1. Digital PECVD Machine Design and Construction Zlatan Ceric William Edwards Timothy Gurtler David Ogden Quan Tran Date:12/10/2010

2. Project Overview Contracted by Nanotechnology Research Center Converted existing RIE to PECVD machine Automation of process eliminates the need for constant human monitoring Cost of Hardware: $35,000 Built base model for NRC modification

3. Final Product

4. Design Objectives Continuously monitor chamber vacuum pressure, RF power, and gas flow rate Automated the polymer deposition process Allows for future process modification through HMI

5. RIE to PECVD Conversion Removed turbo pump Use one chamber pressure sensor instead of two Removed old chamber heater Remapped wires to integrate new design Edited PLC and HMI code to reflect all changes

6. System Hierarchy

7. Mechanical Pump

8. Mass Flow Controllers

9. RF Power System

10. Chassis Construction Gator Jaw is the material used to build the stand It is customizable and easily changed if needed Plates can be mounted to the frame to provided a surface for components to mount

11. Component Mounting Din rail provides a simple mounting solution Standard 35mm width used widely in industrial control systems PLC was designed to mount onto this type of rail Power supply and terminal blocks also mount to it

12. Centralized Signal Testing Over 70 signals are required for the PLC to manage Having terminal blocks gives a convenient location to test the signals Mounting them onto the din rail gives a clean look for the machine Future manipulations of the machine will also be more convenient

13. Testing the Machine Wire continuity was first check to ensure each component was properly connected Each Input into the PLC was forced on to ensure each component was working properly Feedback was compared between components and HMI Display

14. Set Point Feedback Pressure is required to stay within 10% Gas Flow Rate is required to stay within 1% RF Power is required to stay within 5%

15. PLC Operational Flow Chart

16. HMI Screen Capture

17. Recipe Input Capture

18. Power Input Capture

19. Coding Challenges Working with new programs and languages: – RSLogix5000 with Ladder Logic – FactoryTalk View Studio Interfacing with analog, digital, and serial connections Inability to test and debug software before machine was fully assembled Not able to implement “Trending” function due to time constraints

20. Subsystems Interaction Subsystems need a way to interact with each other and PLC Require customized cables

21. Problems with Pneumatics Problem: No Documentation Solution: Called Technical Support Problem: Solenoid was not working properly Solution: Craig Fox came out to help solve the problems

22. Problems with RF Power Problem: RF Power would not respond Solution: Called Tech Support to resolve problem Problem: High Power could not be achieved Solution: Replaced RF Power Supply

23. Budget and Cost Project is exclusively design for Ga Tech NRC and cannot be used for mass production Parts were donated, salvaged, and funded by: – Ga Tech NRC – Rockwell Automation A conservative estimate cost of $135,000 including hardware and labor/testing for completed project

24. Cost Breakdown Labor & Testing Assume average GT ECE graduate earns $65K annually Project includes 5 design and implementation members Estimated labor and testing of $100K Hardware Plasma Chamber$2,500 RF Power Supply$6,500 Frame$2,000 MFC x4$8,000 Throttle Valve$5,000 Major components

25. Future Work: Intended Machine Use M. Bakir 2008 Options: Deep UV lithography Electron Beam Lithography FEL/ARLP X-Ray Lithography Nano Imprint Lithography

26. Topographic negative of structure will will be constructed with electron beam lithography Organic Gas will deposit non stick polymer on mold Mold will be used as press to relief desired structure Antistick coating will have to be reapplied after several uses (~3) Future Work: Additional Machine Use

27. Future Work: Diagnostic and Expansion Plasma Density Test Additional internal real estate available: MFCs Turbo Heating System Magnetic field module

28. Video Demonstration

29. Questions or Comments?