1. MEMS for NEMS Solutions for the Fat Finger Problem Michael Kraft

2. The Fat Finger Problem Manipulating Atoms Manipulating Ions Manipulating Larger Objects Probing Material at the Nanoscale Conclusions

3. Macroscopic tools are often unsuitable for nanoscale manipulation MEMS can provide a suitable solution  There is only 1-2 orders of scale difference  Nanofabrication can be integrated with MEMS fabrication Richard E. Smalley, “Of chemistry, love, and nanobots,” Scientific American 285 (September 2001):76-77.

4. Integrated Micro-Chips for manipulation and trapping of atoms Quantum lab-on-a-chip Basic Research  Quantum-behaviour  Entanglement, coupling  Low dimensional physics New devices – precise sensors  Atom interferometer  Atomic clocks  Inertial sensors  Quantum information processing  Quantum computers

5. Current through gold wires sets up a magnetic confinement field as a track for ultra cold atoms or atom clouds Fabrication process: Au-electroplating or ion beam milling Enables atom interferometry on a chip

6. 23mm Extremely high sensitivity for EM-fields, gravity

7. KOH etched inverted pyramids surrounded by current Au-wires Cavities: inverted pyramids or semi-spherical  Magneto-optic cooling of atoms  Optical resonators with high finesse for single atom detection RMS Roughness [nm] 0 5 0 20 40 Etch duration [min] Very smooth cavities

8. XY-motion Alignment of the optical cavity with fibre Correction von bonding misalignment Z-motion Tunable optical cavity Distance [um] 0 2 4 0 50 100 Voltage [V]

9. Demonstrated 200nm alignment bonding at chip level (2cm x 2cm) Only 10% of wafer area required for self-engaging structures Wafer surface smooth enough for thermo-compression bonding self-engaging alignment concept using cantilevers SEM image of aligned and bonded chips Vernier structures to evaluate bonding alignment IR image of a bonded sample 2.3mm ‘LEGO on a chip’

10. Integrated chips for manipulation and trapping of ions or charged particles  RF Paul Trap Applications similar to Atom Chips (Semi-) Planar Paul Traps Compatible with microfabrication technology

11. Field simulation Y-Shaped Trap SEM Picture Wet etching 50/500nm Cr-AuDRIE 30um Si device layer Overcome the problem of exposed dielectrics impeding the stability of trap Retain the simplicity of fabrication

12. The trap is well suited for trapping large array of single ions and perform quantum simulations 2D ion trap arrays comprises of an RF metal above a grounded plane electrode

13. Micro-particle injection for Laser chambers→ secondary radiation for medical applications, material testing, etc Electrostatic MEMS „rail gun“ (linear electrostatic motor)

14. Electromagnetic Levitation System and Railgun

18. Arthroscopic AFM sensor probe technology Cartilage health monitoring and analysis Uses micro and nano-indentation approach to characterise tissue stiffness [Ref: Stolz, et al., Nature Nanotechnology, 2009] Ref: M. Stolz, J. Biophys., Vol 88, 2731-2740, 2010 Probes interaction with cartilage fibres using (A) micro-sphere probe tip and (B) nano sharp tip. M. Stolz, Biophysical J., 98, 2010.

19. 2 µm Sharp AFM cantilever tip to improve indentation resolution (Tip radius 20nm - 10nm) Multiple probes for large area sensing Robust design to withstand operation stress Integrated readout with capacitance or piezoresistance information Self actuation AFM probe sensor design based on capacitive/piezoresistive readout SEMs of AFM prototype device fabricated on SOI material Readout structures Cantilevers Probe tips Cantilever length 500µm, 80µm & 3µm thick. Freq. = 40 kHz & k = 5.5 N/m.

20. MEMS can provide a toolkit for nanoscale manipulation of nano-sized objects. These include trapping, detecting and shuffling of ions and atoms, moving around small objects contactless, and probing material, including biological tissue, at the nanoscale. There are many other examples.

21. Thank you!