1. Hiden Analytical Instruments for exact science www.HidenAnalytical.com HIDEN SIMS

2. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hiden SIMS Secondary Ion Mass Spectrometry Analysis Technique Instrumentation SIMS Workstation Bolt on components Applications Summary

3. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Sputter Erosion of the Specimen + ve Ions -Ve Ions - ve Molecules - +ve Molecules Sputtered Neutrals Electrons COLLISION CASCADE ALTERED LAYER

4. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Sputter Erosion of the Specimen Static SIMS Very low ion dose (~1E12 ions cm -2 ) gives surface specific measurement. Ideal for investigation of contamination, oxidation and monolayer coatings. Dynamic SIMS Higher ion dose erodes surface exposing deeper material. Monitoring mass resolved ion signals results in depth profile. Ideal for investigation of impurities (dopants) and layer structures.

5. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Sputter Erosion of the Specimen Scanning the beam across the sample Flat bottom crater for depth profiling Imaging

6. Hiden Analytical Instruments for exact science www.HidenAnalytical.com SIMS Depth Profiling - Gating For high dynamic range analysis measured signal must come only from the centre of the crater. Hiden spectrometer interface unit and MASsoft electronically gates signal

7. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Anatomy of a Depth Profile Matrix signal provides a reference for quantification and helps confirm validity of data Pre-equilibrium region before bombardment chemistry stabilises Usually a log scale due to the very high dynamic range of SIMS Sharp decay shows good depth resolution / flat crater / adequate gating Dip in matrix combined with rise in impurity indicates impurity is not dilute Signal monitored as a function of time

8. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Primary ion beams The probability of ion emission is affected greatly by the sample chemistry. As the ion beam species becomes incorporated into the specimen it can be used to modify the surface chemistry and enhance probability of ionised emission. Oxygen enhances ionisation of electropositive elements many metals and semiconductor matrix species Caesium enhances ionisation of electronegative elements halogens, many contamination species, some metals Caesium can also be used to collect secondary cluster ions (MCs + ) of most species (M) at lower sensitivity.

9. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Sensitivity SIMS is the most sensitive generally available surface analysis technique. in static SIMS <<1% monolayer concentrations are detected in dynamic SIMS detection limit can be ppb.

10. Hiden Analytical Instruments for exact science www.HidenAnalytical.com The SIMS Workstation comprises MAXIM SIMS/SNMS analyser IG20 gas ion gun and controller IG5C Cs ion gun and controller Charge compensation electron gun Viewing camera and lighting UHV multiport chamber Fast entry loadlock and transfer mechanism PC control software Compact bench housing pumping Provision for expansion

11. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hiden SIMS Products – Ion Guns IG20 Gas Ion Gun 1-5 keV, 1µA, 100µm (50µm imaging) Reliable, long life, electron impact ion source Integral bend to remove neutral particles May be used with reactive and inert gases (e.g. H, He, O, N, Ar, Xe, air) Differential pumping to preserve chamber UHV Bakeable to 250C Mounts on CF35

12. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hiden SIMS Products – Ion Guns IG5C Caesium Ion Gun 1-5 keV, 100nA, 80µm (20µm imaging) Miniature low power Cs Ion source (~8W), long life, easy replacement. Air stable Double bend to remove neutral particles Differential pumping to preserve chamber UHV Bakeable to 250C Mounts on CF35

13. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hiden SIMS Products – Ion Guns Ion Gun Control PC controlled Settings can be saved and recalled Automatic ion source warm up / cool down EHT ramp rate control Gun diagnostics Connect via TCP/IP, USB or serial Upgradeable software and firmware

14. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hiden MAXIM Very high sensitivity Off axis geometry Integrated high efficiency SNMS ioniser < 100V extraction potential

15. Hiden Analytical Instruments for exact science www.HidenAnalytical.com SNMS (sputtered neutral Mass Spectrometry) – Post Ionisation Electron impact cell ionises the sputtered neutral material Secondary ions deflected from analyser Separating the sputter and ionisation events removes most of the matrix effect associated with SIMS Easily quantifies large changes in matrix material Detection limit typically <0.1 atomic% Excellent for alloy multilayers No requirement for matrix matched reference materials Neutral species are unaffected by surface charging

16. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hiden MAXIM For SNMS operation an electron impact cell is used at the very front of the probe. This maximises the solid angle for the emitted neutrals that can be collected – improving sensitivity.

17. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Sample Viewing Important to be able to accurately target sample areas and navigate around the specimen. Normal incidence USB colour camera and LED white light source. Save images to other applications and documents. Flexible positioning to allow optimum illumination of samples (such as specula reflection for observing craters on polished surfaces). Craters visible on silicon wafer during analysis using specula illumination

18. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Sample Charging The surface of samples, principally insulators, charges during bombardment. This is primarily due to secondary electrons leaving the surface. To overcome this problem an electron gun is used to balance the lost electrons and maintain sample neutrality.

19. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Applications Static SIMS Contamination analysis Dynamic SIMS Depth profiling semiconductors and layer structures Imaging Semiconductors Industrial components SNMS Hard disc head

20. Hiden Analytical Instruments for exact science www.HidenAnalytical.com SIMS Imaging SIMS signal from raster scanned ion beam is monitored and presented as an image Chemical map shows distribution of species on the surface Can be used to find areas for subsequent depth profile or spectrum analysis Ideal for investigating transfer contamination, surface diffusion and cross sections Can be used with bevelled samples for rapid assessment of depth profile

21. Hiden Analytical Instruments for exact science www.HidenAnalytical.com SIMS SIMS - IMAGING Semiconductor bond pads must have a clean surface for successful wirebonding (ultrasonic welding). SIMS imaging ( 27 Al) reveals surface of some pads (circled) obscured by contaminant. Real-time images can be used navigate to problem area for static SIMS analysis – identified fluorocarbon from etching process.

22. Hiden Analytical Instruments for exact science www.HidenAnalytical.com SNMS Depth Profiling Depth profile shows a NiCr/Cu/NiFe layer structure primary ions 5 keV Ar from IG20 ion gun Integrated electron impact ionizer Separation of sputtering from ionization minimises matrix effects. Easily quantified composition to 100% Does not require matrix matched reference materials.

23. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Hard disk Platter comprises magnetic and non-magnetic metal layers on aluminium substrate. SNMS Depth Profile of Hard Disk Platter Polymer / lubricant Magnetic data layer Nonmagnetic layer Magnetic base Substrate ‘Contact’ layer N head S

24. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Polymer / lubricant Magnetic data layer Nonmagnetic layer Magnetic base Substrate ‘Contact’ layer N head S

25. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Polymer / lubricant Magnetic data layer Nonmagnetic layer Magnetic base Substrate ‘Contact’ layer N head S

26. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Case Study – Contamination on Diesel Injector After a period of intense engine running, a hard, stain like, deposit was observed on a fuel injector component. EDX (energy dispersive X-ray) analysis in the SEM was inconclusive as the thin nature of the deposit meant that most of the excited volume was in the underlying metal.

27. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Case Study – Contamination on Diesel Injector The flexible sample handling of the SIMS Workstation permitted mounting of the component, without further preparation. Important because cutting or grinding of the hardened steel would have exposed the component to heat and contamination. Image from instrument camera

28. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Case Study – Contamination on Diesel Injector 56 Fe SIMS images of the defective region. The right hand image shows detail in the position of the arrow, where something is blocking the iron signal from the steel.

29. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Case Study – Contamination on Diesel Injector A localised mass spectrum from the steel shows typical constituents, Fe at 54-58, with the major isotope at 56 Cr at 50-54 with the major isotope at 52 and Na (23) and K(39 and 41) being contaminants to which SIMS is extremely sensitive.

30. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Case Study – Contamination on Diesel Injector The localised mass spectrum from the defect is dominated by Ca. The defect is Ca based and it is suggested that this is due to a bio-diesel catalytic production step. This known possible fuel contaminant is limited by EU regulations to 5mg/kg (summed with the Mg content).

31. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Summary SIMS is the most sensitive surface analysis technique with ppb detection limits in many cases. It detects across the entire periodic table and provides isotopic information unavailable with chemical, electrical or optical (incl. X-ray) techniques. Analysis of the uppermost monolayer (static SIMS) Analysis of near surface and layers structure by depth profiling Depth profiles may be quantified with high accuracy and sensitivity. Spatial distribution can be observed directly by imaging.

32. Hiden Analytical Instruments for exact science www.HidenAnalytical.com Conclusion Bolt-on Hiden SIMS products provide a cost effective means of adding high performance SIMS to existing instrumentation. The Hiden SIMS Workstation is a high flexibility SIMS/SNMS tool designed specifically for ease of operation and low cost of ownership.