1. BASIC ENERGY SCIENCES -- Serving the Present, Shaping the Future Transmission Electron Aberration-free Microscope (TEAM) Project Update Altaf H. Carim Division of Materials Sciences and Engineering Office of Basic Energy Sciences U.S. Department of Energy Basic Energy Sciences Advisory Committee meeting July 23, 2002

2. Energetic electrons as a probe of matter strong (Coulombic) interactions (with both electrons and nuclei) very short wavelengths (~ 2.5 pm at 200 kV) high source brightness (~ 10 32 s -1 m -2 ster -1 ) readily focused (can form images; probes ≤ 0.1 nm for scanning) exceptional spatial resolution (can exceed 0.1 nm for imaging)

3. High-energy electron scattering: TEM, STEM hh ADF HC STEMTEM SCAN 2 SCAN 1 Controlled environment TEM at University of Illinois at Urbana-Champaign (courtesy FS-MRL, UIUC) Ray diagrams illustrating reciprocity (courtesy J. Silcox)

4. Collaborative effort from four DOE-BES centers Advanced Light Source Stanford Synchrotron Radiation Lab National Synchrotron Light Source Advanced Photon Source National Center for Electron Microscopy Shared Research Equipment Program Center for Microanalysis of Materials Electron Microscopy Center for Materials Research High-Flux Isotope Reactor Intense Pulsed Neutron Source Combustion Research Facility James R. MacDonald Lab Pulse Radiolysis Facility Materials Preparation Center Los Alamos Neutron Science Center Center for Nanophase Materials Sciences Spallation Neutron Source Linac Coherent Light Source Center for Integrated Nanotechnologies Molecular Foundry Newest NSRCs at ANL and BNL

5. What is the TEAM project? A collaborative development project to design, build, and operate next-generation electron microscopes Capitalize on several recent major developments, including the correction of limiting lens aberrations Definition of a common base instrument platform, with a modular approach to tailoring instruments for specific purposes Focus on enabling new, fundamental science via quantitative in-situ microscopy synchrotron spectral resolution at atomic spatial resolution sub-Ångstrom resolution in real time and 3-D

6. Modular experimental stations for in-situ work Experimental insert: Designed for each experiment removable w/o disturbing optics. Structural support for experiments Shrouding and support: Designed to Allow Insertion of Experiment Station Beam Path Objective lens: - Large gap - Low C c Feed throughs Provide Electrical and Mechanical Connection High takeoff angle Line of Sight to Sample for Deposition and Detectors Module loading (4” Port) - Easily inserted - Stage is integral to module (side entry or transfer) Side View Top View Courtesy Robertson, Twesten, Petrov & Zuo

7. Modular sample holder configurations Electron transparent window Electron transparent window Transportable specimen holder Wide-bodied stage Front-end of stage Volume available for experimental tools MEMS specimen Feed-through Department of Energy National Microscopy User Facilities, FS-MRL, ANL, LBL, ORNL Modular MEMS specimen holder for in situ studies (Initial designs can be employed in current generation microscopes.)

8. Spherical and Chromatic Aberration spherical aberrationchromatic aberration E 2 > E 1 r min ≈ 0.6 λ 3/4 C s 1/4 r min is resolution limit r chr ≈ C c (ΔE / E 0 ) β r chr is disk of confusion from chromatic aberration

9. Benefits of Aberration Correction d Å PCTF C s -C c -corrected C s -corrected + Monochromator Lorenzlens A lens design at 200 kV intended for magnetic imaging (Lorentz microscopy) maintaining a large, field-free volume at the sample (courtesy B. Kabius) Spherical aberration correction provides much higher current at a given probe size for quantitative STEM (courtesy J. Spence) contrast

10. More Benefits of Aberration Correction Improvement in spherical aberration provides much improved signal in smaller probe sizes (courtesy J. Silcox) 10.05.03.02.01.51.21.00.80.7 0.00 0.20 0.40 0.60 0.80 d / Å Reducing chromatic aberration enhances resolution and contrast for imaging with electrons undergoing energy losses, allowing chemically-specific images at atomic resolution (courtesy B. Kabius) Example : Si-K edge, 1.8 keV  E = 50 eV, HT : 200 kV, gap = 25 mm CcCc = 5mm CcCc = 0.1mm CcCc = 0.01mm

11. How are aberrations corrected? Quadrupole-sextupole set used to correct aberrations in Gatan imaging filter (enhanced energy-loss spectrometer) (courtesy O. Krivanek) Hexapoles and transfer doublets correct spherical aberration in current Jülich instrument (courtesy M. Haider and H. Rose) Schematic of proposed “ultracorrector”: quadrupole septuplets + many octupoles (courtesy M. Haider and H. Rose)

12. Impact of Aberration Correction on Microscopy Current (Courtesy J. Silcox, after Harald Rose) STEM (120 keV) {Batson et al.}

13. TEAM aims to enable new fundamental science Some examples: Nanoscale tomography, including 3-dimensional determination of glass structure and possibly location of individual point defects Direct observation of atomic level microstructure during controlled, quantifiable deformation In-situ control of electric and magnetic fields for direct observations of interfacial structure, segregation, and defects in active devices and changes induced by fields Single-column microanalysis, including chemical state information available by improved energy resolution

14. Recent breakthroughs and opportunities (courtesy J. Spence)

15. Recent breakthroughs and opportunities (courtesy J. Spence)

16. Recent breakthroughs and opportunities (courtesy J. Spence)

17. Recent breakthroughs and opportunities (courtesy F. Ross)

18. Recent breakthroughs and opportunities (courtesy F. Ross)

19. Recent breakthroughs and opportunities (courtesy F. Ross)

20. Status of TEAM project Preliminary “vision document” was supplied for BESAC subpanel’s 2000 report; the subpanel recommended favorable consideration of such an effort Second workshop last week at Berkeley drew attendance of over 100 and very strong interest in, and expressions of support for, the program Scientific advisory board established to provide guidance Full proposal involving at least the four electron beam microcharacterization centers, with possible participation from other parties, is expected by the end of the year. Rough estimates of cost are in the neighborhood of $70M over five years.