1. Semiconductor Manufacturing Processes Micro Electronics Fabrication

2. Index Overview Relevance, compare with traditional ChemE process Opportunities Course Overview Goal, what is expected of you Quiz, assignment etc Scope Outline of the course, what is covered, what is not References Introduction

3. Overview Relevance: Used everywhere Fairly expensive (computers) to very cheap (watch) How is it similar to / different from ‘traditional ChemE’ process? Basic Principles are same Level of control needed is very high Individual features are small, but volume is high Need to be aware of electrical properties/behavior Developing field (processes not always ‘mature’) Short cycle time Not prevalent in India ==> lower exposure

4. Overview Job opportunities: Semiconductor Complex Limited (SCL) in Chandigarh DRDO/ISRO, BEL Research Abroad: Very Active research, funded by industry and government Job opportunities, among the best for Chemical Engineers

5. Course Overview Goal: Familiarize with key processes in the chip manufacturing 10000 ft view Focus on the processes Learn / Revise EE, optics, Material Science Touch of economics Few analytical techniques routinely used in semiconductor industry Chip Manufacturing Physics Electronics ChemE Material Science Economics

6. Course Overview Quiz: 2*15 = 30 End Sem: 40 Project: 30 PROJECT WILL BE EVALUATED ONCE IN THE MIDDLE OF THE PROJECT. AND THEN AT THE END. Need: Memorize (substitute for experience gained by operating the tools yourself) Follow in journals and internet, to keep up to date (Information is new and the text books are not ‘up to date’ in many aspects).

7. Index Overview Relevance, compare with traditional ChemE process Opportunities Course Overview Goal, what is expected of you Quiz, assignment etc Scope Outline of the course, what is covered, what is not References Introduction

8. Chip manufacturing: Snap shot Electrical Chip Design RC Physical “Layout” Design Blue Print- Photo “negative” Creating the chip “Print” Testing Quality Control

9. Scope Types of chips Focus: CMOS (Complementary Metal Oxide Semiconductor) processes eg chips in computer processors, cell phone etc. Most of the chips manufactured are CMOS chips Silicon Based GaAs and others BiPolar CMOS

10. What will / will not be covered (and to what extent) Electrical Design - None Semiconductor Device Physics VLSI (IC Design) Device Modeling Physical Layout Design - Absolute Minimal Creating the chip - Main focus Creating the chip - Main focus Testing - Minimal Electrical & Layout Design, Testing: Typically covered in EE courses

11. What will / will not be covered (and to what extent) Economics: Yield Issues - Minimal Environmental Issues - Minimal Manufacturing of microelectronics related materials like Computer Hard Disk, CD’s etc will not be covered Processes not yet used ( Next generation processes like Atomic Layer Deposition or ALD ) - Minimal Supporting Techniques used in industry: - as necessary

12. References References: Class Notes Introduction to Micro Electronic Fabrication. Vol 5, Richard Jager, 2001 Micro electronic Fabrication: A practical guide to semiconductor processing, Peter Van Zant ULSI design by Chang & Sze Science and Engg of micro electronic fabrication by Stephan A Campbell INTERNET: www. semiconductor.net www. eedesign.com (mostly design related though) www.intel.com/research/silicon/....

13. Index Overview Relevance, compare with traditional ChemE process Opportunities Course Overview Goal, what is expected of you Quiz, assignment etc Scope Outline of the course, what is covered, what is not References Introduction

14. INTRODUCTION Chips are made on silicon wafers Wafers look similar to the CD. Currently 8” wafers are used and some manufacturers use 12” wafers CD is about 4”, for comparison IITM- EE dept has 4” wafer processing Larger wafers have to be thicker Less area is wasted in larger wafers Uniformity is more difficult to achieve in larger wafers 12 ” wafer ©Intel

15. INTRODUCTION Wafers are processed in a batch of 25 (called “LOT”) Single wafer, batch, continuous processes In one 8” silicon wafer, 500 chips may be made Rectangular chips 330 million transistors in a RAM chip ©Intel

16. Schematic Zoom (Exaggerated) Chip is formed only on the top layer of the wafer Mechanical strength Processes: Shape definition, Material Modification, Deposition, Removal

17. Process Classification Packaging Creating the devices (transistors, capacitors, resistors) Front End of the Line FEOL Connecting the devices (wiring) Back End of the Line BEOL Device 1 Device 2 Device 3Device 4 Metal Based on process sequence

