1. 1 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 CMOS Monolithic Active Pixel Sensors for the Linear Collider. A Flexible Approach. P. Allport 4, R. Bates 2, G. Casse 4, C. Castelli 1, A. Evans 4,5, C. Eyles 1, M. French 5, A. Holland 3, H. Mapson 1, Q. Morrissey 5, V. O’Shea 2, M. Prydderch 5, R. Turchetta 5, M. Tyndel 5, J. Velthuis 4, G. Villani 5, N. Waltham 5 1 University of Birmingham, 2 University of Glasgow, 3 University of Leicester, 4 University of Liverpool, 5 Rutherford Appleton Laboratory

2. 2 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Outline  Introduction Science-grade CMOS sensors Technology choice  Current status Concept How it works Design of a ladder for the Vertex detector  Future developments

3. 3 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 CMOS sensors design in RAL Goal: to design science-grade sensors. for Particle Physics, Space Science, … This requires: full-custom designed tailored to specific applications  new designs Good imaging performances  CMOS sensor technologies Many foundries propose three flavour of a given technology: digital, analogue and image sensors At present we are using a CMOS Image Sensors (CIS) 0.25  m process low leakage current, low number of defects, good sensitivity to the whole spectrum of light (absorption length for red  a few  m)  thick epitaxial layer (8  m) integration of colour filters, microlenses Up to 5 metal layers for complex routing Metal-to-metal capacitors for precise analogue design Dual power supply: 2.5/3.3 V. Good for low power consumption and good analogue performances Multiple choice of transistors Vt gives more flexibility to the designer

4. 4 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 RAL CMOS camera-on-chip 512 by 512 array of 25  m pixels Camera-on-a-chip 10-bit ADC integrated (1 per column) with all the control logic Simple, only digital PC-based DAQ Designed in standard CMOS 0.5  m Example of snapshot

5. 5 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Science-grade sensors in 0.25  m CIS Design in 0.25  m CMOS 200 mm diameter wafers. 4Kx3K = 12M pixels 5  m pitch 4MOS pixel with CDS EUV Solar Orbiter 4K linear device 3  m pitch 1m-resolution Earth Observation 256x384 test structure Flexible APS:  this talk 12 wafers manufactured. Image Sensor 0.25  m and 8” (200 mm) wafers

6. 6 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Flexible APS (FAPS) for Linear Collider Reset 1 Select Out Reset Memory # 1 A Memory # 2 Memory # n 1 Select Out Standard New  FAPS The in-pixel amplifier accesses the ‘Out’ line, which is connected to all the pixels in a column  relatively large capacitive load (>~ pF)  relatively slow (1-10 Kfps) The in-pixel amplifier accesses only local storage capacitors  small capacitive load (<<pF) Write and read phase separate  fast (>1 Mfps) Test structures with different designs and 5 FAPS arrays of 40*40*10 (time slices) pixels

7. 7 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Flexible Active Pixel Sensor (FAPS). The storage is user controlled and any time sequence can be programmed Simple snapshot (rolling shutter also possible) Time slices can have any time separation, from fraction of  sec upwards The readout can be done in much the same way as a standard APS One sample can be used to store the reset value  in- pixel CDS possible

8. 8 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 FAPS pixel layout Present design (proof-of-principle) 5 arrays with slightly different designs. Each array: 40*40 pixel Each pixel: 20  m pitch and 10 storage cells Present number of memory cell is not a limit  more memory cells possible Designed with 3 metal layers.

9. 9 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Timing Amplifier active only during writing in the capacitance  reduced power consumption Readout done as in a conventional APS

10. 10 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 FAPS simulation result Single event: sampling spaced by 100ns and then readout at 1 MHz. Charge injected every 200 ns Sampling control signals Linearity: good linearity up to 30,000 electrons. It can accommodate for leakage current increases and/or large signals Analogue output Current status. Test in preparation. Generic DAQ module designed. PC-based setup.

11. 11 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Large-area sensor Option 1: clever dicing (some dead space). See picture on the right. Cost-effective solution for prototyping. Option 2: stitching (seamless) Plan: use the 4Kx3K sensor to gain experience on issues such as yield, uniformity, specific design issues. Clever dicing  build a 6Kx12K, i.e.72 M pixel sensor Work, in collaboration with the CMOS foundries, for a stitched device 200 mm wafer in a 0.25  m CMOS technology 12Mpixels 36Mpixels 72Mpixels

12. 12 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 CMOS sensors for the linear collider 50 mm Readout direction Red line: control electronics (sampling and readout). Minimal space. Red rectangle: readout electronics (column amplifiers + ADC + sparsifying circuit)  CCD talk Either on same substrate or bump-bonded to sensor substrate Ladder with 1 sensor Sensor size: 100 mm *13 mm, read out at both sides Number of pixels per sensor: 2500 x 650 In each pixel: 20 samples For Tesla: sample at 50  s during beam-on periods and store 20 samples in the pixel Column parallel readout between trains: 2500*20=5*10 4 samples at 5 MHz  10 ms For NLC/JLC: number of samples depending on readout speed. It would give reduced pixel occupancy. E.g.: readout at 5 MHz during 8 ms  16 samples: 2500*16=4*10 4 samples at 5 MHz  8 ms 50 mm 13 mm Minimize budget material in the central area Keep power dissipation evenly spread and low Keep sensor architecture simple and adaptable to machine choice Simplify system design Guidelines

13. 13 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Conclusion / Summary UK collaboration to develop CMOS sensors for particle physics and space science RAL has proved capability in complex design of camera-on-a-chip sensors and is developing science-grade CMOS sensors for a broad range of applications. Flexible APS architecture suitable for Linear Collider Large area sensor 4k*3k  12 M pixels  *6  72 M pixels sensor

14. 14 Instrumentation DepartmentMicroelectronics Design GroupR. Turchetta 3 April 2003 International ECFA/DESY Workshop Amsterdam, 1-4 April 2003 Layer 2/3/4/5 sensor Ladder with 2 sensors Sensor size: 125 mm * 22 mm, read out on one side Number of pixels per sensor: 6250 x 1100 For Tesla: sample at 250  s during beam-on periods and store 4 samples in the pixel Column parallel readout between trains: 6250*4=2.5*10 4 samples at 5 MHz  5 ms. More samples possible For NLC/JLC: number of samples depending on readout speed if higher time segmentation is required. E.g.: readout at 5 MHz during 8 ms  16 samples: 6250*6=3.75*10 4 samples at 5 MHz  7.5 ms 125 mm 22 mm Readout direction