1. The Anti-Gravity MicroMachine
Presented by:
Vertically Challenged

2. Introduction Vertically Challenged is… Shabnam Abedi Moghaddam
Michele La Haye
Richard Tu
Terrence Yu

3. What are Micromirrors?
Change the angle of a reflected beam in multiplexing and de-multiplexing of optical signals
Very precise and flawless
Aim: raise the mirror to the desired angle

4. Click in window to start animation
Mirror Animation
Click in window to start animation

5. The Problem
Vertical lift cannot be obtained through horizontal movement
Fabrication process leads the mirror to sag down
Fixed Hinge
Mirror
Lever
Applied Force
Wafer

6. The Solution Provide initial lift to the mirror Fixed Hinge Mirror
Lever
Applied Force
Wafer

7. Thermal Actuators
Make use of differing arm thickness to provide movement
Problem: using the principles described, it is difficult to obtain vertical movement

8. Vertical Thermal Actuators
Design 1: Built to provide a downward motion but is overdriven; when current is removed the actuator snaps up
20 2
Poly 0
Poly 2
Poly 1

9. More Vertical Thermal Actuators
Design 2: Provides upward motion through the use of thin flexible connectors
20 2
Poly 0
Poly 2
Poly 1
- Thin bar on bottom -

10. Even More Vertical Thermal Actuators
Design 3: U-shaped designed to prevent thicker arm from conforming 2
20
Poly 0
Poly 2
Poly 1

11. Thermal Actuator Animation
Click in window to start animation

12. Levers
Design 4: Downward Vertical Thermal Actuator is used to create lift by pressing down on one end of a lever
Mirror Hinge
Thermal Actuator
Lever
Poly0
Poly 0
Poly 2
Poly 1

13. More Levers
Design 5: Flexible connector used to transfer downward force of Vertical Thermal Actuator to a lever
Mirror Hinge
Thermal Actuator
Lever
Poly0
Poly 0
Poly 2
Poly 1

14. Click in window to start animation
Lever Animation
Click in window to start animation

15. Linear Stepper Motor
Makes use of 2 banks of horizontal thermal actuators to provide a drive mechanism
- talk about the design that we used and the changes that we had to make (teeth configuration and having two steppers to provide movement in both directions)

16. Staple Hinge
Rotating Bar
Staple
Staple Hinge
Poly 0
Poly 2
Poly 1

17. Staple Hinge Issues Rotating bar Poly 0 Poly 2 Poly 1 Rotating bar
Applied Force

18. Torsion Hinge Thin flexible rods attached to mirror on either side
Rotating Bar
Applied Force
Poly 0
Poly 2
Poly 1
Mirror
Lever
Prevent Bar from Bowing Out

19. Final Picture

20. Possible Issues Torsion hinge might break or not be flexible enough
Actuating arms might bend
Vertical thermal actuators might not give enough deflection
- tortion hinge: not flexible enough, might break
- arm might flow, bend, or break if we remove the staples
- the actuators just might not work (they can go down and not come up)

21. Conclusion Testing has yet to be done
“We are confident of positive results…” Terrence

22. Thanks To
Dr. Ash Parameswaran
Rob Johnstone
Shivalik Bakshi
Coffee

23. ?