1. Fabricated Test Suite Design Deadline: 5/1

2. Agenda Overview of Materials / Rules / Schedule Establish General Layout and Principles Scope of Devices to Fab Measurement Instruments Timetable

3. PolyMUMPS Info

4. 8 mm Raffi’s SA/GA Jason’s Constants Measurements Simple Comparison Devices Complex Comparison Devices 4000 µm x 4000 µm sub squares, but flexible to change We receive 15 1 cm x 1cm chips… the outside mm is unsafe?

5. Rough Subsquare Capacity Sufficient distance between devices –Need contacts for electrostatics Want things to line up, so it is possible to find the devices we’re measuring on the chip. –We can add labels Want duplicates (5?) so we do not have to remount if one breaks. 400 µm x 400 µm area for complex devices –Have space for approximately 100 devices / 5 == 20 unique. 100 µm x 1 00 µm area for small devices –Have space for 16 * 20 = 320 unique devices.

6. MF_C.m MF_Isrc.m MF_L.m MF_R.m MF_Vsrc.m MF_anchor.m MF_beam2d.m MF_beam3d.m MF_comb2d.m MF_eground.m MF_f2d.m MF_f3d.m MF_gap2d.m MF_gap2dforce.m MF_gap3dforce.m MF_opamp.m MF_pos.m MF_vcvs.m Anchor – have a few anchors (but do not want to do too many, as other people have already done extensive tests). Beams – Some simple beams at different angles and different sizes/lengths, different anchorings… as well as different actuation methods Simple Comparison Devices Gaps – different sizes and spacings Comb drive – different length/number/spacing of teeth Need to determine what ranges to test.

7. Complex Comparison Devices Beamgap Mirror Tang Resonator Cantilever Serpentine

8. Measurement Instruments SMIS ( resolves 1 µm in-plane 30-50 nm out-plane static) –Measure surface up to 1 MHz vibrations –Can also serve as just a camera –Possibly will be able to attach probe tips Microvision ( same in-plane as SMIS… depends on magnification ) –Like a probe-station camera… can produce AVI But need a microlab account… –Also, may use Pisano’s camera in 5109 Etch. Need to coordinate with people in 5109 Laser Doppler Vibrometer –Measures a single point 0.5 Hz – 1.5 MHz –Also need a microlab account. Regardless, we may want add markings in the Poly0 layer to eyeball displacements, as well as alignment markings.

9. Timetable Mid-late-March –Review the devices we want to include Early April –Review layout, sanity check End April –Finalize layout and submit