1. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization Maurizio Vannoni CNR-Istituto Nazionale di Ottica Applicata Firenze

2. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization Maurizio Vannoni CNR-Istituto Nazionale di Ottica Applicata Firenze

3. Interferometric microscopy for diamond surface characterization CNR – National Institute for Applied Optics in Florence CNR-Istituto Nazionale di Ottica Applicata (Firenze)

4. Principal activities of the laboratory -Optical metrology (interferometry, optical testing) -Holography -Optical engineering using ray tracing Interferometric microscopy for diamond surface characterization

5. CNR-Istituto Nazionale di Ottica Applicata (Firenze) The clean room laboratory Interferometric microscopy for diamond surface characterization

6. CNR-Istituto Nazionale di Ottica Applicata (Firenze) The clean room laboratory Interferometric microscopy for diamond surface characterization

7. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization Interferometry physical principles Eye

8. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferograms fringes obtained with monochromatic light: physical interpretation Double pass Interferometric microscopy for diamond surface characterization Transmitted wave Reflected wave Test Sample

9. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization White-light interferometry physical principle Mirror Eye Beam splitter Mirror Diffuser Light source(lamp)

10. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization Eye Beam splitter

11. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization

12. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization Light source Microscopic objective

13. WHITE LIGHT MICROINTERFEROMETER

14. Available in the laboratory

16. White light micro interferometers (WLMI) compared to AFM typical instruments WLMI Advantages: -large field of view -high accuracy on z axis (sub nanometer) -no contact measurement Disadvantages: -optical resolution on x and y axes (microns) AFM Advantages: -high accuracy on all three axes (nanometres) Disadvantages: - small field of view (typically maximum 100 microns) - contact measurement

22. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface characterization Diamond characterization examples Characterization of diamond grains

23. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Characterization of the single grain on the diamond surface

24. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Characterization of the single grain: some pictures

25. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Characterization of the two sides of a polycrystalline diamond EL100 sample 1 side AEL100 sample 1 side B EL100 sample 2 side AEL100 sample 2 side B

26. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Characterization of the two sides of a polycrystalline diamond EL100 sample 3 side AEL100 sample 1 side B EL50 sample 191 side AEL50 sample 191 side B

27. CNR-Istituto Nazionale di Ottica Applicata (Firenze) Characterization of the surface swelling in ion-beam damaged diamonds (courtesy of Ettore Vittone and Paolo Olivero)

28. CNR-Istituto Nazionale di Ottica Applicata (Firenze) The previous images have been obtained working in close collaboration with the INFN of Florence (S. Lagomarsino, G. Parrini, S. Sciortino) in the framework of a national experiment of INFN (Radiation Active Pixel -Silicon On DIAmond) aimed to develop diamond-based Silicon On Insulator material by wafer-bonding In the short term, roughness characterizations of silicon and diamond are helping to select surfaces more likely to bond together and to calculate the needed pressure to allow the bonding. Other collaborations for diamond projects: -Universit à di Torino: Ettore Vittone and staff -Università di Padova: Paolo Rossi and staff -Università di Firenze: Pier Andrea Mandò and staff