1. Radio-Frequency Effects in Integrated Circuits
Yun Bai
Directed by Professor Neil Goldsman

2. Abstract
Tendency of IC evolvement: faster speed and higher chip density.
Inductance of on-chip interconnects draws more attention in terms of signal transmission and circuit design.
Skin effects and semiconductor substrate losses are considered.
Electromagnetic coupling happens between on-chip components and affects circuit performance.

3. Thesis Outline Introduction to Inductance
Characterization of On-Chip Interconnects
Characterization of On-Chip Inductors
High-Speed On-Chip Digital Signal Transmission
Electromagnetic Coupling Effects

4. Transmission Line Theory
freq > 1GHz
Chip density > tens of millions of transistors
RLC delay due to interconnects become significant
Metal – SiO2 – Si – Ground Plane
Distributed Circuit Model

5. On-Chip Inductors Analog RF Circuits: Low Noise Amplifiers Mixers
Voltage-Controlled Oscillators
Experimental
EM Simulator
Numerical Modeling
Empirical Equations

6. Electromagnetic Coupling
Bus Lines
Interconnects
EM Simulator
Numerical Modeling
Empirical Equations

7. What is Inductance? Energy Definition: Magnetic Energy Storage
Flux Definition: Magnetic Flux Leakage
Circuit Definition: Induced Voltage by AC Current

8. Inductance Classification

9. Internal Self-Inductance
Internal Impedance:
Maxwell’s Equation:
Skin Effect:

10. External Self-Inductance
Average Flux:
Loop Inductance

11. Mutual Inductance
Magnetic Vector Potential:

12. What is L for an Interconnect
Internal + External

13. Interconnect Internal Impedance
Current Distribution:
1D approximation:

14. Complex Image Theory

15. Interconnect External Impedance
Quasi-TEM
Slow Mode

16. Coupled Interconnects

17. Mutual Impedance

18. On-Chip Inductors

19. Inductor Inductance N L S Na

20. Inductor Resistance N L S Na

21. Multi-Layer Spiral
Higher Inductance
Less Chip Area
Higher Q Factor

22. On-Chip Digital Transmission
rising/falling < 10 ps
Vs = 1.26 V
Each Box: 1 mm

23. Signal Attenuation, Delay, Dispersion
1 GHz : 220 ps
9 GHz : 150 ps
Critical Length: 8 mm

24. Electromagnetic Coupling

25. Scattering Parameters
S11: Insertion Loss at Port 1 when Port 2 is matched
S21: Forward Gain from Port 1 to Port 2 when Port 2 is matched

26. N-Wells

27. Transformer

28. Spiral and Transistor

29. Digital Switching Noise

30. Acknowledgement Professor Neil Goldsman
Our Group: Zeynep, Xi, Akin, Bo, …
Committee: Professor Peckerar and Orloff