1. Triggers Targets Experimental realisation Metrological application of basic science & technology Enabling science & technology 2005 2010 2015 2020 Dimensional metrology as enabling technology for long-term fundamental research Research into fundamental constants, basic physics and future space science missions are critically dependent on dimensional metrology at levels of accuracy far exceeding those available Precision dilatometry & stability measurements @ <10 -9 level Enabling new determination of k B @ 10 -6 Ultra stable materials and position metrology in cryogenic environments Higher power, reduced waveband fs comb technology Nano radian angle metrology Enabling new definition of kg @ 2*10 -8 level based on fundamental constants Enabling progress of research into further fundamental constants and basic physics e.g.: G, h/m, (ST)EP… Enabling space metrology and positioning capabilities @ 10 -15 Existing procedures, instruments and light sources for precision interferometry & long-range metrology. Micro/Nano thruster positioning capability New ultra stable materialsImproved temperature metrology Prismatic ultra-stable reference artefacts Extended range (> 100 mm) high accuracy µCMM 3D metrology on artefacts: - pressure piston/cylinder area: u r < 10 nm - sphere resonator < 1 ppm - diaphragm area U < 10 -5 Specimen adapted interferometer Precision velocity interferometer Surface layer characterization X-ray & opt. interferometry @ 3*10 -9 High speed simultaneous fringe fractioning & counting on multi- kg @ 1*10 -8 k B @ 10 -7 Improved instrumentation for dimensional measurements kg @ 1*10 -9 Dilatometry & stability @ <10 -10 level length interferometry at the pm level Surface effects Ultra stable structures for nano processing

2. Triggers Targets Experimental realisation Metrological application of basic science & technology Enabling science & technology 2005 2010 2015 2020 Dimensional metrology for advanced manufacturing technologies Cost effective sustainable manufacturing of innovative products with structures down to 10 µm and up to 10 m, facing requirements of increased complexity, normative requirements, higher measuring speed and reduced tolerances Short range dimensional metrology 0.01 mm < L< 10 mm U < 0.05 µm Probe-surface interaction including soft surfaces Automatic uncertainty evaluation (virtual instruments) 3D-Segmentation and evaluation of large data files Numerical artefacts – software datasets Influences of environment (refractive index, temperature, vibrations, dust,…) Existing procedures, sensor principles,... Dimensional metrology < 10 m in measuring room (U < 10 -7 ) in production environment (U < 10 -6 ) Measuring instruments for short range under industrial conditions Advanced traceability methods for in- process metrology Measuring instruments in labs for complex and freeform geometries Next generation of sensors and measuring instrumentation (Computer Tomography, indoor-GPS, Laser tracker, Laser interferometer, incremental scales, rangefinders/ADMS) Multi-parametric results from high resolution point clouds Measuring instruments for 10 m- range under industrial conditions Artefacts for small objects or those with non-cooperative surfaces U < 0.01 µm U < 0.005 µm Fast and precise positioning (mechatronics, PZT motors, stick slip, DC, advanced servo controls New materials, advanced computers and IT,... Research facilities for metrology in non- laboratory environment

3. Triggers Targets Experimental realisation Metrological application of basic science & technology Enabling science & technology 2005 2010 2015 2020 Long range dimensional metrology Research into large scale production, global monitoring and waste management depend critically on dimensional parameters being measured or controlled to levels of accuracy that are currently unachievable over longer ranges (L > 10 m up to several km) Existing metrology for long range 1D/2D: Laser trackers, ADM, total stations, µGPS,.. Precision total stations with up to 1 km range Metrological class precision laser trackers Long range calibrated terrestrial baselines Long range free air refractometer Large scale coordinate metrology test & comparison facility 10 -7 1D accuracy over long range in air Traceable verification of global mapping systems at 10 -6 New light sources, e.g.: Higher power, reduced waveband fs comb technology 10 -8 1D accuracy over long range in air 10 -6 3D accuracy in large scale production 10 -7 3D accuracy in large scale production Precision 3D measuring instruments and sensors up to 100 m range Advanced 3D measuring instruments up to 100 m Multi-wavelength interferometry Refractive index metrology over extended ranges Advanced refractometer Multi-wavelength ADM/ refractometry High speed simultaneous fringe fractioning and counting on multi wavelengths

4. Triggers Targets Experimental realisation Metrological application of basic science & technology Enabling science & technology 2005 2010 2015 2020 2025 Dimensional metrology for micro-nano technology European micro- and nano-technology is reaching increasing levels of miniaturisation and encountering new issues of health, production feasibility, quality and efficiency; for control and manuf. on µm/nm-scale metrology is needed! Traceable 2D(3D) metrology at sub-nm accuracy over sub-mm range Traceable 2D(3D) metrology at (sub)-nm acc. over several 100 mm range Nanoparticles: traceable counting, size, shape and distribution on 1 nm accuracy level Multi probe 2D(3D) instrumentation over longer range Improved Nano fabrication (top down & bottom up) New sensors/probes Traceable instrumentation for micro&nano-particles Single probe 2D(3D) instrumentation with mm range Nano force metrology Instrumentation for multi- parametrical characterization of new functional nano-materials Modelling of functional properties dependent on material and dimension Existing high resolution microscopy, position measurement, probes, data evaluation and micro/nano- fabrication methods (top-down) Correlation of local and global particle metrology methods Improved & new high resolution microscopy methods Cross calibration of sensors Nanostructured standards over several 100 mm range 2D(3D) positioning capabilities; self calibration Stable materials/structures & design principles, vacuum bearing technology, vacuum thermal metrology X-ray/optical interferometry, linear encoders Nanoparticle standards Probe surface interaction modelling Nanostandards over sub-mm range New technologies and materials (short wavelength lasers, nanotubes, …)