1. S Ahmad Central Electronics Engineering Research Institute, Pilani Workshop on Embedded System in Automobile Industry Indian Institute of Technology, Mumbai 1 st December, 2003

2. BARC Presentations24 April, 20032 Introduction Automotive Industry Quest Passenger Car - Performance Improvement, Reduced Cost, Enhanced Reliability Conventional Sensor - MEMS Replacement Newer Possible Applications Earliest Use - Manifold Absolute Pressure Sensor - MAP - 1979 Silicon Accelerometer - Airbag - 1990s Warranty Period - 10Years/ 150,000 Miles

3. BARC Presentations24 April, 20033 Introduction Improved Fuel Efficiency, Emission and Safety - Federal Standards Higher Expectations - Performance, Comfort Greater Availability - Micro-controller, Memory, Display and Enhanced Diagnostics Very Harsh Under the Hood Environment High Temperature, Shock, Vibration, Humidity, Corrosive Media, EMC and RFI Military Grade at Lowest Consumer Price

4. BARC Presentations24 April, 20034 Automotive Sensor Global Market Growth

5. BARC Presentations24 April, 20035 Automotive Sensor Usage Early Estimate - 1997

6. BARC Presentations24 April, 20036 Automotive Industry MEMS Sensors

7. BARC Presentations24 April, 20037 Product Evolution Time Schedule

8. BARC Presentations24 April, 20038 Top Ten MEMS Markets Micro-fluidic Biochip Glucose Monitoring MEMS Sensor Tire Pressure Sensors Hard Disc Drive Heads Inkjet Print Head Medical Condition Detection Device Large Format Print Head Automotive Function Enabling Device ABS Accelerometer and Gyroscope Automobile Mass Airflow Sensor Venture Development Corporation

9. BARC Presentations24 April, 20039 Basic Auto MEMS Requirements Crash Sensing - Air Bag Deployment Vehicle Dynamic Control Rollover Detection System Antitheft System Electronic Parking Brake System Vehicle Navigation System Seat Occupancy / Passenger Position Climate Control Digital Engine Control Road Conditions

10. BARC Presentations24 April, 200310 Major Growth Areas Accelerometer – VDC and Airbags Pressure Sensor – Transmission, Brakes, Diesel Fuel Rails, Refrigeration, Tires, Fuel Evaporation,Yaw Rates, GPS Backup Position Sensor – Wheel Speed, Camshaft, Crankshaft, Pedal Positions Humidity Sensor – Cabin Comfort Distance Sensor – Collision Avoidance

11. BARC Presentations24 April, 200311 Airbag Deployment Acceleration - Continuously Measured Acceleration Exceeds Some Threshold Measured Acceleration Curve Integrated Large Velocity Change - Airbag Fired Steering Wheel and Side Airbag Firing Earlier Sensors - Distributed g Switch Insufficient Information – On/Off Type More Expensive, Less Reliable MEMS Accelerometer - Far Better Gyroscope - ANALOG Devices - Introduced

12. BARC Presentations24 April, 200312 Vehicle Dynamic Control VDC - Vehicle Skid Control Contains : Gyroscope, Low g Accelerometer, Wheel Speed Sensor Yaw Rate Prediction - Speed Measurement Gyroscope Measurement - Compared Larger Difference - Single Wheel Brake or Torque Reduction Applied, Airbag Fired Shock / Vibration Tolerant Gyroscopes - Need ANALO Devices - iMEMS Gyro Better Device

13. BARC Presentations24 April, 200313 Vehicle Rollover Detection More Appropriate - Vans, Trucks, Sport Vehicle Roll Angle and Rate Measurement - Tripping Gyroscope - Roll Rate, Integration - Angle Z - Axis Acceleration – Additional Accelerometer Sideways Sliding Cause Rollover - Curb/Object Dual Axes Low g Accelerometer – Ideal Solution Shock/Vibration Resistant Gyros - Necessary Fast Response Time Gyroscope - Essential

14. BARC Presentations24 April, 200314 Security - Antitheft Vehicle Towing - Popular Type Theft Tilt Detection System - Effective Sensor Pan European Specification - 3 0 Tilt over 3 minute period - i.e. 0.016 o tilt per second Fluid Tilt Sensor - Possible Use - Limited Tilt Range, Parked Car @ Large Tilt Angle - Sensor Ineffective Harsh Environment - Temperature Change, Sensor Performance Heavily Impaired Low g Accelerometers – Ideal Tilt Sensor