18. General Process Grouping Need to make many wires (or other structures) in many layers (view in 3D) with different materials (conductor, insulator, semiconductor) of small sizes ( 90 nm is the state of the art production) Silicon di Oxide Cu

19. Silicon di Oxide General Processes Grouping Strategy For each layer, create a carefully made ‘photo negative’ Remove material 1 (oxide) Define shape Add material 2 (copper) Remove excess of 2 (copper) Shape Definition, Deposition, Removal In some cases, instead of deposition, Oxidation of silicon

20. Process Classification Unit Operations Called “Modules” in Semiconductor Industry eg. Distillation, adsorption... are unit operations Chemical Vapor Deposition (CVD), Etch.... are the typical unit operations (Modules) in the chip industry Based on process type Relevant Modules Photo Lithography, CVD, PVD, Etch, CMP, Oxidation... FEOL: Ion Implantation, Diffusion BEOL: Electrochemical Dep

21. Course Outline May change... About 3 weeks for BEOL, 3 weeks for FEOL Quiz 1 Quiz 2

22. General Information Complete chip production (IDM) Electrical Design - Some companies in India (Fabless) Physical Layout - Need interaction with “Fab” Chip production - Not much in India (Fab/Foundry) Testing - either at the customer site or at the production site Chip production Needs huge investment & state of the art tools Work force Discipline, for mass production (1 lot == 1 Million USD == 80 kg gold)

23. General Information Chip production in India Semiconductor Complex Limited (SCL), Chandigarh DRDO,ISRO may have their own facilities BEL??? SCL Smaller node earlier means more advanced technology 0.8 , Aluminum, 2 metal layers

24. General Information Processor Chips Process variations Chip Speed variations Same design, production line, wafer --> Different chips Memory chips Repetitive design Easier production --> lower cost

25. Processes Visualize the Final Product Focus on The ‘parts’ that need to be made The processes (for each of the part) Finally,Focus on integrating the processes

26. Chip Xsection- Simplified Schematic Device 2 Device 3Device 4 ? ? Insulator Wiring Metal connectors Device 1

27. Chip - Simplified Schematic Device 1 Device 2 Device 3Device 4 What if you want to connect Device 3 to another device 5 just at the back of Device 3?

28. Chip - Simplified Schematic Device 1 Level 1 Level 2 Device 2 Device 3Device 4 Many layers of metal are necessary for current Chips (typically 4 to 5) eg Next generation intel chips (90nm) are expected to have 7 or 8 metal layers

29. Intel 7 metal SEM (90 nm node) © Intel CDO - carbon doped oxide M1 - Metal level 1, M2 - metal level 2, etc

30. IBM, multi level copper wiring © IBM Notice: The oxide has been removed by etching (perhaps with HF or KOH) and copper is not Also notice that the real “wiring” is much more complicated than what we saw in the simple schematics before

31. FEOL Processes Shape Definition Photo Lithography Modification Ion Implantation Diffusion Rapid Thermal Anneal (RTA) Oxidation Deposition Chemical Vapor Deposition (CVD) Physical Vapor Deposition (PVD) Removal Chemical Mechanical Polishing (CMP) Etching

32. BEOL Processes Shape Definition Photo Lithography Modification Anneal Deposition Chemical Vapor Deposition (CVD) Physical Vapor Deposition (PVD) Electrochemical Deposition Removal Chemical Mechanical Polishing (CMP) Etching

33. Appendix

34. Acronyms CMP - Chemical Mechanical Polishing CVD - Chemical Vapor Deposition PVD - Physical Vapor Deposition SEM - Secondary Electron Microscopy EDX - Energy Dispersion X-Ray Analysis TEM - Transmission Electron Microscopy

35. Acronyms IC - Integrated Circuits ASIC - application specific integrated circuit GaAs - Gallium Arsenide device FEOL - Front End of the line (processes up to making the device) BEOL - Back end of the line (processes involved in creating the wiring connections between the devices)

36. Acronyms CMOS Complementary metal oxide semiconductors VLSI -Very large scale integration (creating one chip with many millions of devices) ULSI - Ultra large scale integration ( billion devices) ALD - Atomic Layer Deposition (Depositing one layer of atoms in a controlled manner) MBE - Molecular Beam Epitaxy (Targetted layer by layer growth of material)