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Published byCarmella Terry Modified over 9 years ago
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SEM microscope By: Doug, Holly & Oleg
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Scanning Electron Microscope vs. Optical Microscope Advantages Continuously variable magnification High resolution Depth of focus Elemental analysis attachments DisadvantagesCost More knobs Vacuum Sample limitations
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Scanning Electron Microscope (simplified drawing) sample tungsten filament (electron source) electrostatic lens (F = qE) accelerating voltage anode electromagnetic lenses (F = q v x B) (condenser lenses) electromagnetic lens (objective lens) & deflector coils (raster scan) e-e- detector (scintillator & PMT) SE
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Signal Generation In (Probe) Focused mono-energetic electron beam Out (Signal) Imaging Backscattered electrons Backscattered electrons Secondary electrons Secondary electrons Analysis X-rays X-rays Characteristic x-rays Bremsstrahlung x-rays (background “noise”) Auger electrons Auger electrons
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Topographic contrast surface same penetration depth shorter exit distance, higher signal longer exit distance, lower signal
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SEM general info
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SEM General info Mount the sample on the holder “Paint” the conductive path
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SEM General info Load the sample into the SEM
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SEM general info Vacuum pump 4 minutes Turn on filament current & accelerating voltage Fiddle with the knobs
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Sample Prep Quenched from 1700 degF Anneal to 900 degF Furnace cooled from 1700 degF Low C steel High C steel Unknown C steel
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High C (optical 600x) High C (SEM 400x) High C (SEM 3000x)
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Low C (600x optical) Low C (SEM 400x) Low C (SEM 3000x)
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Unknown C (SEM 400x) Unknown (optical 600x) Unknown (SEM 3000x)
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Low C vs High C (SEM 200x) Low Carbon Plastic High Carbon
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Low C (3000x vs 10000x)
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