Technology Radical Innovation in Support of National Security

3. [MEMS at DARPA and Space App Sent.ppt] Slide 3 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited MEMS Application Domains MEMS Exploder for Torpedoes Shear-Stress Sensor for Jet Fighter (Caltech) Pico Satellites MEMS Sensors for Munitions M E M S DARPA

4. [MEMS at DARPA and Space App Sent.ppt] Slide 4 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited Pico Satellite Potential Applications F Cooperative constellations F Sparse aperture antennas F Inspect and service missions F Extremely agile launch-on-demand, short-term, survivable and robust communications and surveillance space systems

5. [MEMS at DARPA and Space App Sent.ppt] Slide 5 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited PicoSAT Aboard Stanford OPAL Satellite F First demonstration: ä Launched by first flight of Minotaur 26 Jan 2000 (sponsored by Air Force and Missile System Center) ä Two PICOSAT linked by 30-m-long tether jettisoned from a mother ship, OPAL (Stanford), 7 Feb 2000 ä Operate MEMS RF switches in space 30-m-long tether for tracking & communication demonstration

6. [MEMS at DARPA and Space App Sent.ppt] Slide 6 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited Pico Satellite Data Hopping Demo MEMS in Pico Satellites MEMS in Pico Satellites Picosat 1Picosat 2 Picosat 3 MEMS RF switch (Rockwell) 2.5 x 7.5 x 10 cm 250 gm Pico Satellite (Aerospace Corp)

7. [MEMS at DARPA and Space App Sent.ppt] Slide 7 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited MEMS-Replaceable Transceiver Components Off-chip passive elements Receiver Ant 1Ant 2 Antenna Switch T/R Switch Bandpass Filter (Ceramic) I Q Transmitter Current research:  Replace all off-chip passive elements with MEMS resonators & filters   chip-scale integration & improved performance Xstal Tank VCO IF PLL Channel Select PLL ADC IF Mixer IF LNA AGC RF LNA Mixer Image Reject Filter (Ceramic) IF Filter (Ceramic) 90° Xstal Tank VCO Transmit PLL 90° DAC Modulator Power Amplifier I Q Current Cell Phone Board Off-chip C & L = 80% of area

8. [MEMS at DARPA and Space App Sent.ppt] Slide 8 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited 92 MHz Free-Free Beam µ-Resonator F Free-free beam µ-mechanical resonator with non-intrusive supports  reduce anchor dissipation  higher Q

9. [MEMS at DARPA and Space App Sent.ppt] Slide 9 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited MEMS Actuators for Data Storage Areal density: 1-100 Gb/cm 2 Transfer Rates: 0.1-10 Mb/s Size: 0.5 cm 3 Power consumption: <1W Parallel atomic force imaging with MEMS to exceed densities of conventional magnetic and optical storage

10. [MEMS at DARPA and Space App Sent.ppt] Slide 10 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited High-Energy-Density MEMS Power Honeywell Knock Engine Concept (New Start) MIT Thermoelectric Generator Concept (New Start) Energy Density (W-hr/Kg) Methane Toluene TNT Lithium Ion 125 4,000 12,000 15,000 Catalyst Propane + Air Sealing Plate Thermopiles Resistive Start-up Heater Thin insulating membrane Q Q Q

11. [MEMS at DARPA and Space App Sent.ppt] Slide 11 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited Integrated Fuel Cell and Fuel Processor (CWRU & Battelle) F Objectives ä Demonstrate a 10 milliwatt fuel processor operating with clean liquid fuels (24 months) ä Demonstrate a 10 milliwatt fuel cell (24 months) ä Demonstrate a 50 milliwatt fuel processor operating with logistics fuels (36 months) Concept – Fuel Processor Concept – Fuel Cell

12. [MEMS at DARPA and Space App Sent.ppt] Slide 12 Microsystems Technology Office DARPA MTO Approved for Public Release - Distribution Unlimited Swiss Roll Combustor (USC) ~ 5 mm 3-D toroidal Swiss roll microcombustor/generator