1. Operation of the S4700 FESEM
Quality SEM analysis is a matter of three factors
60% Sample- Preparation or type of sample
30% Knowledge of the operator
10% Type of instrument

2. Hitachi S4700 Instrument was installed in August of 1999
Has EDS, Backscatter, EBSD capabilities
High resolution imaging, up to 500,000X
Low voltage imaging, down to 0.5kV

3. Basic Operation of the S4700
Each time you use the scope you need to fill the LN2 trap to the side of the scope.

4. Degas not Degauss
If you are the first to use the scope then you must “Degas” the lower aperture
This is to clean the lower aperture.
Flip the switch located in the left of the instrument panel on the column down from “Heating” to “DEGAS”

5. Software
Software
You will be given a user account and you will set up a password that will be changed each time you use the scope.
The initial logo should appear once you log in
If it does not then open the SEM software from the FE-SEM icon on the desktop

6. This is the operating window of the 4700 software.
All operation can be done with the mouse or with the help of the small control panel.

7. Log Book
The microscope operating conditions will be written in a log book. These include the readings of the ion pumps, Ip1, Ip2, Ip3, the Vext, Ie, Vacc, date, user name, advisor and flash information if applicable

8. Set the HV using the HV control window and the drop down Vacc menu
Set the HV using the HV control window and the drop down Vacc menu. HV’s between kV are available

9. kV selection for a sample should be based on the type of analysis
Samples that are non-conductors such as ceramics, glass, some oxides should be run at lower kV due to charging effects, which can cause problems with imaging.
Samples that are conductors such as metals can be run at higher kVs but might not be necessary.
Check the sample to see if the desired results are there at lower kVs. There is no need to blast the sample if the desired results can be obtained at a lower voltage.
Remember the 2X rule for doing EDS on samples.

10. Insert Sample into Sample Exchange chamber
Once the sample has been correctly prepped, it should be screwed to the end of the insertion rod.
DO NOT BEND THE INSERTION ROD WHEN MOVING THE SAMPLE!

11. Chamber Scope On switch
The S4700 is fitted with in infrared camera. This allows the user to see inside the sample chamber and avoid bumping into detectors when inserting samples and moving the stage
Chamber scope is turned on prior to inserting the sample into the sample chamber
On switch

12. Sample Chamber
When the S.E.C. light on the front panel turns green open MV1 on the sample exchange door and allow the sample to be pulled into the sample chamber by the vacuum, watch on the chamber scope.

13. Column Setup
As the sample chamber pumps down, use the Column Setup for the type of SEM examination
The S4700 has 6 operation modes for the column
Ultra High Resolution
Analysis
Normal
Long WD
Magnetic
UHRA

14. Working distance – True working distance and can be set.
Condenser lens 1 - Default is 5, smaller numbers are bigger spot size, range is 1-16.
DeGauss- To degauss the column
Select Detector – Mixed for analysis and imaging
Upper for high resolution
Lower for analysis and samples that have slight charging

15. HV On
Turn on HV in the HV window when the sample chamber is at L X 10-3
Check Ip3, if it is 1 X 10-5 then DO NOT OPERATE
Note the Vacc, Ie and Vext and put in Log book

16. Imaging Beam alignment Select scan speed Locate area of interest
Go to High Mag mode
Aperture alignment
Stigmate
Final Focus
Brightness and contrast
Capture image

17. Beam alignment Focus the image
Click on “Beam alignment” in the “Alignment” window
Use the left knobs on control panel to adjust the beam in the middle of the target.
Will have to been done multiple times throughout operation.

18. Alignment window
Beam align button
Beam
Move the beam to the center of the target
Can be done in the grid window using the mouse

19. Select scan speed 6 scan speeds
Fast 1 and 2 – Frame averaging Can be set in the “Signal Processing Window”
Slow 1-4 – are raster scan in seconds and are preset
5 is a reduced area scan used to aid in focusing in a smaller area

20. Signal Processing window
Scan Speed buttons
Signal Processing window

21. Locate area of interest
Orient the sample using 5 axis stage
X, Y, Z, Tilt, and rotation
Move the sample to locate an area of interest, with trackball, click and drag, stage arrows, change x, y, z, tilt, and rotate
Trackball
Mouse

22. Stage Control Change x and y positions Rotate Z position Tilt
Click and drag either the stage or the beam.
This button for the beam. Blue hand cursor
Stage arrows
This button for the stage. Yellow hand cursor
Stage Control
Change x and y positions
Rotate
Z position
Tilt

23. Go to High Mag mode Use the Low Mag mode to locate an area of interest
Low Mag mode is 30-10,000x and can not be used for EDS
Use High Mag mode for EDS and imaging
High Mag mode is 250x to 500,000x
Not all samples can be imaged at 500,000x
Typical magnification is 25,000x to 250,000x

24. Aperture alignment Check the beam alignment
Increase the mag, best done at the highest resolution
Click on the “Aperture Align” in the “Alignment” window
Use X and Y alignment knobs on control panel
Good alignment has little or no X or Y movement. Image should pulse or rotate

25. Low Mag/High Mag mode
Aperture Alignment

26. Stigmate Refocus the image after Aperture alignment
If the image skews out of focus it is out of sigmation.
Use knobs on the left of the control panel
Y Stigmate first, X Stigmate, fine focus then check Y and X stigmation again
Gross movement of the image indicates the sigmators need alignment
Use the Alignment window and proceed with sigmation alignment in the same manner as aperture alignment.

27. Stigmation alignment

28. Final Focus Select a slow scan speed to increase resolution
Refocus image

29. Brightness and contrast
After focus do an “Auto Brightness and Contrast”
Brightness and Contrast can also be adjusted manually with the “Brightness and Contrast” monitor button

30. Auto Brightness and Contrast Button
Brightness and Contrast Monitor Button

31. Capture Image
Select image capture options in the “Capture Image Window”
Capture an image with the “M” button on the main window.
Image will be temporarily saved to a “Capture Image Window”
“Capture Image Window” will appear, use the “Disk Icon” to save the image.
All Images are to be saved on the D drive
At completion images should be moved to the internet or recorded on a CD.

32. Capture Resolution-Change the size of the captured image
Capture speed of the image- Frame averaging or slow scanning speed

33. Capture Image Window Red “Saved”, image has been saved
Red number in upper left corner is the active image
Yellow number in the upper left corner is the next window to be occupied
Disk Icon for saving the image

34. Use the SEM Data Manager to view your images

35. Blurred Images Beam Alignement Aperture Alignement Stigmantion
Coarse Focus
Fine Focus
Building Vibrations
Stray Electric Fields
Tip Noise

36. Hints on Stigmation Check Stigmation Alignment
Focus best possible image with fine focus with no “Skewing”
Y stigmate
X stigmate
Fine Focus

37. Tip Noise Flash Tip Open the HV Window Select “Flash”
Click on Flash and watch the Ie number quickly appear in the window
Note this number in the Log Book
DO NOT operate if the Vext has changed 1.2 more than the most recent Flash Ie

38. Ie and Vext Ie changes rapidly after flashing
“SET” a new Vext as the Ie drops
Best working conditions are at an Ie of >9
If Ie goes up to 12 STOP operation and flash

39. Ie can be changed, most common is 10 micro Amps
The “On” button becomes a “SET” Button when HV is on
Flashing button
Ie can be changed, most common is 10 micro Amps