1. © 2004 Swagelok Company igc ™ II Modular Surface-mount Design Design

2. © 2004 Swagelok Company Features of Modular Gas Systems Reduces Space Requirements Facilitates Easy Assembly and Maintenance Reduces Inventory

3. © 2004 Swagelok Company igc ™ II Simplifies Design and Assembly Reduces Potential Leak Points Reduces Panel Weight Complies with SEMI-PR3.1 Supported by Local Swagelok Distributors Competitive Cost of Ownership

4. © 2004 Swagelok Company Modular Technology (38.9 mm) 1.53 in. 1.23 in. (31.2 mm)

5. © 2004 Swagelok Company Open Architecture Surface-mount C-ring Gaskets 3 port 2 port 1 port Surface-mount Seals C-ring Gasket Assembly For Drop-down components

6. © 2004 Swagelok Company igc ™ II Construction Igc Panel

7. © 2004 Swagelok Company igc ™ II Construction Substrate Assemblies

8. © 2004 Swagelok Company igc ™ II Construction Surface-mount Components

9. © 2004 Swagelok Company Substrate Flow Components Substrate Channel igc ™ II Construction

10. © 2004 Swagelok Company igc ™ II Construction Substrate Assemblies

11. © 2004 Swagelok Company igc ™ II Construction Igc Panel

12. © 2004 Swagelok Company igc ™ II Construction Manifold Flow Components

13. © 2004 Swagelok Company igc ™ II Construction Mounting Components Base Plate

14. © 2004 Swagelok Company Substrate Layer Substrate Assembly

15. © 2004 Swagelok Company Substrate Layer Surface-mountComponents

16. © 2004 Swagelok Company Substrate Flow Components Drop-down Surface-mountConnector MFC Connectors Substrate End Connector

17. © 2004 Swagelok Company Substrate Component Substrate Clip Substrate Channel Substrate Layer

18. © 2004 Swagelok Company Substrate Layer Lock-down plate Substrate Channel

19. © 2004 Swagelok Company Substrate Layer C-ring Gasket Substrate Channel

20. © 2004 Swagelok Company Substrate Layer Surface-mount Component Substrate Channel

21. © 2004 Swagelok Company Substrate Layer

22. © 2004 Swagelok Company Substrate Layer Load Bearing Insert

23. © 2004 Swagelok Company Manifold Channel Manifold Component Manifold Clip Manifold Layer

24. © 2004 Swagelok Company Manifold Assembly Manifold Layer

25. © 2004 Swagelok Company Manifold Layer Butt Weld End Connection Connection

26. © 2004 Swagelok Company Manifold Layer Manifold Ports

27. © 2004 Swagelok Company Manifold Layer Manifold Plug

28. © 2004 Swagelok Company Manifold Layer Cap

29. © 2004 Swagelok Company Manifold Clip Manifold Component Cap Screws Manifold Channel Substrate Channel Manifold Layer

30. © 2004 Swagelok Company Locating Rib Manifold Layer

31. © 2004 Swagelok Company Manifold Layer Parallel Manifold

32. © 2004 Swagelok Company Manifold Layer Parallel Manifold Jumper Component

33. © 2004 Swagelok Company Support Layer Mid-line Support Block Foot Block

34. © 2004 Swagelok Company AccessoriesAccessories Cartridge Style Heater Clip

35. © 2004 Swagelok Company AccessoriesAccessories Mass Flow Controller Conversion Plates Cap Vertical Port

36. © 2004 Swagelok Company igc ™ II