1. Bulk Micromachining of Silicon for MEMS

2. Mechanical Material SILICON?
Stiff => Thinning is required for appreciable strain

3. Single Crystal Silicon for MEMS

4. Single Crystal Silicon for MEMS

5. Structure of Single Crystal Silicon

6. Miller Indices for Single Crystal Silicon

7. Miller Indices for Single Crystal Silicon
SCS has anisotropic properties:
Electrical, Thermal, Mechanical, Chemical

8. ETCHING for BULK MICROMACHINING (Isotropic/Anisotropic)

9. ETCHING for BULK MICROMACHINING (Isotropic/Anisotropic)

10. ETCHING for BULK MICROMACHINING (Cavity/Cantilever Anisotropic)

11. DRY (Plasma) ETCHING

12. Deep Reactive Ion Etch (DRIE)

13. Single Crystal Silicon for MEMS

14. Single Crystal Silicon for MEMS

15. Single Crystal Silicon for MEMS

16. What is MICRO-MACHINING?

17. What can Micromachined Parts/Systems do for us
What can Micromachined Parts/Systems do for us? Be a Conduit to Microscopic Domain: 1. Sensing (Information) 2. Information Processing 3. Communication 4. Manipulation (Actuation and Control)

18. Why / Why not SILICON?
Semiconductor: Active Devices + Sensors
(Photo-Magneto-Strain Sensing)
Insulator: SiO2 , Si3N4 , Glass
Thin Film Conductor: Aluminum, Gold, Silicides
PhotoLithography: Planar control (+ & -)

19. Mechanical Material SILICON?
Stiff => Thinning is required for appreciable strain

20. Micromachining of SILICON?
Additive Processes: Chemical and Physical Deposition
(Thin Layers only) (Single/Poly)
Removal Processes: Chemical and Physical Etching
(Wet/Dry/Plasma/Inert/Reactive)
(Bulk/Film) (Anisotropic/Isotropic)
MICROMACHINING of SILICON => (a) BULK (substrate)
(b) SURFACE (films)

21. BULK MICROMACHINING (Etchants: Isotropic/Anisotropic)

22. BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)

23. BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)

24. BULK MICROMACHINED (Silicon Capillary for Insulin Infuser)

25. BULK MICROMACHINED (Silicon Mask for Cylindrical Micromotion Sensor)

26. BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)

27. BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)

28. BULK MICROMACHINED (Series Connected Photovoltaic Converter Battery)

30. Micro Electro Mechanical Sytems

32. M (CMOS-IC Technology) + E (CMOS-IC Technology) + M (Silicon and Sacrificial Layers) + O (Aluminum) + S (IC Packaging Technology)

33. Three-Layer Poly-Silicon Surface Micromachining Process (to build Mechanical Parts on CMOS IC)
Final cross sectional view with 7 layers

34. Three-Layer Poly-Silicon Surface Micromachining Process

35. Surface Micromachined

36. Micromachining of Projection Camera

38. M.G.Guvench
M (CMOS-IC Technology) + E (CMOS-IC Technology) + M (Silicon and Sacrificial Layers) + O (Aluminum) + S (IC Packaging Technology)

39. Surface Micromachined Silicon Sensors
M.G.Guvench

40. Surface Micromachined Silicon Sensors
M.G.Guvench

41. Electrostatic Field Sensors
M.G.Guvench

42. Electrostatic Field Sensors
M.G.Guvench

43. Electrostatic Field Sensors
M.G.Guvench

44. Mass (Absorption/Deposition) Sensor
M.G.Guvench

45. Mass (Absorption/Deposition) Sensor
M.G.Guvench

46. Mass (Absorption/Deposition) Sensor
M.G.Guvench

47. Electrostatic Field Sensors
M.G.Guvench

48. Flow Skin Friction Sensors
M.G.Guvench

49. Flow Skin Friction Sensors
M.G.Guvench

50. CMOS Analog Chip Design (Operational Amplifier)
M.G.Guvench

51. Surface Micromachined Silicon Sensors
M.G.Guvench

53. MEMS Switch

54. MEMS Micromotor

55. A Mass (Absorption/Deposition) Sensor
M.G.Guvench