1. Scanning electron microscopy Katedra experimentálnej fyziky FMFI UK B r a t i s l a v a

2. History 1897 - Discovery of the electron ( J. J. Thompson) 1924 - Particle and wave theory (L. deBroglie) 1926 - Electromagnetic lens (H. Busch) 1927 - Demonstration of electron diffraction (C. J. Davisson and L. H. Germer) 1929 - Theoretical description of SEM (H. Stintzing) 1932 - Construction of first electron microscope (transmission) (M. Knoll and E. Ruska) 1935 - Demonstration of scanning electron microscope theory (M. Knoll) 1938 - First SEM constructed (M. von Ardenne) 1939 - First commercial transmission electron microscope (B. von Borries and E. Ruska)

3. History 1942 - Production of electrostatic lens SEM (V. K. Zworykin, J. Hillier and R. L. Synder) 1956 - Production of electromagnetic lens SEM (K. C. A. Smith) 1956 - X-ray microanalyzer with a scanning probe (V. E. Cosslett and P. Duncomb) 1960 - Improved secondary electron detector (T. E. Everhart and R. F. M. Thornley) 1960's - First commercial SEM (Cambridge Instrument Co., Ltd.) 1971 - Construction of a STEM with a field emission source (A. V. Crewe and J. Wall)

4. Physics Electron interaction with sample Electron energy spectrum Electron – core electron interaction

5. Electron interaction with sample

6. Electron energy spectrum

7. Electron – core electron interaction

8. Technics Vacuum chamber Electron optics Image formation Electronics

9. Tubus VEGA

10. Electron gun

11. Cathode

12. Electromagnetic lens

13. Detectors

14. Image formation

15. Image modes

18. SEM – VEGA TS5136MM

19. Image Gallery Poppy seed

20. Image Gallery Leaf of nettle with beetle

21. Image Gallery Fly head

22. Image Gallery Ant head

23. Image Gallery Ant feeler