1. © 2000 Swagelok Company DP Series Springless Diaphragm Valves

2. © 2000 Swagelok Company Why develop a new valve? Semiconductor industry driving for lower costs Availability of new technology Swagelok’s drive to help customers win

3. © 2000 Swagelok Company DP Series Objectives Provide a 1/4 inch UHP valve for low and high-pressure applications Provide a high-performance seat Improve flow capabilities Provide integral locking handle Drop in replacement Provide a competitively priced valve

4. © 2000 Swagelok Company Topics to be Discussed Technology 3Design tools 3Seat performance Valve overview 3DP specifications 3DP components Valve highlights

5. © 2000 Swagelok Company DP Series Computer Modeling Technology

6. © 2000 Swagelok Company Valve inlet Valve outlet Diaphragms CFD Analysis Fully Swept Flow Path

7. © 2000 Swagelok Company Featured area Finite Element Analysis

8. © 2000 Swagelok Company FEA Analysis Repeatable Shutoff Performance

9. © 2000 Swagelok Company Featured area Finite Element Analysis

10. © 2000 Swagelok Company FEA Analysis Actuator button Bonnet nut Diaphragms Diaphragm Cycle Life

11. © 2000 Swagelok Company DP Series Valve Seat Technology

12. © 2000 Swagelok Company Time in seconds *15*Minimum required by SEMI F1-96 1x10 -10 _ 1x10 -9 _ 1x10 -8 _ 1x10 -7 _ (std cm 3 /s) Inboard helium leak testing of the seat with 145 psig inlet pressure Helium Leak Test Performance

13. © 2000 Swagelok Company ¼ in. DP Series Technical Issues Pressure Rating: 3145 psi / 10 bar: Low Pressure 33045 psi / 210 bar: High Pressure Cv: 30.27: Low Pressure 30.20: High Pressure Dimensions: Same O.A.L. 3 Same O.A.L. HLT: 31 x 10-9 std cm3/s Surface Finish: 35  in Ra

14. © 2000 Swagelok Company Low Pressure Internal Components

15. © 2000 Swagelok Company Common body, diaphragms and seat Low-pressure air actuator Low- and high- pressure “T” handle Low- and high- pressure locking handle High-pressure air actuator Actuator Options

16. © 2000 Swagelok Company Locking Handle

17. © 2000 Swagelok Company DP Series Valve Highlights Both high- and low-pressure options Improved seat performance Improved flow capabilities Standard locking handle option for safety Drop in replacement Competitively priced

18. © 2000 Swagelok Company DP Series Springless Diaphragm Valves