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Measurements of the Flat Band Voltage across the wafer PQC FIRENZE.

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Presentation on theme: "Measurements of the Flat Band Voltage across the wafer PQC FIRENZE."— Presentation transcript:

1 Measurements of the Flat Band Voltage across the wafer PQC FIRENZE

2 MOS Standard Moon MOS 2, STM measures Vfb on this side MOS 3 MOS 4 PQC FIRENZE OB2 Wafer

3 MOS 1 MOS2 STM MOS3 MOS4 30210431015212 PISA 79 30210432000621 PISA 81 11.8 10.8 10.8 11.6 11.4 30210431015109 PISA 75 11.8 10.2 11.8 11.8 30210431015217 PISA 79 12.2 10.4 10.2 12.6 13.4 No variation in the result performing the measurements at 75 or 100 KHz Batches rejected due to high Flat Band Voltage (and also high surface currents) in 2003 PISA 75 (310 149, 310 151, 310 156) PERUGIA 36 (309 218, 311 126 ) PISA 79 (310 152) PISA 81 (320 006, 311 130, 319 151, 313 003) PQC FIRENZE N.B. STM values to be compared with MOS2 30210431215004 PISA 82 5.0 5.6 6.0 5.4 5.0 30210431215004 PISA 83 7.0 5.2 5.4 10.8 9.2 12.0 9.8 9.4 12.6 13.0

4 PQC FIRENZE 30210431034004 PISA 80 2.4 3.6 Vfb values from Standard Moon and Vfb from STM PQC STM 30210431034016 PISA 80 3.8 4.2 30210431112907 PISA 80 3.4 4.2 30210432000621 PISA 81 11.8 10.8 30210431113002 PISA 81 11.8 10.6 30210431915105 PISA 81 11.4 10.4 30210431300302 PISA 81 12.0 10.2 30210431215004 PISA 82 5.0 6.0 30210431215020 PISA 82 4.6 5.4 30210431215406 PISA 82 4.2 5.0 30210431215423 PISA 82 4.4 5.2 PQC STM 30210430922003 PISA 83 5.8 5.2 30210430922005 PISA 83 7.0 5.4 30210430922017 PISA 83 5.2 5.6 30210430922023 PISA 83 4.6 5.2 30210431914903 PISA 83 4.6 5.4 30210431914911 PISA 83 7.0 6.8 30210431914914 PISA 83 7.0 7.6 30210431914922 PISA 83 14.6 8.4


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