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Furnaces and wet benches Savitha P. TEOS installed – problems stabilizing temperature and pressure Solved with First Nano’s help – Under optimization.

Published byTodd Preston Modified over 9 years ago

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Presentation on theme: "Furnaces and wet benches Savitha P. TEOS installed – problems stabilizing temperature and pressure Solved with First Nano’s help – Under optimization."— Presentation transcript:

1 Furnaces and wet benches Savitha P

2

3 TEOS installed – problems stabilizing temperature and pressure Solved with First Nano’s help – Under optimization Status of new equipments – Idonus HF vapouriser: Open for user training – AS one 150 RTP: Under installation – Ultrascan wafer curvature measurement: tool arrived Tool distribution – First Nano furnaces (10 tubes) + Tempress (2 tubes) + RTP (2) + IV-CV + Four probe+ Dektak + maintenance : Raghu, Madhuri & Mirji – Wet benches (8) + HF vapouriser + Chemical storage: Deepa and Ujwala – CPD + Electroplating + ALD : Advaitha Furnaces & Wet benches - update

4 Thank you

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