15. BARC Presentations24 April, 200315 Parking Brake System Manual Parking Brake Activation Robust Push or Pull Type Operation Braking Force Magnitude - No Concern Electronic Parking Brake - Button Activation Sensor Measures Vehicle Inclination Braking Force Requirement Determined Brake Applied - Easy Operation Low g Accelerometers - Ideal Tilt Detection Sensor Sometimes – Single Sensor Used Both Antitheft and Parking Brake Systems

16. BARC Presentations24 April, 200316 Vehicle Navigation System Standard Feature – Luxury Cars Global Positioning System– Fundamental Part GPS - Position and Altitude but No Direction Magnetometer – Early Direction Sensor Large Ferrous Metal Object - Confused Magnetometer Performance - Not Reliable Compass and GPS – Initial Start Travel Direction Match - Map Data - Direction Gyroscope - When and How Much Car Turned, Directional Data Match - Map Data Gyroscope - Heading Information, Low g Accelerometer – Position Data, Integration

17. BARC Presentations24 April, 200317 Electronic Engine Control Intake Manifold Pressure - Air to Fuel Ratio Mass Air Flow Devices - MEMS Version Barometric Pressure - Altitude Information Rich to Lean Fuel to Air Mixture Decision Cylinder Pressure Measurement - Performance Optimization - Piezoelectric/ Fiber Optic Sensor Exhaust Gas Re-circulation - Capacitive Pressure Sensor – Better Solution Hydraulic Fluid Pressure - Isolated Diaphragm Type Configuration, Sensor – ASIC Integration Fuel Injection - Silicon Fuel Injection Nozzle

18. BARC Presentations24 April, 200318 Sensor Cluster System Same Sensor Family - Variety of Measurements Accelerometer/Gyros - Sometimes 15 Sensors Difficult Integration, Unsafe Operation Fear Inertial Measurement Unit - Six Axes Inertial Measurements, Proper location Signal Routing Additional Stand Alone Sensors - Still Required Sensor Cluster Configuration - More Economical Solution, Better Micro-controller Utilization

19. BARC Presentations24 April, 200319 Commercial Off-the-Shelf MEMS Pressure Sensor

20. BARC Presentations24 April, 200320 6H-SiC High g Piezo-resistive Accelerometer

21. BARC Presentations24 April, 200321

22. BARC Presentations24 April, 200322 ARIES Airbag Deployment Test System

23. BARC Presentations24 April, 200323 Three Axes MEMS Accelerometer Sandia Laboratories

24. BARC Presentations24 April, 200324 Delphi Automotive System Air Bag

25. BARC Presentations24 April, 200325

26. BARC Presentations24 April, 200326 Piezo-resistive Pressure Sensor - CEERI

27. BARC Presentations24 April, 200327 ZnO Piezoelectric Acoustic Sensor - CEERI

28. BARC Presentations24 April, 200328 Polysilicon Load Cell - CEERI

29. BARC Presentations24 April, 200329 Three Axes Bulk Micro-machined Accelerometer Test Structure - CEERI

30. BARC Presentations24 April, 200330 Sensor Interface ASIC - Schematic

31. BARC Presentations24 April, 200331 Sensor Output – Without Conditioning

32. BARC Presentations24 April, 200332 Corrected Sensor Output

33. BARC Presentations24 April, 200333 Universal Signal Conditioner – Resistive Bridge

34. BARC Presentations24 April, 200334 Intelligent Pressure Sensor Chip

35. BARC Presentations24 April, 200335 Capacitive Sensor Interface ASIC

36. BARC Presentations24 April, 200336 Conclusions Automobile MEMS Sensor - Fast Growing Multi Billion Dollar Industry Growth Intelligent Sensor Development - Needed Interface and Signal Conditioning - Essential Hybrid Approach - Initial Stage ASICs Use - Commercial ASICS Available Sensor Cluster Approach – Better Solution Already Late Start – Sooner Starting Better

37. BARC Presentations24 April, 200337