1. 1 16-18 April 2002 National Center for Manufacturing Sciences – Commercial Technologies for Maintenance Activities Static Event Health Monitoring A Capability Improvement Program Tom Odom VCD Technologies San Dimas, California

2. 2 16-18 April 2002 Topics  History of the Technology  Magneto-Optics  Prototype ExMOD Detectors  Detector Fabrication  Proposed Technology Improvements  Risk Analysis & Mitigation  Conclusions

3. 3 16-18 April 2002 History of the technology ­ Bubble Memories ­ Developed in the 1970’s as an alternative to magnetic tape data storage ­ Photo lithographically defined magnetic domains on a single crystal wafer. ­ Used Large Scale Integration processes developed for the semiconductor industry ­ Light Modulation Devices ­ Developed for Military applications in the 1980’s. ­ Used Single Crystal Magneto-Optic wafers to modulate light in nano-second time frames. ­ Missile tracking applications ­ Image Projection ­ Magneto-Optic Static Event Detectors (MOSED)

4. 4 16-18 April 2002 History of the technology, (continued) ­ Magneto-Optic Static Event Detectors (MOSED) ­ Invented and demonstrated in 1990’s ­ Created to aid in the detection of ESD events. ­ Magnetic fields created by the ESD transient changes the properties of the Magneto-Optic thin film deposited on a single crystal substrate ­ Devices can be remotely reset ­ Effect is observed using a polarizing microscope Un-Switched pixel Switched pixel

5. 5 16-18 April 2002 Magneto-Optics  Magneto-Optic Effects ­ Kerr Effect for Magneto-Optic Recording ­ Faraday Effect for Light Modulation and memory devices ­ Also known as the Magneto-Optic Effect, was the first experimental evidence that light and magnetism are related ­ Result of ferromagnetic resonance in association with a magnetic field ­ Resonance causes waves to be decomposed into circularly polarized rays which propagate at different speeds (circular birefringence) ­ Upon re-combining, owing to the differences in propagation speed, a net phase offset and a resulting rotation of the angle of linear polarization results.

6. 6 16-18 April 2002 Magneto-Optics, (continued)  A magnetic field, caused by ESD transient, Changes the way light is polarized in the M-O Material  Polarization changes are permanent until device is externally reset  Effect is observed using a polarizing microscope

7. 7 16-18 April 2002 Prototype ExMOD Detectors  Manufactured from Prototype Magneto-Optic wafers  Uses mature Semiconductor wafer processing techniques and materials 3.00 0.020 0.030 Over 6000 die can be produced from a 3 inch diameter wafer TO-5 packaged Detector

8. 8 16-18 April 2002 Detector Fabrication  M-O Thin film is grown over non magnetic substrate wafer  Wafer is patterned and etched in the sequences shown below  M-O devices are characterized and tested to determine electro-optic performance

9. 9 16-18 April 2002 Prototype Detectors Advantages of the old Technology  Resettable: The device can be reset as many times as desired so long as the current remains below protection level.  Static Memory: The device remains permanently switched after an ESD event until reset. Alternatively, the device can be observed continuously to record the time and threshold of the event.  Small Size: The die can be as small as 500mm x 750mm.  External Readout: The device can be read without physical contact, using a polarizing microscope/optical system.  External Reset: The sensing device can be reset with an external non-contact device.  Solid State: Operates at extreme temperatures and environments.  Fast Switching: Provides discharge detection of fast ESD pulses generated by HBM, CDM, and MM events.  Polarity Sensitivity: If required, the device can distinguish the polarity of the ESD event.  Sensitivity Levels: High or low threshold devices will be available.  Pulse Resolution: Current devices can detect ESD events down to 300mA.  Custom Configuration: Available for customer specific applications with associated engineering development.

10. 10 16-18 April 2002 Prototype Detectors Disadvantages of the old Technology  Difficult to view ­ Expensive microscopes are required to view the event ­ Dual Polarizer analyzers required  Difficult for customer to Assemble  High Cost of Fabrication at low volume  Customer acceptance of new technology

11. 11 16-18 April 2002 Proposed Technology Improvements for CTMA / NCMS Cost share  Detector Device Improvements ­ Replace multi-domain detector (14 individual sensors) with a single, active, domain ­ Add a redundant domain for Readout verification Increase domain size to increase readout signal strength and simplification Active Domain Redundant domain

12. 12 16-18 April 2002 Proposed Technology Improvements for CTMA / NCMS Cost share Alternative Two Cell Structure to discriminate polarity

13. 13 16-18 April 2002 Proposed Technology Improvements for CTMA / NCMS Cost share Readout Reset Device Improvements Replace the polarizing microscope with an autonomous reader. The new reader will consist of the following components & subsystems ­ Polarized light source ­ Magnifier ­ Charge coupled device (CCD) camera or other sensing device ­ Optical elements that cross polarize incoming and reflected light ­ Processor ­ Result indicator To read the MOSED, a Reader is placed above and in proximity to the MOSED to determine its state of polarization To reset the device, a permanent or electro-magnet device is integrated with the readout device Example of Readout Device concept

14. 14 16-18 April 2002 Proposed Technology Improvements for CTMA / NCMS Cost share Operational Scenario

15. 15 16-18 April 2002 Risk Analysis & Mitigation  Multiple Deliveries ­ MOSED Device in discrete package ­ Static Sensitive Test devices integrated with the new SED to characterize performance ­ Multiple threshold devices for wide range of ESD sensitive devices  Diverse Applications ­ Surge Suppression device will be co-developed ­ Use state-of-the-art surge suppression technology ­ Couple with MOSED to identify existence of surge  Government Review and Concurrence throughout development cycle ­ Multiple workshops to obtain government input ­ Reduces risk of redesign to meet user needs

16. 16 16-18 April 2002 Conclusions  Detection of ESD events can benefit the life cycle of electronic devices ­ Manufacturers can improve on processes that historically have damaged, destroyed or degrade devices. ­ End users can improve their handling of ESD sensitive devices, resulting in improved reliability in the field. ­ Depot repair facilities can improve their ability to minimize field returns thereby providing added value to their repair/replacement functions.  The Existing MOSED technology can be improved to overcome deficiencies in a risk-controlled CTMA cost share development program ­ Provides Government and industry users with cost effective tools necessary to detect, analyze and control ESD events ­ Dual Use technology improvements will result in significant cost savings for government and industry.